VAT 650 Series Installation, Operating, & Maintenance Instructions
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VAT 650 Series Installation, Operating, & Maintenance Instructions

Dn 350 i.d. 14", cc-link, pendulum control & isolation valve with valve cluster functionality
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Pendulum control & isolation valve
with CC-Link interface
with valve cluster functionality
This manual is valid for the valve ordering number(s):
65051-JAWL-0001
configured with firmware 650C.1E.15
The fabrication number is indicated on each product as per the label
below (or similar):
made in Switzerland
Fabrication No.:
650 . . – . . . . – . . . . / . . . .
A – . . . . . .
Explanation of symbols:
Read declaration carefully before you start any other
action!
Attention!
Product is in conformity with EC guidelines,
if applicable!
Disconnect electrical power and compressed air
lines. Do not touch parts under voltage!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
Installation, Operating & Maintenance Instructions
Series 650 DN 350 (I.D. 14"), CC-Link
Fabrication number
sample picture
Keep body parts and objects away from the valve
opening!
Hot surfaces; do not touch!
Loaded springs and/or air cushions are potential
hazards!
Wear gloves!
286241EA
2010-10-11
1/86

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Summary of Contents for VAT 650 Series

  • Page 1 Do not touch parts under voltage! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 1/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 2 VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    3.12.2 INPUT Buffer (Master PLC) ....................... 62 3.12.3 Communication and timing control between Master (PLC) and Station (Valve)........ 69 3.12.4 PRESSURE and SENSOR READING allocation ................70 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 3/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 4 Durability of power fail battery ......................81 5.2.2 Retrofit / replacement procedure ....................... 82 6 Warranty ................................. 86 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 4/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 5: Use Of Product

    This product is a throttling pendulum valve with isolation functionality. It is intended to use for downstream pressure control applications. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. Technical data Control and actuating unit Input voltage +24 VDC (±10%) @ 0.5 V pk-pk max.
  • Page 6 25 l/s molecular flow) Dimensions Refer to dimensional drawing of specific valve ordering number (available on request) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 6/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...

  • Page 7: Installation

    4 - 7 bar / 55 - 100 psi (above ATM). Use only clean, dry or slightly oiled air. Connection overview: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 7/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 8 Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 8/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 9: Tightening Torque

    10. This valve has a double sealed rotary feedthrough and optionally an intermediate pumping port for the actuator shaft. This port (1/8“ ISO/NPT) could be connected to the vacuum line, see Figure 2 below. 11. These valves may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 10: Mounting With Centering Rings

    (Nm) (lbs . ft) 65-70 48-52 hole depth (mm) hole depth (inch) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 10/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...

  • Page 11: Admissible Forces

    For a combination of both forces (F and M) the values are invalid. Verify that the depth of the mounting screws is min. 1 x thread diameter. Please contact VAT for more information. Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required.

  • Page 12: Electrical Connection

    It is also possible to connect the ground strap at system chamber if it is well connected to PE. Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 12/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 13: Sensor Supply Concepts

    650 . . - . . . S - ..slave valve, no sensor connection Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 13/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 14: Power And Sensor Connection (±15 Vdc Sensors) Using Sps Module

    • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 14/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 15: Power Connection For Slave Valve Only

    Note: Do not connect other pins as shown above, that may damage power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 15/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 16: Cc-Link Interface Connection

    Note: The valve can be defined as «first station», «…stations…» between first and last, or «last station». If the valve at first or last station, «TR» must be installed between 1 (DA) and 2 (DB). Note: The station type for VAT valves are: Version 2 Remote Device Station. VAT Vakuumventile AG, CH-9469 Haag, Switzerland...
  • Page 17 COMBICON Strain-relief screw for shield mesh and cable CC-Link wires Connector housing VAT Shield mesh CC-Link cable VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 17/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 18 Cut off the shield wires about 15mm Side-cutting pliers Separate the shield wires in two equal quantum and place them 180° opposite VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 18/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 19 11. Fasten the strain-relief screw until the cable Screw driver can not pulled out by manual force size 4 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 19/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 20 15. Push the cover down to controller and Pozidriv screw driver fasten the cover screws (sample picture) size 2 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 20/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 21 Installation, Operating & Maintenance Instructions Series 650 DN 350 (I.D. 14”), CC-Link Connector type: COMBICON 2.5 / 5 - ST – 5, 08 with special VAT housing PIN interface Signal Color of isolator (CC-Link wires) Comment connector Blue Positive RS485 RxD/TxD...

  • Page 22: Logic I/O

    Local commands Configuration with switch for digital input: Note: Do not connect other pins than indicated in the schematics above! Connector type: Binder M8 (99-3363-00-04). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 22/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 23: Digital Input

    The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and a software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'.

  • Page 24: Valve Cluster Connection

    (refer to chapter «2.6.10.1 Link adapter») 120Ω terminator category 5 link cable 120Ω terminator valve cluster daisy chain VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 24/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 25 2x RJ45 jack (female) 1x Service port Inside view with terminating resistor Factory default setting Terminating resistor OFF VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 25/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 26 Data Data not used not used not used VAT recommends a cable with the following specification: • Standard patch cable • Category 5 or higher • Double ended with shielded RJ45 connector • Straight through connection 1:1...

  • Page 27: Operation

    There is also a parameter (Position offset) for fine tuning single exhaust lines. 120Ω terminator category 5 cables 120Ω terminator valve cluster daisy chain VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 27/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...

  • Page 28: Individual Valve Control

    Master valve. It might be helpful to compensate variations in pumping speed of the individual exhaust lines. Note: Position offset can be adjusted with CPA, CV or Service Box 2. Note: The position offset value will be stored in a power save memory of each individual valve. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 28/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 29: Local Operation

    Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'.

  • Page 30: Safety Mode

    Valve position after power up is closed Valve position after power up is open Refer also to chapter «Display information». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 30/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 31: Behavior In Case Of Power Failure

    Display indicates F. *) Provided that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory. VAT Vakuumventile AG, CH-9469 Haag, Switzerland...

  • Page 32: Display Information

    1) SPS = optional ±15 VDC Sensor Power Supply module 2) PFO = optional Power Failure Option VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 32/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 33 (< 4 bar / 55 psi) Compressed air on exhaust Fatal error occurred Error code. Refer to «Trouble shooting» for details VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 33/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 34: Cc-Link Leds

    Red, flickering CRC error (temporary flickering) Red, flashing Station Number or Baud rate has changed since startup (flashing) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 34/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 35: Setup Procedure

    Further the Master valve needs the information about the total number of valves (including itself) connected to the valve cluster. Note: Prior to sending the address command, set the valve to LOCAL operation. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 35/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 36 Series 650 DN 350 (I.D. 14”), CC-Link 3.6.1.1 Address setting via graphical interface (SETUP -> CLUSTER) Master valve Slave valve VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 36/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 37 Address allocation to Master valve (cluster address #0) and definition of number of valves (Master valve included!). In this case the valve cluster consists of 18 valves (12 Screenshot: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 37/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 38 Note: The device address information must be configured when setting up the valve cluster. It is stored in a power save memory and therefore will be kept even the valve is disconnected from power. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 38/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 39: Cc-Link Configuration

    Series 650 DN 350 (I.D. 14”), CC-Link 3.6.2 CC-Link configuration Note: The station type for VAT valves are: Version 2 Remote Device Station. Station Number The «station number» is used to distinguish between stations on the CC-Link network. Unique station numbers in consecutive order without duplication must be used, when assigning stations to the CC-Link network.
  • Page 40 Extended cyclic settings: In the extended cyclic transmission (only Ver.2), the extended cyclic points can be set as 2 times, 4 times or 8 times of the normal cyclic transmission points. The VAT slave supports two combinations of the CC-Link parameter settings. Value Operational settings CC-Link Ver.2 / Occupies 1 station / Octuple expanded cyclic...
  • Page 41 Note: If at start up the data type value in the memory is out of range the default value is taken. In this case the data type is set to default value (0 = singed integer) and the get command i:23 add a string “False”: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 41/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 42 The format of y and z has following syntax: _ _ _ _ _ _ _ _._ _ _ _ _ Examples: i:2400-0012345.12345to00123456.12345 i:2401-0001000.00000to00001000.00000 i:240200001000.00000to00001500.00000 Example «get-command» with Terminal: Get the range of Pressure Sensor 1: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 42/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 43 Note: The internal accuracy of valve is for all positions 100’000 steps and for all pressures 1’000’000 steps. If the range of pressure and position values is rising, the accuracy of pressure and position will not rise. There is only the gain factor between the VAT valve and the CC-Link Master which will be adapted. Note: ≥...

  • Page 44: Valve And Sensor Configuration

    0 = valve will close 1 = valve will open 2 = valve no change reserved; do not change VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 44/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 45 Do sensor configuration in menu ‘Setup / Sensor’. Note: Read first current configuration and do not change reserved bits when sending new configuration. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 45/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 46: Zero

    Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1‰ of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve and sensor configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 46/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 47: Learn

    Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. If learn finished the valve goes to position mode. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 47/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 48: Close Valve

    MODE SETPOINT» for details) In «OUTPUT Buffer» > «CONTROL MODE SETPOINT» Push OPEN button Select [Open] (value = 4) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 48/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...

  • Page 49: Position Control

    Select or enter pressure setpoint In «OUTPUT Buffer» > «CONTROL MODE SETPOINT» Select [Pressure] (value = 5) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 49/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...

  • Page 50: Tuning Of Control Performance

    Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 50/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 51 Go to ‘Setup / Control Parameter’ menu. Note: It’s not possible to do ‘Sensor delay Select sensor delay. adjustment‘ via CC-Link. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 51/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 52 Go to ‘Setup / Control Parameter’ menu. Note: It’s not possible to do ‘Setpoint ramp Select setpoint ramp. adjustment‘ via CC-Link. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 52/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 53 Go to ‘Setup / Control Parameter’ menu. Select valve Note: It’s not possible to do ‘Valve speed adjustment‘ speed. via CC-Link. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 53/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 54: Cc-Link Interface Connection Setup

    3.11 CC-Link interface connection setup 3.11.1 CC-Link Handshaking Before the CC-Link slave station (VAT valve) can be operated by the CC-Link Master (PLC), handshaking is necessary. If the handshake is not done, no data from the master will be transmitted to station.

  • Page 55: Location Of The Handshaking Bits

    : Address assigned to the master module by the station number setting. This means that the address range for this slave begins at address m of the master. n : Dependent on the VAT Operational settings mode (number of occupied stations and number of extension cycles) Operational settings mode = 1...

  • Page 56: Example Of The Handshaking By A Plc-Program

    3.11.3 Example of the handshaking by a PLC-program The following program sends an answer to the VAT CC-Link station which return a “Remote READY” flag. It is important to correct register address is used. In this example the address for this slave station (valve) starts at 1000 (hex). So m = 100 (see capture Location of the handshaking bits).

  • Page 57: Cc-Link Interface (Process Data - Cyclic Communication)

    Not used – reserved Cluster valve monitoring address setpoint Note: For data consistency make sure your master PLC is supporting “block guarantee of cyclic data per station”. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 57/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 58 Note: Only valid if bit FREEZE DATA VALID is set CLUSTER VALVE See bitmap table below Bitmap boolean array FREEZE CONTROL VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 58/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 59 4. from locked to remote • 1st step : reset bit (1 0) 5-15 NOT USED (reserved) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 59/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 60 Valve not yet synchronized As soon as a valve is unfrozen, the valve starts to follow the Master valves plate position, meaning the plate might move immediately. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 60/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 61 3 are available: CLUSTER VALVE POSITION CLUSTER VALVE CONTROL MODE CLUSTER VALVE STATUS VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 61/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 62: Input Buffer (Master Plc)

    Not used – reserved Cluster valve control mode Cluster valve status Not used – reserved Cluster valve warnings VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 62/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 63 22 = valve blocked 25 = step loss during synch mode 40 = motor driver fault VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 63/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 64 See bitmap table below WARNINGS array 1) To adjust range refer to chapter: «Range of pressure and position values» VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 64/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 65 1 = At least one WARNING of the warning bitmaps is active (GENERAL WARNING bitmap and EXTENDED WARNING bitmap) 10-15 NOT USED (reserved) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 65/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 66 AD-converter of Sensor input 1 and/or 2 (optional, only in case of 2 sensor version) on the MEASUREMENT UNIT master board is faulty. FAULTY NOT USED (reserved) 11-15 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 66/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 67 PROCESS DATA (DATA TYPE or RANGE of pressure and position signals) SETTING(S) NOT VALID 13-15 NOT USED (reserved) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 67/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 68 Value of CLUSTER VALVE MONITORING ADDRESS SETPOINT is out of range MONITORING ADDRESS SETPOINT NOT USED (reserved) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 68/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...

  • Page 69: Communication And Timing Control Between Master (Plc) And Station (Valve)

    = Valve CC-Link buffer Ping PongTx-bit Ping Pong Rx-bit Microcontroller Ping Pong Rx = Ping Pong Tx inverted VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 69/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...

  • Page 70: Pressure And Sensor Reading Allocation

    Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mTorr) and sensor 1 covers high range (1 Torr). Switchover between sensors is done automatically according to «Pressure control operation with 2 sensors». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 70/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 71: Trouble Shooting

    Exhaust «AIRx» compressed air input and output - Contact your local VAT service centre for support. - No compressed air at output exhaust 1) Priority of pin 14 is higher than pin 13. If pin 14 is connected to ground after pin 13 the valve will close.
  • Page 72 >3% and < 98% of sensor full scale). - Noise on sensor signal? - Make sure a shielded sensor cable is used. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 72/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 73: Additional Cc-Link Warning

    (warning 8) If you need any further information, please contact one of our service centers. You can find the addresses on our website: http://www.vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 73/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 74: Maintenance & Repairs

    Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:...

  • Page 75: Maintenance Procedures

    A critical factor influencing the maintenance period is the lifetime of the vacuum grease, being limited under increased temperature. In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance: heated ≤ 80°C *) unheated *) heated >...
  • Page 76 Refer to «Safety mode» for details. Note: Retaining pins will move up. maintenance button VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 76/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 77 18 otherwise go to step 17. 17. Reassembly the valve in reverse order, step 9…3. 18. Close the valve bonnet, see step 40. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 77/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 78 24. Unfasten all 3 actuator screws and Allen Wrench remove actuator. 5 mm VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 78/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 79 • Tighten the controller screws with 3 Nm. Allen Wrench • Connect cables at controller • Connect compressed air at actuator VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 79/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 80 • Mount valve bonnet, see step 2. Max. torque 16 Nm • Tightening torques for bonnet screws, see in table to the right. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 80/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 81: Option Board

    Ambient temperature [°C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 81/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 82: Retrofit / Replacement Procedure

    Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 82/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 83 SENSOR connectors Loosen and remove the LOCIC connector Open end wrench 10mm screw Lift the panel carefully VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 83/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...
  • Page 84 10. Insert all boards in reverse order as they disassembled at correct positions (see steps 9…7) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 84/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 85 (see step 2) 13. Tighten panel screws with 1.1 Nm Pozidriv screw driver (see step 1) size 1 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 286241EA 85/86 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2010-10-11...

  • Page 86: Warranty

    (including any delay in or failure to deliver), packaging, storage or use of any product sold or delivered by VAT shall fail to conform to the...

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