VAT 653 Series Installation, Operating, & Maintenance Instructions
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VAT 653 Series Installation, Operating, & Maintenance Instructions

Pendulum control & isolation valve with logic interface
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Installation, Operating &
Maintenance Instructions
Pendulum control & isolation valve
with Logic interface
Series 653
DN 100-250 mm (I.D. 4" - 10")
This manual is valid for the valve ordering number(s):
653 . . - . .GE - . . . .
653 . . - . .AE - . . . .
653 . . - . .HE - . . . .
653 . . - . .CE - . . . .
SPS = Sensor Power Supply
configured with firmware : F01.0C.28.xx
Sample picture
980029EB
(2 sensor inputs / analog outputs)
(2 sensor inputs / analog outputs / ±15V SPS)
(2 sensor inputs / analog outputs / PFO)
(2 sensor inputs / analog outputs / ±15V SPS / PFO)
PFO = Power Failure Option
Edition 2019-10-11

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  • Page 1 Installation, Operating & Maintenance Instructions Pendulum control & isolation valve with Logic interface Series 653 DN 100-250 mm (I.D. 4“ - 10") This manual is valid for the valve ordering number(s): 653 . . - . .GE - ..(2 sensor inputs / analog outputs) (2 sensor inputs / analog outputs / ±15V SPS) 653 .
  • Page 2 The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    Series 65 Contents Description of product ................ 5 Identification of product ....................5 Use of product ......................... 5 Used abbreviations ......................5 Related documents......................5 Important information....................... 5 Technical data ......................... 6 1.6.1 Control and actuating unit ................. 6 1.6.2 Valve unit ......................
  • Page 4 Series 65 4.9.1 Pressure control operation with 2 sensors ............53 4.9.2 Control parameters ..................54 4.9.3 Choose correct control algorithm ..............58 4.9.4 Tuning of control performance ................ 59 Operation ................... 69 Normal operation ......................69 5.1.1 Remote operation .................... 69 5.1.2 Local operation ....................

  • Page 5: Description Of Product

    This product is a throttling pendulum valve with isolation functionality. It is intended to use for downstream pressure control applications. Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. Used abbreviations Abbreviation...

  • Page 6: Technical Data

    DESCRIPTION OF PRODUCT Series 65 Technical data 1.6.1 Control and actuating unit Description Power input (α) +24 VDC (±10%) @ 0.5 V pk-pk max. [connector: POWER] [653 . . - . . A . - ../ 653 . . - . . H . - ..] 70 W max.
  • Page 7 Series 65 DESCRIPTION OF PRODUCT Control and actuating unit (continuation) Sensor input Signal input voltage -10 … +10 V / Ri = 100 kΩ [connector: SENSOR] ADC resolution 0.1 mV Sampling time 2 ms [connector: POWER] Digital inputs (power connector) interlock open input 1 (adjustable with CPA 4.0) input 2...
  • Page 8 DESCRIPTION OF PRODUCT Series 65 DN 100 DN 160 DN 200 DN 250 4" 6" 8" 10" (65340 - ..) (65344 - ..) (65346 - ..) (65348 - ..) Position resolution / position control 58000 steps capability (full stroke) Closing time throttling only (full stroke) 0.7 s typ.

  • Page 9: Valve Unit

    Series 65 DESCRIPTION OF PRODUCT 1.6.2 Valve unit Description Pressure range at 20°C - Aluminum (653 . . - . A . . - ..) 1 × 10E-8 mbar to 1.2 bar (abs) - Aluminum hard anodized 1 ×...
  • Page 10 DESCRIPTION OF PRODUCT Series 65 Description ® - Seals Viton (standard). Other materials available. Seal materials are declared on dimensional drawing of specific valve ordering number. DN 100 DN 160 DN 200 DN 250 4" 6" 8" 10" (65340 - ..) (65344 - ..) (65346 - ..) (65348 - ..)

  • Page 11: Safety

    Series 65 SAFETY Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life.

  • Page 12: Personnel Qualifications

    SAFETY Series 65 Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering of T-9001-156 valve opening 12/103...

  • Page 13: Design And Function

    Series 65 DESIGN AND FUNCTION Design and Function Design Plate seal Rotary feed through seals Body seal Pendulum plate Shaft feed through seals Sealing ring Bonnet seal Bonnet Actuator Body Integrated controller Body Flange 980029EB Edition 2019-10-11 13/103...

  • Page 14: Function

    DESIGN AND FUNCTION Series 65 Function The valve plate acts, due to its pendulum motion, as a throttling element and varies the conductance of the valve opening. The integrated controller calculates the required plate position to achieve the set point pressure. Actuation is performed by a stepper motor. An encoder monitors the position. This principle ensures fast and accurate process pressure control.

  • Page 15: Pressure Control System Overview And Function

    Series 65 DESIGN AND FUNCTION 3.2.1 Pressure control system overview and function Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences. Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable Controller and actuator Seff Cable to remote control unit Cable to power supply HV Pump = Q / p...

  • Page 16: Principle Of A Pressure Control System

    DESIGN AND FUNCTION Series 65 3.2.1.1 Way of operation The controller compares the actual pressure in the process chamber given by the pressure sensor with the preset pressure. The controller uses the difference between actual and set pressure to calculate the correct position of the control valve. The controller drives the control valve into the correct position and the actual pressure again equals the set pressure.

  • Page 17: Installation

    Make sure that the supplied products are in accordance with your order. • Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if products must be returned to VAT.

  • Page 18: Installation Into The System

    INSTALLATION Series 65 Installation into the system WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 19: Installation Space Condition

    Series 65 INSTALLATION Mount valve to a clean system only. 4.2.1 Installation space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below. 100 mm 50 mm 980029EB Edition 2019-10-11 19/103...

  • Page 20: Connection Overview

    INSTALLATION Series 65 4.2.2 Connection overview System: Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable(s) Controller and actuator Cable to remote control unit Cable to power supply Pump Controller: 20/103 Edition 2019-10-11 980029EB...

  • Page 21: Installation Procedure

    8. This valve has a double sealed rotary feedthrough and optionally an intermediate pumping port for the actuator shaft. This port (1/8“ ISO/NPT) could be connected to the vacuum line, see Figure 3 below. 9. This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 22: Tightening Torque

    INSTALLATION Series 65 4.2.4 Tightening torque The torque values below are dependent on many factors, such as materials involved, surface quality, surface treatment, and lubrication. The torques below are valid if immersion depth of the mounting screws is at least once the thread diameter (min.

  • Page 23: Mounting With O-Ring In Grooves

    Series 65 INSTALLATION 4.2.6 Mounting with O-ring in grooves ISO-F ASA-LP ISO-F ASA-LP Valve size max. tightening torque max. tightening torque (Nm) (lbs . ft) DN100 / 4“ 20-23 35-40 35-40 15-17 26-30 26-30 (65340 - ..- ..) DN160 / 6“...

  • Page 24: Admissible Forces

    Verify that the depth of the mounting screws is min. 1 x thread diameter. Please contact VAT for more information. 4.2.8 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time: <...

  • Page 25: Electrical Connection

    Series 65 INSTALLATION Pressure Sensor min. 10 mm min. 10 mm Process Chamber Isolation Valve (optional) L1 + L2 < = 300 mm Electrical connection NOTICE Wrong connection Wrong connection may result in damage of controller or power supply. Connect all cables exactly as shown in the following descriptions and schematics. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under...

  • Page 26: Ground Connection

    INSTALLATION Series 65 4.3.1 Ground connection Recommendation for ground strap between controller and system chassis. ∅ ∅ Material B1 (min.) B2 (min.) d1 ( d2 ( (Length max.) copper tinned 200 mm 25 mm 25 mm 4.5 mm customized Recommended torque: 1,3…1,7Nm System Ground strap Ground...

  • Page 27: Power And Sensor Supply Concepts

    Series 65 INSTALLATION 4.3.2 Power and Sensor supply concepts This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. This valve is available with an optional sensor power supply module (SPS) that converts ±15 VDC from the 24 VDC.
  • Page 28 Low range sensor may be con- nected to sensor 1 or sensor 2 input. Do configuration accordingly • VAT fuse recommendation: (a) 7 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
  • Page 29 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 5 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 30 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 5 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 31 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 5 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 32 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 7 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...

  • Page 33: Digital Input/Output And Analogue Output Connections

    Series 65 INSTALLATION 4.3.3 Digital Input/Output and analogue output connections This interface allows for remote operation by means of a command set based on the RS232 protocol. In addition there are 2 digital inputs and 2 digital outputs. Digital inputs may be operated either by switches or by voltage sources.

  • Page 34: Service Port Connection

    INSTALLATION Series 65 4.3.4.2 Configuration with voltage source for digital inputs 4.3.5 Service port connection The service port (connector: SERVICE, USB - B) allows to connect the valve to a USB - A port of a computer. This requires a USB A–B cable male-male. The ‘Service port is used for ‘Local operation’. You can use our Software 'Control Performance Analyzer' 4.0 for Local operation, which is integrated in the IC2 and EC2 controller.

  • Page 35: Functions And Wiring

    Series 65 INSTALLATION 4.3.6 Functions and Wiring Logic interface allows for remote operation by means of digital and analog signals. Digital inputs may be operated either by switches or by voltage sources. a) Configuration with switches for digital inputs: Do not connect other pins than indicated in the schematics above! Use only screws with 4-40UNC thread for fastening the DB-25 connector! 980029EB Edition 2019-10-11...
  • Page 36 INSTALLATION Series 65 b) Configuration with voltage source for digital inputs: Do not connect other pins than indicated in the schematics above! Use only screws with 4-40UNC thread for fastening the DB-25 connector! 36/103 Edition 2019-10-11 980029EB...

  • Page 37: Digital Inputs

    Series 65 INSTALLATION 4.3.7 Digital inputs Function Signal Description Priority type This pin selects the control mode. This valve may either be operated as pressure controller or as position controller. PRESSURE CONTROL is activated as long as optocoupler is ‘on’. CONTROL Digital The PID controller controls the chamber pressure according to...
  • Page 38 INSTALLATION Series 65 Function Signal Description Priority type This function compensates the pressure gauge offset voltage and sets the pressure value to zero. In case of a 2 sensor system both sensor inputs will be adjusted. This function is initiated by the ‘off’ to ‘on’ transition of the optocoupler.

  • Page 39: Digital Outputs

    Series 65 INSTALLATION 4.3.8 Digital outputs Function Signal Description type This output is active in all operation modes and indicates either that the valve is open or that a service is requested. VALVE A service request is indicated when the valve requires cleaning due OPEN Digital to contamination.

  • Page 40: Analog Inputs And Outputs

    INSTALLATION Series 65 4.3.9 Analog inputs and outputs Function Signal Description type The meaning of the setpoint input depends on the operation mode. LEARN: A voltage of 0-10V shall be applied to this input as pressure limit for learn. The limit pressure is in linear relation to the applied voltage. 10V relates to sensor full scale.

  • Page 41: Initial Operation

    Series 65 INSTALLATION Initial operation To enable the valve cluster for pressure control setup steps 1 to 7 must be performed. In case position control is required only it’s sufficient to perform steps 1 to 4. Setup step Description Turn on external + 24VDC power supply (and external ±15 VDC for Power up sensor power supply if required).

  • Page 42: Scaling Of Pressure And Position Values

    INSTALLATION Series 65 Scaling of Pressure and Position Values The scaling for pressure and position values can be configured. • The position scaler defines the unit/range of all position values: Target Position, Actual Position, … • The pressure scaler defines the unit/range of all pressure values: Target Pressure, Actual Pressure, …...

  • Page 43: Configuration Through Cpa

    Series 65 INSTALLATION Configuration through CPA 4.6.1 Logic Interface configuration Interface configuration must be adapted according to application needs. Default configuration: OPEN input CLOSE input OPEN output CLOSE output not inverted not inverted open close • Functionality of digital inputs CLOSE VALVE and OPEN VALVE must be selected. These may be configured as ‘not inverted‘...

  • Page 44: Power Failure Option

    INSTALLATION Series 65 4.6.2 Power Failure Option These settings define what the valve is doing in case the power fails. Parameter Description Enable ‘True’ enables the power fail reaction, in case of ‘False’ there is no reaction on a power fail State Current power fail state Functionality...

  • Page 45: Sensor Configuration

    Series 65 INSTALLATION Sensor configuration 4.7.1 Sensor configuration It’s important to do proper sensor configuration. The valve internally calculates in absolute values, so the valve has to know what sensors are connected. Parameter Description Available Set to ‘True’ if a sensor is connected Enable Set to ‘True’...
  • Page 46 INSTALLATION Series 65 Threshold High [SFS low Defines the crossover area in Crossover Mode ‘Soft Switch’ and sensor] ‘Hard Switch’. Threshold Low [SFS low sensor] Example: Threshold High = 1.0 [SFS of low sensor] Threshold Low = 0.9 [SFS of low sensor] Soft switch: At pressure <= 0.9*SFS low sensor: Actual Pressure = Sensor low pressure...
  • Page 47 Series 65 INSTALLATION Sensor 1.Available = 1 Sensor 2.Available = 1 Sensor 1.Enable = 1 Sensor 2.Enable = 1 Sensor 1.Range.Data Unit = Torr Sensor 2.Range.Data Unit = mTorr Sensor 1.Range.Upper Limit Data Value = 1.0 Sensor 2.Range.Upper Limit Data Value = 100.0 Sensor 1.Range.Lower Limit Data Value = 0.0 Sensor 2.Range.Lower Limit Data Value = 0.0 Sensor 1.Range.Upper Limit Voltage Value = 10.0...

  • Page 48: Zero Adjust

    INSTALLATION Series 65 4.7.2 Zero Adjust Zero Adjust allows for the compensation of the sensor offset voltage. When Zero Adjust is performed the current value at the sensor input is equated to Zero.Adjust Target Pressure. In case of a 2 sensor system both sensor inputs will be adjusted. Note: A maximum offset voltage of +/- 1.4 V can be compensated.
  • Page 49 Series 65 INSTALLATION For RS232 it’s also possible to execute the zero adjust with the object «GENERAL CONTROL SETPOINT» of the PDO communication. In both case (perform the zero adjust with Sensor Selection, Execute and Execute or GENERAL CONTROL SETPOINT) the result is the same: Wait until process chamber is evacuated and sensor signal is not shifting anymore.

  • Page 50: Learn (Adaptive Control Algorithm)

    INSTALLATION Series 65 Learn (adaptive control algorithm) LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system.
  • Page 51 Series 65 INSTALLATION Sensor signal must not shift during LEARN. Wait until sensor signal is stable before LEARN is performed. Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn.

  • Page 52: Pressure Control

    INSTALLATION Series 65 Pressure Control The valve has four identical pressure controller units. Controller Selector defines which unit is used for the pressure control. Most applications do not need more than one controller units. But if the result of the pressure control does not meet the expectations, the different controller units can be an option for optimization: With the four controller units it’s possible to use an own controller unit for a specific pressure working point.

  • Page 53: Pressure Control Operation With 2 Sensors

    Series 65 INSTALLATION 4.9.1 Pressure control operation with 2 sensors If 2 sensor operation is enabled, changeover between the sensors is done automatically during pressure control. For configuration refer to chapter «Setup procedure». We recommend a ratio of 10:1 between the pressure gauges.

  • Page 54: Control Parameters

    INSTALLATION Series 65 4.9.2 Control parameters This chapter describes the functionality of Controller 1 to Controller 4. 4.9.2.1 Control algorithm Parameter location: Pressure Control Pressure Control->Pressure Controller 1 Pressure Control->Pressure Controller 2 Pressure Control->Pressure Controller 3 Pressure Control->Pressure Controller 4 The main parameter of a controller unit is its Control Algorithm.
  • Page 55 Series 65 INSTALLATION 4.9.2.2 Control parameter Depending on the Control Algorithm setting there are different parameters available to adjust the algorithm: Parameter Description Adaptive Gain Factor The Gain Factor is a control parameter to adapt the performance of the pressure control algorithm. A higher gain results in a faster response, higher over- / undershoots of pressure.
  • Page 56 INSTALLATION Series 65 4.9.2.3 Pressure ramp Basically, the pressure ramp is used to limit the rate of pressure change. It can also be used to minimize over- / undershoot of pressure. Actual Pressure Pressure Controller Target Pressure Target Pressure Used Ramp Target Pressure without...
  • Page 57 Series 65 INSTALLATION 4.9.2.4 Pressure ramp configuration Time Mode (Ramp Mode = Time) Slope Mode (Ramp Mode = Slope) The time within Target Pressure Used (ramp) reaches a After setting a new Target Pressure, Target Pressure new Target Pressure is defined in parameter value Used will converge the Target Pressure in the slope Ramp Time.

  • Page 58: Choose Correct Control Algorithm

    INSTALLATION Series 65 4.9.3 Choose correct control algorithm Select the configuration what your application needs. Constant gas flow available Constant gas flow System Configuration not available Tv*<= 500 sec Tv* > 500 sec Downstream Process Adaptive pressure chamber Fixed pressure controller controller Control valve...

  • Page 59: Tuning Of Control Performance

    Series 65 INSTALLATION 4.9.4 Tuning of control performance • Tuning of pressure control performance with adaptive control, refer to chapter: Tuning of control performance with adaptive pressure controller • Tuning of pressure control performance with PI control, refer to chapter: Tuning of control performance with fixed PI pressure controller •...
  • Page 60 INSTALLATION Series 65 Gain factor adjustment The gain factor effects: Stability, Response time Adjustment range is from 0.0001 to 7.5. - Higher gain results in: faster response / higher over- / undershoot of pressure - Lower gain results in: slower response/ lower over- / undershoot of pressure Adjustment procedure: 1.
  • Page 61 Series 65 INSTALLATION Setpoint ramp adjustment Setpoint ramp effects: Undershoot of pressure, Response time Adjustment range for Setpoint Ramp is from 0 to 10 s. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time.
  • Page 62 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 62/103 Edition 2019-10-11 980029EB...
  • Page 63 Series 65 INSTALLATION 4.9.4.2 Tuning of control performance with fixed PI pressure controller Optimizing P gain and I gain This valve may be used for downstream or upstream pressure control depending on configuration. The PI parameters of the pressure controller require correct adjustment. These parameters must be set once during system setup and are stored in the device memory which is power fail save.
  • Page 64 INSTALLATION Series 65 Example: 64/103 Edition 2019-10-11 980029EB...
  • Page 65 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 980029EB Edition 2019-10-11 65/103...
  • Page 66 The VAT soft pump controller requires a pump down time shorter than 10 sec. for good control results. If the required pump down time is longer than 10 sec., the pump down curve has to be partitioned into sections shorter than 10 sec.
  • Page 67 Series 65 INSTALLATION Optimizing P gain WE start by setting the P gain to 1.0 as a trial value and adjust according to the response. The pump down routine has to be controlled as follows: Move control valve into close position Start pump down by opening the pump isolation valve or starting the pump and sending the first pressure set point to the valve controller.
  • Page 68 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 68/103 Edition 2019-10-11 980029EB...

  • Page 69: Operation

    Series 65 INSTALLATION Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 70: Local Operation

    INSTALLATION Series 65 5.1.2 Local operation Local operation means that the valve is operated via the service port using a computer. You can use our software 'Control Performance Analyzer' for Local operation, which is integrated in the controller. The software is beneficial especially for setup, testing and maintenance. How to start: 1.

  • Page 71: Close Valve

    Series 65 INSTALLATION Close valve Local operation: Remote operation: (‘Control Performance Analyzer’) (Refer to chapter «OUTPUT Buffer» > «CONTROL MODE SETPOINT» for details) Push CLOSE button Refer to “Logic Interface” for details. Open valve Local operation: Remote operation: (‘Control Performance Analyzer’) (Refer to chapter «OUTPUT Buffer»...

  • Page 72: Display Information

    ERROR! REFERENCE SOURCE NOT FOUND. Series 65 Display information There is a 4 digit display located on the controller. It displays configuration, status and position information. For details refer to following tables. 5.6.1 Power up Description Digit 1 Digit 2 Digit 3 Digit 4 ●...

  • Page 73: Operation

    Series 65 ERROR! REFERENCE SOURCE NOT FOUND. ‘Ho’ indicates power up homing is running 5.6.2 Operation Description / Mode Digit 1 Digit 2 Digit 3 Digit 4 Start up (init) Start up (init) leak tight Valve closed (leak tight Valve open PRESSURE CONTROL mode POSITION CONTROL mode (e.g.

  • Page 74: Operation During Power Up

    1) Provide that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory. 74/103...

  • Page 75: Operation Under Increased Temperature

    Series 65 ERROR! REFERENCE SOURCE NOT FOUND. Operation under increased temperature CAUTION Hot valve Heated valve may result in minor or moderate injury. Do not touch valve and heating device during operation. Once heating is switched off (valve and system) await until the valve is cooled down complete before doing any work.

  • Page 76: Trouble Shooting

    1 1 Homing position can’t be reached • 1 2 Motion controller: Internal voltage error Check power supply • 1 3 Motion controller: Internal error Check for a heat accumulation temperature 1 4 Motion controller: Unexpected behavior Contact vat support 76/103 Edition 2019-10-11 980029EB...
  • Page 77 Check Parameter “Isolation Position [r]” 2 0 Break slippery detected Replace actuator 3 0 SFV: Motion controller failure in master- Contact vat support slave communication 4 0 Compressed air error Check compressed air 4 2 Power supply, low voltage detected...

  • Page 78: Maintenance

    Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT. Please write down the fabrication number of the valve before contact VAT. Refer to chapter «Identification of product»...

  • Page 79: Maintenance Procedures

    Replacement of isolation seals (gate and body seal of sealing ring) and valve cleaning • Replacement of actuator shaft seals Required frequency of cleaning and replacement of seals is depending on process conditions. VAT can give the following recommendations for preventive maintenance: heated ≤ 80 °C Replacement of unheated heated > 80 °C isolation seals (gate and 12 month but max.

  • Page 80: 7.2.1 Replacement Of Isolation Seals And Valve Cleaning

    MAINTENANCE Series 65 7.2.1 Replacement of isolation seals and valve cleaning 7.2.1.1 Required tools • • Allen Wrench 5mm Vacuum grease (see chapter spare parts) • • Open end wrench 13mm O-ring removal tool (see chapter Accessories) • Service cable USB Type A to B (PC to valve Service connector) •...
  • Page 81 Series 65 MAINTENANCE Description Required tool Open valve Stand away from valve – pendulum plate moves out of the Open end valve body. wrench Unfasten mounting screw for pendulum 13mm plate. Remove pendulum plate. pendulum plate mounting screw for pendulum plate With one hand press the MAINTENANCE BUTTON to lower the sealing ring, with your second hand...
  • Page 82 MAINTENANCE Series 65 Description Required tool Do not directly expose seals (actuator and retaining pin feedthroughs) to air stream! 15. Clean or replace gate seal if necessary. Install gate o-ring to sealing ring without grease. body seal Valve size Quantity of grease [ml] 16.

  • Page 83: 7.2.2 Replacement Of Actuator Shaft Seals

    Series 65 MAINTENANCE 7.2.2 Replacement of actuator shaft seals 7.2.2.1 Required tools • • Allen Wrench 2mm Vacuum grease (see chapter spare parts) • • Allen Wrench 4mm Open end wrench 13mm • • Allen Wrench 5mm Clean room wiper •...
  • Page 84 MAINTENANCE Series 65 Description Required tool Open valve Stand away from valve – pendulum plate moves out of Open end wrench the valve body. 13mm 6. Unfasten mounting screw for pendulum plate. 7. Remove pendulum plate. pendulum plate mounting screw pendulum plate 8.
  • Page 85 Series 65 MAINTENANCE Description Required tool 15. Disconnect 24VDC power. Wait for 60s, then disconnect cables and Allen Wrench compressed air from valve actuator. 4 mm 16. Unfasten all 2 controller screws and lift controller carefully from actuator. 17. Unfasten all 4 actuator screws and Allen Wrench remove actuator.
  • Page 86 MAINTENANCE Series 65 Description Required tool Soft tool (o-ring remover) 19. Remove actuator shaft seals carefully with a soft tool. 20. Clean actuator feedthrough with alcohol. 21. Lubricate each o-ring groove with 0.1 ml vacuum grease. Pay attention that grease is distributed constantly over the whole circumference.
  • Page 87 Series 65 MAINTENANCE 29. Install controller • Tighten the controller screws with 3 Nm. Allen Wrench • Connect cables at controller • Connect compressed air at actuator 30. Turn on power of controller. Valve moves to close position. open end wrench 13mm 31.

  • Page 88: Replacement Of Option Board

    MAINTENANCE Series 65 7.2.3 Replacement of Option board NOTICE Electrostatic discharge Electronic components could be damage. All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under power.
  • Page 89 Series 65 MAINTENANCE 7.2.3.1 Durability of power fail battery The curves in the graph show the estimated life of Ultra Cap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 °C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 °C, the corresponding life time curve will be somewhere in between the upper and the lower curve.

  • Page 90: Retrofit / Replacement Procedure

    MAINTENANCE Series 65 7.2.4 Retrofit / replacement procedure Top view on control and actuating unit with panel removed: Master board with Interface Option board All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above! Do not try out other positions, which maybe destroy the socket of boards! 90/103...
  • Page 91 Series 65 MAINTENANCE 7.2.4.1 Required tools • Pozidriv screw driver size 1 • Open end wrench 4.5mm Description Required tool Disconnect 24VDC power. Wait for 60s, then disconnect cables and compressed air from valve actuator. Allen Wrench 4 mm Unfasten all 2 controller screws and lift controller carefully from actuator.

  • Page 92: Repairs

    Series 65 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.

  • Page 93: Dismounting And Storage

    Series 65 DISMOUNTING AND STORAGE Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve.

  • Page 94: Storage

    DISMOUNTING AND STORAGE Series 65 Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.

  • Page 95: Packaging And Transport

    If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontaminating procedure at the customer's expense. 10.1...

  • Page 96: Transport

    10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging. 96/103 Edition 2019-10-11 980029EB...

  • Page 97: Disposal

    Series 65 DISPOSAL Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. 980029EB Edition 2019-10-11 97/103...

  • Page 98: Spare Parts

    «Identification of product». This is to ensure that the appropriate spare parts are supplied. • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. •...

  • Page 99: Valve Unit With Seals And Grease

    946358 Actuator B2 *) on request on request *) Refer to figures on next page to check for actuator position options. Use only spare parts manufactured by VAT to assure safe and reliable operation All “ 980029EB Edition 2019-10-11 99/103...

  • Page 100: Control And Actuating Unit

    All “Item“ refer to chapter «Drawing» 12.1.2 Control and actuating unit Description Part number Control and actuating unit Too many to list. Please contact VAT. Option board with SPS module 936205 (±15 VDC Sensor Power Supply) Option board with PFO module 936200...

  • Page 101: Accessories

    Accessories Description Part number 24 VDC power supply unit 891528 (input: 100 – 240 VAC) O-ring removal tool 234859 VAT valve cleaning tool 305709 Adapter cable for power supply with (735567) (D-Sub15 to D-Sub9) D-Sub9 connector 809474 Service cable (PC to valve Service connector) (USB A–B male-male)

  • Page 102: Appendix

    APPENDIX Series 65 Appendix No information entered on time. 102/103 Edition 2019-10-11 980029EB...
  • Page 103 Series 65 This page left blank intentionally. 980029EB Edition 2019-10-11 103/103...

This manual is also suitable for:

653 - ge series653 - ae series653 - he series653 - ce series

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