VAT 650 Series Installation, Operating, & Maintenance Instructions page 7

Pendulum control & isolation valve with cc-link interface with valve cluster functionality
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Pressure range at 20°C
- Aluminum
- Aluminum hard anodized (650 . . - . H . . - . . . . )
- Aluminum nickel coated
Leak rate to outside at 20°C
- Aluminum
- Aluminum hard anodized (650 . . - . H . . - . . . . )
- Aluminum nickel coated
Leak rate valve seat at 20°C
- Aluminum
- Aluminum hard anodized (650 . . - . H . . - . . . . )
- Aluminum nickel coated
Cycles until first service
- Isolation cycles
(open - closed - open)
- Throttling cycles (open - max. throttle - open)
Admissible operating temperature
Mounting position
Wetted materials
- Body
- Body
- Body
- Pendulum plate
- Pendulum plate
- Pendulum plate
- Sealing ring
- Sealing ring
- Sealing ring
O
-
ther parts
- Seals
Max. differential pressure on plate during isolation
Max. differential pressure on plate
during opening and throttling
Min. controllable conductance
(N
molecular flow)
2
Dimensions
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4" - 10"), CC-Link
1 x 10E-8 mbar to 1.2 bar (abs)
(650 . . - . A . . - . . . . )
1 x 10E-6 mbar to 1.2 bar (abs)
(650 . . - . I . . - . . . . )
1 x 10E-8 mbar to 1.2 bar (abs)
1 x 10E-9 mbar l/s
(650 . . - . A . . - . . . . )
1 x 10E-5 mbar l/s
1 x 10E-9 mbar l/s
(650 . . - . I . . - . . . . )
1 x 10E-9 mbar l/s
(650 . . - . A . . - . . . . )
1 x 10E-4 mbar l/s
1 x 10E-9 mbar l/s
(650 . . - . I . . - . . . . )
200'000
1'000'000 (unheated and under clean conditions)
10°C to +150°C
any (valve seat on chamber side is recommended) (valve seat to face
chamber is recommended)
(650 . . - . A . . - . . . . )
Aluminum 3.2315 (AA6082)
Aluminum 3.2315 (AA6082) hard anodized
(650 . . - . H . . - . . . . )
(650 . . - . I . . - . . . . )
Aluminum 3.2315 (AA6082) nickel coated
Aluminum 3.2315 (AA6082)
(650 . . - . A . . - . . . . )
(650 . . - . H . . - . . . . )
Aluminum 3.2315 (AA6082) hard anodized
Aluminum 3.2315 (AA6082) nickel coated
(650 . . - . I . . - . . . . )
(650 . . - . A . . - . . . . )
Aluminum 3.2315 (AA6082), 1.4306 (304L)
Aluminum 3.2315 (AA6082) hard anodized, 1.4306 (304L)
(650 . . - . H . . - . . . . )
(650 . . - . I . . - . . . . )
Aluminum 3.2315 (AA6082) nickel coated, 1.4306 (304L)
Stainless steel 316L (1.4404 or 1.4435), 1.4122, 1.4310 (301),
1.4303 (304), 1.4571, A2 (304)
Viton
Seal materials are declared on dimensional drawing of specific valve ordering
number.
Refer to dimensional drawing of specific valve ordering number
(available on request)
Valve unit
(unheated and under clean conditions)
®
(standard). Other materials available.
DN 100
DN 160
4"
6"
(65040 - ....)
(65044 - ....)
1200 mbar in
1200 mbar in
either direction
either direction
30 mbar
10 mbar
3 l/s
5 l/s
DN 200
DN 250
8"
10"
(65046 - ....)
(65048 - ....)
1200 mbar in
1200 mbar in
either direction
either direction
5 mbar
5 mbar
10 l/s
15 l/s
280672EB
2010-12-15
7/94

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