VAT 650 Series Installation, Operating, & Maintenance Instructions
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VAT 650 Series Installation, Operating, & Maintenance Instructions

Pendulum control & isolation valve with cc-link interface with valve cluster functionality
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Pendulum control & isolation valve
with CC-Link interface
with valve cluster functionality
This manual is valid for the valve ordering number(s):
650 . . - . . TL - . . . .
650 . . - . . TN - . . . .
650 . . - . . VL - . . . .
650 . . - . . VN - . . . .
650 . . - . . UL - . . . .
650 . . - . . UN - . . . .
650 . . - . . WL - . . . .
650 . . - . . WN - . . . .
650 . . - . . GS - . . . .
650 . . - . . HS - . . . .
SPS = Sensor Power Supply
Master and Slave are configured with firmware
The fabrication number is indicated on each product as per the label
below (or similar):
made in Switzerland
Fabrication No.:
patented
650 . . – . . . . – . . . . / . . . .
A – . . . . . .
Explanation of symbols:
Read declaration carefully before you start any other
action!
Attention!
Product is in conformity with EC guidelines,
if applicable!
Disconnect electrical power and compressed air
lines. Do not touch parts under voltage!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
Installation, Operating & Maintenance Instructions
Series 650 DN 100-250 (I.D. 4" - 10"), CC-Link
(Master / 1 sensor input)
(Master / 2 sensor inputs)
(Master / 1 sensor input / ±15V SPS)
(Master / 2 sensor inputs / ±15V SPS)
(Master / 1 sensor input / PFO)
(Master / 2 sensor inputs / PFO)
(Master / 1 sensor input / ±15V SPS / PFO)
(Master / 2 sensor inputs / ±15V SPS / PFO)
(Slave)
(Slave / PFO)
PFO = Power Failure Option
650C.1E.12
. .
Fabrication number
sample picture
Keep body parts and objects away from the valve
opening!
Hot surfaces; do not touch!
Loaded springs and/or air cushions are potential
hazards!
Wear gloves!
280672EB
2010-12-15
1/94

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Summary of Contents for VAT 650 Series

  • Page 1 Do not touch parts under voltage! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 1/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 2 VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    3.11.7 OUTPUT Buffer (Master PLC) ......................61 3.11.8 INPUT Buffer (Master PLC) ....................... 65 3.11.9 Communication and timing control between Master (PLC) and Station (Valve)........ 71 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 3/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 4 Valve unit ............................... 91 Accessories ..............................92 7.3.1 Centering ring with Viton o-ring ......................93 8 Warranty ................................. 94 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 4/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...

  • Page 5: Use Of Product

    This product is a throttling pendulum valve with isolation functionality. It is intended to use for downstream pressure control applications. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. Technical data Control and actuating unit +24 VDC (±10%) @ 0.5 V pk-pk max.
  • Page 6 Refer to chapter «Sensor supply concepts» for details. Refer to chapter «Schematics» for details. PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 6/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 7 15 l/s molecular flow) Dimensions Refer to dimensional drawing of specific valve ordering number (available on request) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 7/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...

  • Page 8: Installation

    Use only clean, dry or slightly oiled air. Connection overview: Slave Master [6] Link cable [6] Link to next Slave VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 8/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 9 10. This valve has a double sealed rotary feedthrough and optionally an intermediate pumping port for the actuator shaft. This port (1/8“ ISO/NPT) could be connected to the vacuum line, see Figure 2 below. 11. These valves may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 10: Tightening Torque

    0.63 (65048 - ..- ..) Refer to «Spare parts and accessories» for centering rings ordering numbers. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 10/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 11: Mounting With O-Ring In Grooves

    For a combination of both forces (F and M) the values are invalid. Verify that the depth of the mounting screws is min. 1 x thread diameter. Please contact VAT for more information. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 11/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 12: Requirements To Sensor Connection

    Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 12/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 13: Electrical Connection

    It is also possible to connect the ground strap at system chamber if it is well connected to PE. Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 13/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 14: Sensor Supply Concepts

    650 . . - . . . S - ..slave valve, no sensor connection Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 14/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 15: Power And Sensor Connection (+24 Vdc Sensors)

    • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 15/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 16 • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 16/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 17: Power And Sensor Connection (±15 Vdc Sensors) Without Optional Sps Module

    Do not connect other pins, that may damage power supply or controller! • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 17/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 18 • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 18/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 19: Power And Sensor Connection (±15 Vdc Sensors) With Optional Sps Module

    Do not connect other pins, that may damage power supply or controller! • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 19/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 20: Power Connection For Slave Valve Only

    Note: Do not connect other pins, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 20/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 21: Cc-Link Interface Connection

    Note: The valve can be defined as «first station», «…stations…» between first and last, or «last station». If the valve at first or last station, «TR» must be installed between 1 (DA) and 2 (DB). Note: The station type for VAT valves are: Version 2 Remote Device Station. VAT Vakuumventile AG, CH-9469 Haag, Switzerland...
  • Page 22 COMBICON Strain-relief screw for shield mesh and cable CC-Link wires Connector housing VAT Shield mesh CC-Link cable VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 22/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 23 Cut off the shield wires about 15mm Side-cutting pliers Separate the shield wires in two equal quantum and place them 180° opposite VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 23/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 24 11. Fasten the strain-relief screw until the cable Screw driver can not pulled out by manual force size 4 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 24/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 25 15. Push the cover down to controller and Pozidriv screw driver fasten the cover screws (sample picture) size 2 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 25/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 26: Logic I/O

    The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and a software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'.

  • Page 27: Valve Cluster Connection

    (refer to chapter «2.6.10.1 Link adapter») 120Ω terminator category 5 link cable 120Ω terminator valve cluster daisy chain VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 27/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 28 2x RJ45 jack (female) 1x Service port Inside view with terminating resistor Factory default setting Terminating resistor OFF VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 28/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 29 Data Data not used not used not used VAT recommends a cable with the following specification: • Standard patch cable • Category 5 or higher • Double ended with shielded RJ45 connector • Straight through connection 1:1...

  • Page 30: Operation

    There is also a parameter (Position offset) for fine tuning single exhaust lines. 120Ω terminator category 5 cables 120Ω terminator valve cluster daisy chain VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 30/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...

  • Page 31: Individual Valve Control

    Master valve. It might be helpful to compensate variations in pumping speed of the individual exhaust lines. Note: Position offset can be adjusted with CPA, CV or Service Box 2. Note: The position offset value will be stored in a power save memory of each individual valve. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 31/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 32: Local Operation

    Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'.

  • Page 33: Safety Mode

    Display indicates F. *) Provided that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory. VAT Vakuumventile AG, CH-9469 Haag, Switzerland...

  • Page 34: Display Information

    1) SPS = optional ±15 VDC Sensor Power Supply module 2) PFO = optional Power Failure Option VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 34/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 35 (< 4 bar / 55 psi) Compressed air on exhaust Fatal error occurred Error code. Refer to «Trouble shooting» for details VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 35/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 36: Cc-Link Leds

    Red, flickering CRC error (temporary flickering) Red, flashing Station Number or Baud rate has changed since startup (flashing) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 36/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 37: Setup Procedure

    Further the Master valve needs the information about the total number of valves (including itself) connected to the valve cluster. Note: Prior to sending the address command, set the valve to LOCAL operation. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 37/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 38 Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link 3.6.1.1 Address setting via graphical interface (SETUP -> CLUSTER) Master valve Slave valve VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 38/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 39 Address allocation to Master valve (cluster address #0) and definition of number of valves (Master valve included!). In this case the valve cluster consists of 18 valves (12 Screenshot: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 39/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 40 Note: The device address information must be configured when setting up the valve cluster. It is stored in a power save memory and therefore will be kept even the valve is disconnected from power. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 40/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 41: Cc-Link Configuration

    Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link 3.6.2 CC-Link configuration Note: The station type for VAT valves are: Version 2 Remote Device Station. Station Number The «station number» is used to distinguish between stations on the CC-Link network. Unique station numbers in consecutive order without duplication must be used, when assigning stations to the CC-Link network.
  • Page 42 Extended cyclic settings: In the extended cyclic transmission (only Ver.2), the extended cyclic points can be set as 2 times, 4 times or 8 times of the normal cyclic transmission points. The VAT slave supports two combinations of the CC-Link parameter settings. Value Operational settings CC-Link Ver.2 / Occupies 1 station / Octuple expanded cyclic...
  • Page 43 Note: If at start up the data type value in the memory is out of range the default value is taken. In this case the data type is set to default value (0 = singed integer) and the get command i:23 add a string “False”: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 43/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 44 The format of y and z has following syntax: _ _ _ _ _ _ _ _._ _ _ _ _ Examples: i:2400-0012345.12345to00123456.12345 i:2401-0001000.00000to00001000.00000 i:240200001000.00000to00001500.00000 Example «get-command» with Terminal: Get the range of Pressure Sensor 1: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 44/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 45 Note: The internal accuracy of valve is for all positions 100’000 steps and for all pressures 1’000’000 steps. If the range of pressure and position values is rising, the accuracy of pressure and position will not rise. There is only the gain factor between the VAT valve and the CC-Link Master which will be adapted. Note: ≥...

  • Page 46: Valve And Sensor Configuration

    0 = valve will close 1 = valve will open 2 = valve no change reserved; do not change VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 46/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 47 Do sensor configuration in menu ‘Setup / Sensor’. Note: Read first current configuration and do not change reserved bits when sending new configuration. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 47/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 48: Zero

    Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1‰ of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve and sensor configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 48/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 49: Learn

    Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. If learn finished the valve goes to position mode. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 49/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 50: Close Valve

    MODE SETPOINT» for details) In «OUTPUT Buffer» > «CONTROL MODE SETPOINT» Push OPEN button Select [Open] (value = 4) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 50/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...

  • Page 51: Position Control

    Select or enter pressure setpoint In «OUTPUT Buffer» > «CONTROL MODE SETPOINT» Select [Pressure] (value = 5) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 51/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...

  • Page 52: Tuning Of Control Performance

    Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 52/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 53 Go to ‘Setup / Control Parameter’ menu. Note: It’s not possible to do ‘Sensor delay Select sensor delay. adjustment‘ via CC-Link. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 53/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 54 Go to ‘Setup / Control Parameter’ menu. Note: It’s not possible to do ‘Setpoint ramp Select setpoint ramp. adjustment‘ via CC-Link. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 54/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 55 Go to ‘Setup / Control Parameter’ menu. Select valve Note: It’s not possible to do ‘Valve speed adjustment‘ speed. via CC-Link. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 55/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 56: Cc-Link Interface

    Configuration with switch for digital input: Note: Do not connect other pins than indicated in the schematics above! Connector type: Binder M8 (99-3363-00-04). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 56/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 57: Digital Input

    Common for all digital output. Connect + or – terminal of source Digital with common. DIGITAL COMMON common See also «3.11.1 Schematics». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 57/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...

  • Page 58: Cc-Link Handshaking

    Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link 3.11.4 CC-Link Handshaking Before the CC-Link slave station (VAT valve) can be operated by the CC-Link Master (PLC), handshaking is necessary. If the handshake is not done, no data from the master will be transmitted to station.

  • Page 59: Location Of The Handshaking Bits

    : Address assigned to the master module by the station number setting. This means that the address range for this slave begins at address m of the master. n : Dependent on the VAT Operational settings mode (number of occupied stations and number of extension cycles) Operational settings mode = 1...

  • Page 60: Example Of The Handshaking By A Plc-Program

    3.11.6 Example of the handshaking by a PLC-program The following program sends an answer to the VAT CC-Link station which return a “Remote READY” flag. It is important to correct register address is used. In this example the address for this slave station (valve) starts at 1000 (hex). So m = 100 (see capture Location of the handshaking bits).

  • Page 61: Output Buffer (Master Plc)

    Not used – reserved Cluster valve monitoring address setpoint Note: For data consistency make sure your master PLC is supporting “block guarantee of cyclic data per station”. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 61/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 62 CONTROL MODE = 1 (Close) (only 650) Note: Only valid if bit FREEZE DATA VALID is set VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 62/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 63 ACCESS MODE LOCKED locked Reset bit: 1 0 remote remote Set bit: locked NOT USED (reserved) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 63/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 64 3 are available: CLUSTER VALVE POSITION CLUSTER VALVE CONTROL MODE CLUSTER VALVE STATUS VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 64/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 65: Input Buffer (Master Plc)

    Cluster valve control mode Not used – reserved Cluster valve status Not used – reserved Cluster valve warnings VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 65/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 66 10 = maintenance open 11 = maintenance close 12 = power failure 13 = safety 14 = fatal error VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 66/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 67 See bitmap table below array WARNINGS 1) To adjust range refer to chapter: «Range of pressure and position values» VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 67/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 68 NOT USED (reserved) NO ADC SIGNAL No signal from pressure sensor analog-to-digital converter NOT USED (reserved) 11-15 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 68/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 69 PROCESS DATA (DATA TYPE or RANGE of pressure and position signals) SETTING(S) NOT VALID 13-15 NOT USED (reserved) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 69/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 70 Value of CLUSTER VALVE MONITORING ADDRESS SETPOINT is out of range MONITORING ADDRESS SETPOINT NOT USED (reserved) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 70/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...

  • Page 71: Communication And Timing Control Between Master (Plc) And Station (Valve)

    = Valve CC-Link buffer Ping PongTx-bit Ping Pong Rx-bit Microcontroller Ping Pong Rx = Ping Pong Tx inverted VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 71/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...

  • Page 72: Pressure And Sensor Reading Allocation

    Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mTorr) and sensor 1 covers high range (1 Torr). Switchover between sensors is done automatically according to «Pressure control operation with 2 sensors». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 72/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 73: Trouble Shooting

    Exhaust «AIRx» compressed air input and output - Contact your local VAT service centre for support. - No compressed air at output exhaust 1) Priority of pin 14 is higher than pin 13. If pin 14 is connected to ground after pin 13 the valve will close.
  • Page 74 >3% and < 98% of sensor full scale). - Noise on sensor signal? - Make sure a shielded sensor cable is used. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 74/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 75: Additional Cc-Link Warning

    (warning 8) If you need any further information, please contact one of our service centers. You can find the addresses on our website: http://www.vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 75/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 76: Maintenance & Repairs

    Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:...

  • Page 77: Maintenance Procedures

    A critical factor influencing the maintenance period is the lifetime of the vacuum grease, being limited under increased temperature. In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance: heated ≤ 80°C *) unheated *) heated >...
  • Page 78 Refer to «Safety mode» for details. maintenance button Note: Retaining pins will move up. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 78/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 79 (65048 - ..- ..) Apply grease deposit Vacuum grease on this side VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 79/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 80 4 mm 23. Unfasten all 4 controller screws and lift controller carefully from actuator. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 80/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 81 Vacuum grease thread. Then reinstall fixation kit. 33. Clean actuator shaft and lubricate it with 0.1 ml vacuum grease. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 81/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 82 (see picture). If the centering (or distance D) is not correct, proceed with step 39. 50.0 ±0.5 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 82/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 83 Allen wrench • Tightening torques for bonnet Max. torque 6 Nm screws, see in table to the right. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 83/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 84: Option Board

    Ambient temperature [°C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 84/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 85: Retrofit / Replacement Procedure

    Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 85/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 86 SENSOR connectors Loosen and remove the LOCIC connector Open end wrench 10mm screw Lift the panel carefully VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 86/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...
  • Page 87 10. Insert all boards in reverse order as they disassembled at correct positions (see steps 9…7) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 87/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 88 (see step 2) Tighten panel screws with 1.1 Nm Pozidriv screw driver (see step 1) size 1 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 88/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...

  • Page 89: Drawing

    Installation, Operating & Maintenance Instructions Series 650 DN 100-250 (I.D. 4“ - 10”), CC-Link Drawing VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 89/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...

  • Page 90: Spare Parts

    Valve size All sizes Product ordering number 650 . . - ..Control unit Too many to list. Please contact VAT. Option board with SPS module 371399 (±15VDC sensor power supply) Option board with PFO module 371397...

  • Page 91: Valve Unit

    Actuator B2 *) 347194 346981 Note: Use only spare parts manufactured by VAT to assure safe and reliable operation! *) Refer to figures on next page to check for actuator position options. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 91/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 92: Accessories

    RJ-45 connector, shielded, for 364269 stranded cable Service Box 2 601BS-29NN-000 Control panel (rack-mount version 602BS-29LE-000 of Service Box 2) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 92/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...

  • Page 93: Centering Ring With Viton O-Ring

    32040-QAZV 32044-QAZV 32046-QAZV 32048-QAZV with Viton o-ring (for ISO-F installation only) Stainless steel 32040-QEZV 32044-QEZV 32046-QEZV 32048-QEZV VAT Vakuumventile AG, CH-9469 Haag, Switzerland 280672EB 93/94 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-12-15...

  • Page 94: Warranty

    (including any delay in or failure to deliver), packaging, storage or use of any product sold or delivered by VAT shall fail to conform to the...

This manual is also suitable for:

650 tl series650 tn series650 vl series650 vn series650 ul series650 un series ... Show all

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