VAT 653 Series Installation, Operating, & Maintenance Instructions
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VAT 653 Series Installation, Operating, & Maintenance Instructions

Pendulum control & isolation valve with rs232 interface
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Installation, Operating &
Maintenance Instructions
Pendulum control & isolation valve
with RS232 interface
Series 653
DN 100-250 mm (I.D. 4" - 10")
This manual is valid for the valve ordering number(s):
653 . . - . .GH - . . . .
653 . . - . .AH - . . . .
653 . . - . .HH - . . . .
653 . . - . .CH - . . . .
SPS = Sensor Power Supply
configured with firmware : F01.0C.28.xx
Sample picture
963283EA
(2 sensor inputs / analog outputs)
(2 sensor inputs / analog outputs / ±15V SPS)
(2 sensor inputs / analog outputs / PFO)
(2 sensor inputs / analog outputs / ±15V SPS / PFO)
PFO = Power Failure Option
Edition 2019-05-03

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Summary of Contents for VAT 653 Series

  • Page 1 Installation, Operating & Maintenance Instructions Pendulum control & isolation valve with RS232 interface Series 653 DN 100-250 mm (I.D. 4“ - 10") This manual is valid for the valve ordering number(s): 653 . . - . .GH - ..(2 sensor inputs / analog outputs) (2 sensor inputs / analog outputs / ±15V SPS) 653 .
  • Page 2 The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    Series 65 Contents Description of product ................ 6 Identification of product ....................6 Use of product ......................... 6 Used abbreviations ......................6 Related documents......................6 Important information....................... 6 Technical data ......................... 7 1.6.1 Control and actuating unit ................. 7 1.6.2 Valve unit ......................
  • Page 4 Series 65 4.10.4 Tuning of control performance ................ 58 4.11 RS232 interface commands (IC protocol) ..............68 4.11.1 RS232 command syntax ................. 68 4.11.2 Control commands ..................68 4.11.3 Inquiry commands ................... 69 4.11.4 Setup commands .................... 74 4.11.5 Pressure control algorithem ................84 4.11.6 Error messages ....................
  • Page 5 Series 65 Spare parts ..................124 12.1 Drawing ........................124 12.1.1 Valve unit with seals and grease ..............125 12.1.2 Control and actuating unit ................126 12.1.3 Accessories ....................127 Appendix ..................128 963283EA Edition 2019-05-03 5/129...

  • Page 6: Description Of Product

    This product is a throttling pendulum valve with isolation functionality. It is intended to use for downstream pressure control applications. Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. Used abbreviations Abbreviation...

  • Page 7: Technical Data

    Series 65 DESCRIPTION OF PRODUCT Technical data 1.6.1 Control and actuating unit Description Power input (α) +24 VDC (±10%) @ 0.5 V pk-pk max. [connector: POWER] [653 . . - . . A . - ../ 653 . . - . . H . - ..] 70 W max.
  • Page 8 DESCRIPTION OF PRODUCT Series 65 Control and actuating unit (continuation) Sensor input Signal input voltage -10 … +10 V / Ri = 100 kΩ [connector: SENSOR] ADC resolution 0.1 mV Sampling time 2 ms [connector: POWER] Digital inputs (power connector) interlock open input 1 (adjustable with CPA 4.0) input 2...
  • Page 9 Series 65 DESCRIPTION OF PRODUCT DN 100 DN 160 DN 200 DN 250 4" 6" 8" 10" (65340 - ..) (65344 - ..) (65346 - ..) (65348 - ..) Position resolution / position control 58000 steps capability (full stroke) Closing time throttling only (full stroke) 0.7 s typ.

  • Page 10: Valve Unit

    DESCRIPTION OF PRODUCT Series 65 1.6.2 Valve unit Description Pressure range at 20°C - Aluminum (653 . . - . A . . - ..) 1 × 10E-8 mbar to 1.2 bar (abs) - Aluminum hard anodized 1 ×...
  • Page 11 Series 65 DESCRIPTION OF PRODUCT Description ® - Seals Viton (standard). Other materials available. Seal materials are declared on dimensional drawing of specific valve ordering number. DN 100 DN 160 DN 200 DN 250 4" 6" 8" 10" (65340 - ..) (65344 - ..) (65346 - ..) (65348 - ..)

  • Page 12: Safety

    SAFETY Series 65 Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life.

  • Page 13: Personnel Qualifications

    Series 65 SAFETY Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering of T-9001-156 valve opening 963283EA...

  • Page 14: Design And Function

    DESIGN AND FUNCTION Series 65 Design and Function Design Plate seal Rotary feed through seals Body seal Pendulum plate Shaft feed through seals Sealing ring Bonnet seal Bonnet Actuator Body Integrated controller Body Flange 14/129 Edition 2019-05-03 963283EA...

  • Page 15: Function

    Series 65 DESIGN AND FUNCTION Function The valve plate acts, due to its pendulum motion, as a throttling element and varies the conductance of the valve opening. The integrated controller calculates the required plate position to achieve the set point pressure. Actuation is performed by a stepper motor. An encoder monitors the position. This principle ensures fast and accurate process pressure control.

  • Page 16: Pressure Control System Overview And Function

    DESIGN AND FUNCTION Series 65 3.2.1 Pressure control system overview and function Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences. Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable Controller and actuator Seff Cable to remote control unit Cable to power supply HV Pump = Q / p...

  • Page 17: Principle Of A Pressure Control System

    Series 65 DESIGN AND FUNCTION 3.2.1.1 Way of operation The controller compares the actual pressure in the process chamber given by the pressure sensor with the preset pressure. The controller uses the difference between actual and set pressure to calculate the correct position of the control valve. The controller drives the control valve into the correct position and the actual pressure again equals the set pressure.

  • Page 18: Installation

    Make sure that the supplied products are in accordance with your order. • Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if products must be returned to VAT.

  • Page 19: Installation Into The System

    Series 65 INSTALLATION Installation into the system WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 20: Installation Space Condition

    INSTALLATION Series 65 Mount valve to a clean system only. 4.2.1 Installation space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below. 100 mm 50 mm 20/129 Edition 2019-05-03 963283EA...

  • Page 21: Connection Overview

    Series 65 INSTALLATION 4.2.2 Connection overview System: Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable(s) Controller and actuator Cable to remote control unit Cable to power supply Pump Controller: 963283EA Edition 2019-05-03 21/129...

  • Page 22: Installation Procedure

    8. This valve has a double sealed rotary feedthrough and optionally an intermediate pumping port for the actuator shaft. This port (1/8“ ISO/NPT) could be connected to the vacuum line, see Figure 3 below. 9. This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 23: Tightening Torque

    Series 65 INSTALLATION 4.2.4 Tightening torque The torque values below are dependent on many factors, such as materials involved, surface quality, surface treatment, and lubrication. The torques below are valid if immersion depth of the mounting screws is at least once the thread diameter (min.

  • Page 24: Mounting With O-Ring In Grooves

    INSTALLATION Series 65 4.2.6 Mounting with O-ring in grooves ISO-F ASA-LP ISO-F ASA-LP Valve size max. tightening torque max. tightening torque (Nm) (lbs . ft) DN100 / 4“ 20-23 35-40 35-40 15-17 26-30 26-30 (65340 - ..- ..) DN160 / 6“...

  • Page 25: Admissible Forces

    Verify that the depth of the mounting screws is min. 1 x thread diameter. Please contact VAT for more information. 4.2.8 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time: <...

  • Page 26: Electrical Connection

    INSTALLATION Series 65 Pressure Sensor min. 10 mm min. 10 mm Process Chamber Isolation Valve (optional) L1 + L2 < = 300 mm Electrical connection NOTICE Wrong connection Wrong connection may result in damage of controller or power supply. Connect all cables exactly as shown in the following descriptions and schematics. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under...

  • Page 27: Ground Connection

    Series 65 INSTALLATION 4.3.1 Ground connection Recommendation for ground strap between controller and system chassis. ∅ ∅ Material B1 (min.) B2 (min.) d1 ( d2 ( (Length max.) copper tinned 200 mm 25 mm 25 mm 4.5 mm customized Recommended torque: 1,3…1,7Nm System Ground strap Ground...

  • Page 28: Power And Sensor Supply Concepts

    INSTALLATION Series 65 4.3.2 Power and Sensor supply concepts This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. This valve is available with an optional sensor power supply module (SPS) that converts ±15 VDC from the 24 VDC.
  • Page 29 Low range sensor may be con- nected to sensor 1 or sensor 2 input. Do configuration accordingly • VAT fuse recommendation: (a) 7 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
  • Page 30 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 5 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 31 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 5 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 32 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 5 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 33 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 7 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...

  • Page 34: Digital Input/Output And Analogue Output Connections

    INSTALLATION Series 65 4.3.3 Digital Input/Output and analogue output connections This interface allows for remote operation by means of a command set based on the RS232 protocol. In addition there are 2 digital inputs and 2 digital outputs. Digital inputs may be operated either by switches or by voltage sources.
  • Page 35 Series 65 INSTALLATION 4.3.3.2 Power connector: Configuration with voltage source for digital inputs “Interlock” 4.3.3.3 Interface Connector: Configuration with switches for digital inputs 963283EA Edition 2019-05-03 35/129...
  • Page 36 INSTALLATION Series 65 4.3.3.4 Interface Connector: Configuration with voltage source for digital inputs 36/129 Edition 2019-05-03 963283EA...
  • Page 37 Series 65 INSTALLATION 4.3.3.5 Digital inputs (Interface connector) Signal Function Description Priority type This function will close the valve. Valve will be in interlock mode as long as function is activated. After deactivation of function it will remain effective until - OPEN valve digital input is active - converse RS232 control command have been received Digital...
  • Page 38 INSTALLATION Series 65 4.3.3.6 Digital output Function Signal Description type This function will indicate that the valve is closed. If the function “ON” is configured the output is continuous on. Digital VALVE output CLOSED Configuration can be done in local operation via service port or in remote operation.

  • Page 39: Rs232 Interface Connection

    Series 65 INSTALLATION 4.3.4 RS232 interface connection Do not connect other pins than indicated in the schematics above! Use only screws with 4-40UNC thread for fastening the DB-25 connector! 4.3.5 Service port connection The service port (connector: SERVICE, USB - B) allows to connect the valve to a USB - A port of a computer.

  • Page 40: Initial Operation

    INSTALLATION Series 65 Initial operation To enable the valve cluster for pressure control setup steps 1 to 7 must be performed. In case position control is required only it’s sufficient to perform steps 1 to 4. Setup step Description Turn on external + 24VDC power supply (and external ±15 VDC for Power up sensor power supply if required).

  • Page 41: Scaling Of Pressure And Position Values

    Series 65 INSTALLATION Scaling of Pressure and Position Values The scaling for pressure and position values can be configured. • The position scaler defines the unit/range of all position values: Target Position, Actual Position, … • The pressure scaler defines the unit/range of all pressure values: Target Pressure, Actual Pressure, …...

  • Page 42: Valve Configuration

    INSTALLATION Series 65 Valve configuration Basic valve configuration must be adapted according to application needs. Definition of valve plate position in case of: • After power up, default is ‘close‘. • Power failure, default is ‘not defined‘. Only for versions that have Power Fail Option equipped [653 . . - .

  • Page 43: Digital I/O

    Series 65 INSTALLATION “close”. Delay After this delay the power failure reaction starts after the power failed Parameter location: RS232 Power Fail Option Refer to RS232-setup command for detail 4.6.3 Digital I/O On the power connecter there are two digital inputs and two digital outputs available. See chapter «Power and sensor connection»...

  • Page 44: Rs232 Interface Configuration

    INSTALLATION Series 65 RS232 Interface configuration 4.7.1 RS232 interface configuration The factory default configuration of the RS232 interface might be changed to fit the application by using the CPA4.0 SW. Baud rate Data bits Stop bits Parity 115200 Local operation: Remote operation: with ‘Control Performance Analyzer’...
  • Page 45 Series 65 INSTALLATION “Sensor Crossover” defines the behavior when the actual pressure is around the upper limit of the low range sensor and define what sensor signal is used for building the Actual Pressure. Parameter Description Crossover Mode Execution method of the transient area from one sensor to the other: Soft Switch Actual Pressure is a summation of the pressure value of sensor 1 and sensor 2.
  • Page 46 INSTALLATION Series 65 High range sensor 1 Torr PRESSURE SENSOR 1 READING 0-100% 0-100% Low range sensor 100 mTorr SENSOR 2 READING 0-10% 0 mTorr Analog sensors: Sensor 1.Available = 1 Sensor 2.Available = 1 Sensor 1.Enable = 1 Sensor 2.Enable = 1 Sensor 1.Range.Data Unit = Torr Sensor 2.Range.Data Unit = mTorr Sensor 1.Range.Upper Limit Data Value = 1.0...

  • Page 47: Zero Adjust

    Series 65 INSTALLATION 4.8.2 Zero Adjust Zero Adjust allows for the compensation of the sensor offset voltage. When Zero Adjust is performed the current value at the sensor input is equated to Zero.Adjust Target Pressure. In case of a 2 sensor system both sensor inputs will be adjusted. Note: A maximum offset voltage of +/- 1.4 V can be compensated.
  • Page 48 INSTALLATION Series 65 For RS232 it’s also possible to execute the zero adjust with the object «GENERAL CONTROL SETPOINT» of the PDO communication. In both case (perform the zero adjust with Sensor Selection, Execute and Execute or GENERAL CONTROL SETPOINT) the result is the same: Wait until process chamber is evacuated and sensor signal is not shifting anymore.

  • Page 49: Learn (Adaptive Control Algorithm)

    Series 65 INSTALLATION Learn (adaptive control algorithm) LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system.
  • Page 50 INSTALLATION Series 65 Sensor signal must not shift during LEARN. Wait until sensor signal is stable before LEARN is performed. Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn.

  • Page 51: Pressure Control

    Series 65 INSTALLATION 4.10 Pressure Control The valve has four identical pressure controller units. Controller Selector defines which unit is used for the pressure control. Most applications do not need more than one controller units. But if the result of the pressure control does not meet the expectations, the different controller units can be an option for optimization: With the four controller units it’s possible to use an own controller unit for a specific pressure working point.

  • Page 52: Pressure Control Operation With 2 Sensors

    INSTALLATION Series 65 4.10.1 Pressure control operation with 2 sensors If 2 sensor operation is enabled, changeover between the sensors is done automatically during pressure control. For configuration refer to chapter «Setup procedure». We recommend a ratio of 10:1 between the pressure gauges.

  • Page 53: Control Parameters

    Series 65 INSTALLATION 4.10.2 Control parameters This chapter describes the functionality of Controller 1 to Controller 4. 4.10.2.1 Control algorithm Parameter location: RS232 Pressure Control See command list - s:02 Pressure Control->Pressure Controller 1 Pressure Control->Pressure Controller 2 Pressure Control->Pressure Controller 3 Pressure Control->Pressure Controller 4 The main parameter of a controller unit is its Control Algorithm.
  • Page 54 INSTALLATION Series 65 4.10.2.2 Control parameter Depending on the Control Algorithm setting there are different parameters available to adjust the algorithm: Parameter Description Adaptive Gain Factor The Gain Factor is a control parameter to adapt the performance of the pressure control algorithm. A higher gain results in a faster response, higher over- / undershoots of pressure.
  • Page 55 Series 65 INSTALLATION 4.10.2.3 Pressure ramp Basically, the pressure ramp is used to limit the rate of pressure change. It can also be used to minimize over- / undershoot of pressure. Actual Pressure Pressure Controller Target Pressure Target Pressure Used Ramp Target Pressure without...
  • Page 56 INSTALLATION Series 65 4.10.2.4 Pressure ramp configuration Time Mode (Ramp Mode = Time) Slope Mode (Ramp Mode = Slope) The time within Target Pressure Used (ramp) reaches a After setting a new Target Pressure, Target Pressure new Target Pressure is defined in parameter value Used will converge the Target Pressure in the slope Ramp Time.

  • Page 57: Choose Correct Control Algorithm

    Series 65 INSTALLATION 4.10.3 Choose correct control algorithm Select the configuration what your application needs. Constant gas flow available Constant gas flow System Configuration not available Tv*<= 500 sec Tv* > 500 sec Downstream Process Adaptive pressure chamber Fixed pressure controller controller Control valve...

  • Page 58: Tuning Of Control Performance

    INSTALLATION Series 65 4.10.4 Tuning of control performance • Tuning of pressure control performance with adaptive control, refer to chapter: Tuning of control performance with adaptive pressure controller • Tuning of pressure control performance with PI control, refer to chapter: Tuning of control performance with fixed PI pressure controller •...
  • Page 59 Series 65 INSTALLATION Gain factor adjustment The gain factor effects: Stability, Response time Adjustment range is from 0.0001 to 7.5. - Higher gain results in: faster response / higher over- / undershoot of pressure - Lower gain results in: slower response/ lower over- / undershoot of pressure Adjustment procedure: 1.
  • Page 60 INSTALLATION Series 65 Setpoint ramp adjustment Setpoint ramp effects: Undershoot of pressure, Response time Adjustment range for Setpoint Ramp is from 0 to 10 s. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time.
  • Page 61 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 963283EA Edition 2019-05-03 61/129...
  • Page 62 INSTALLATION Series 65 4.10.4.2 Tuning of control performance with fixed PI pressure controller Optimizing P gain and I gain This valve may be used for downstream or upstream pressure control depending on configuration. The PI parameters of the pressure controller require correct adjustment. These parameters must be set once during system setup and are stored in the device memory which is power fail save.
  • Page 63 Series 65 INSTALLATION Example: 963283EA Edition 2019-05-03 63/129...
  • Page 64 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 64/129 Edition 2019-05-03 963283EA...
  • Page 65 The VAT soft pump controller requires a pump down time shorter than 10 sec. for good control results. If the required pump down time is longer than 10 sec., the pump down curve has to be partitioned into sections shorter than 10 sec.
  • Page 66 INSTALLATION Series 65 Optimizing P gain WE start by setting the P gain to 1.0 as a trial value and adjust according to the response. The pump down routine has to be controlled as follows: Move control valve into close position Start pump down by opening the pump isolation valve or starting the pump and sending the first pressure set point to the valve controller.
  • Page 67 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 963283EA Edition 2019-05-03 67/129...

  • Page 68: Rs232 Interface Commands (Ic Protocol)

    INSTALLATION Series 65 4.11 RS232 interface commands (IC protocol) 4.11.1 RS232 command syntax Commands and values are case sensitive. Acknowledgement within 10ms after reception of command. Wait for acknowledgement before sending a new command. Command termination of each command is CR and LF. CR = Carriage Return (0D hexadecimal), LF = Linefeed (0A hexadecimal) 4.11.2 Control commands...

  • Page 69: Inquiry Commands

    Series 65 INSTALLATION 4.11.3 Inquiry commands Command Acknowledgement Inquiry function Description A:aaaaaa data length 6 characters aaaaaa position, return value depends on configuration, refer to «Setup commands, COMMUNICATION RANGE» POSITION for details This function returns the current valve position. Remark: 999’999 is returned when the position is unknown, for example after power up during synchronization P:saaaaaaa data length 8 characters...
  • Page 70 INSTALLATION Series 65 Command Acknowledgement Inquiry function Description i:30 i:30abcdefgh data length 8 characters Access Mode 0 = local operation 1 = remote operation 2 = locked remote operation 1 = synchronization Control Mode 2 = POSITION CONTROL 3 = CLOSED 4 = OPEN 5 = PRESSURE CONTROL 6 = HOLD...
  • Page 71 Series 65 INSTALLATION Command Acknowledgement Control function Description i:32 i:32abcdefgh data length 8 characters Running 0 = No 1 = Yes Data set present 0 = Ok 1 = No (Learn necessary) Abortion 0 = Ok, Learn completed 1 = Abort by user 2 = Abort by control unit Open pressure 0 = Ok...
  • Page 72 INSTALLATION Series 65 Command Acknowledgement Inquiry function Description i:51 i:51abcdefgh data length 8 characters 0 = no service required 1 = service request, it is indicated when the control unit detects that motor steps are apparently not effective. This may happen when the valve is heavily contaminated or the gate seal is heavily sticking.
  • Page 73 Series 65 INSTALLATION Command Acknowledgement Inquiry function Description i:76 i:76xxxxxxsyyyyyyyabc data length 17 characters xxxxxx position, return value depends on configuration, refer to «Setup commands, COMMUNICATION RANGE» for details sign, 0 for positive pressure readings, - for negative pressure readings yyyyyyy pressure, return value depends on configuration, refer to «Setup commands, COMMUNICATION RANGE»...

  • Page 74: Setup Commands

    Acknowledgement Inquiry function Description i:84 i:84aaaaaa FIRMWARE data length 20 characters NUMBER aaaaaa Firmware number e.g. 700989 This function returns the VAT Firmware number. 4.11.4 Setup commands Command Acknowledgement Setup function Description c:01aa c:01 data length: 2 characters 00 = local operation (service port)
  • Page 75 Series 65 INSTALLATION data length 8 characters Valve position after power up 0 = close 1 = open 0 = close Valve position after power failure 1 = open 0 = no External isolation valve function 1 = yes Control stroke limitation 0 = no 1 = yes Network failure end position...
  • Page 76 INSTALLATION Series 65 data length 8 characters 0 = no sensor 1 = 1 sensor operation (sensor 1 input) 2 = 2 sensor operation with automatic changeover (low range = sensor 2 input, high range = sensor 1 input) 3 = 1 sensor operation (sensor 2 input) 4 = 2 sensor operation with automatic changeover (low range = sensor 1 input, high range = sensor 2 input) Remark: Sensor operation modes 2, 3 and 4 are possible with 2 sensors...
  • Page 77 Series 65 INSTALLATION Command Acknowledgement Setup function Description s:05aaaaabcd s:05 i:05 i:05aaaaabcd data length 8 characters 00001…99999 (10000 = 1.0000) Value 0 = “-“, 1 = “+” Sign Exponent 0…4 Exponent 0 = Pa Pressure Unit 1 = bar SENSOR SCALE 2 = mbar 3 = ubar 4 = Torr...
  • Page 78 INSTALLATION Series 65 Command Acknowledgement Setup function Description s:18aaaabbbb s:18 i:18 i:18aaaabbbb data length 8 characters logarithmic resolution[ millivolt /decade] 0000 = linearizing off 0001 = min. value 9999 = max. value (default value: 0000 = linearizing off) SENSOR 2 full scale [millivolt] LINEARIZATION 0001 = min.
  • Page 79 Series 65 INSTALLATION Command Acknowledgement Setup function Description s:21abcdefgh s:21 i:21 i:21abcdefgh data length 8 characters range for POSITION: 0 = 0 – 1’000, 1 = 0 – 10’000, 2 = 0 – 100’000 bcdefgh upper value for PRESSURE and SENSOR READING: 1000 ... 1000000 e.g.
  • Page 80 INSTALLATION Series 65 Command Acknowledgement Setup function Description s:20abcdefgh s:20 i:20 i:20abcdefgh data length 8 characters baud rate: 0 = 600 1 = 1200k 2 = 2400 3 = 4800 4 = 9600 5 = 19.2k 6 = 38.4k 7 = 57.6k 8 = 115.2k parity bit: 0 = even...
  • Page 81 Series 65 INSTALLATION Command Acknowledgement Setup function Description ZERO This command initiates ZERO to compensate for offset of gauge(s). Remark: Refer to «ZERO» for correct zero procedure. c:6002aaaaaaaa c:60 data length: 8 characters aaaaaaaa System base pressure, value depends on configuration, refer to «Setup commands, COMMUNICATION RANGE»...
  • Page 82 INSTALLATION Series 65 Command Acknowledgement Setup function Description V:00aaaa i:68 i:680000aaaa data length 6 characters starting with double zero for writing 8 characters starting with quadruple zero for reading VALVE SPEED aaaa valve speed, 1 ... 1000 (1 = min. speed, 1000 = max. speed) This command allows changing the actuating speed of the valve plate.
  • Page 83 Series 65 INSTALLATION Command Acknowledgement Setup function Description s:02abbc s:02 configure parameter: set parameter bb of pressure controller a to value c i:02abb get value c of parameter bb of i:02abbc pressure controller a Pressure controller: A = Adaptive downstream pressure controller B = Fixed 1 pressure controller (downstream or upstream) C = Fixed 2 pressure controller (downstream or upstream) D = Soft pump pressure controller...

  • Page 84: Pressure Control Algorithem

    INSTALLATION Series 65 Command examples: Set GAIN FACTOR of the adaptive pressure controller s:02A041.075 to the value 1.075 i:02A04  Answer is i:02A041.075  Value = 1.075 GET GAIN FACTOR of adaptive pressure controller Set RAMP TIME of soft pump pressure controller to the s:02D01281 value 281 seconds Get RAMP TIME of soft pump pressure controller...
  • Page 85 Series 65 INSTALLATION RAMP MODE Mode = 0 The RAMP TIME is dependent on the adjusted parameter ramp time and is always the same independent of the control deviation. That means the ramp time from the actual Cocnstant Time value to the setpoint value is the adjusted parameter ramp time value. Mode = 1 The RAMP TIME is dependent on the adjusted parameter ramp time and is different depending on the control deviation.
  • Page 86 INSTALLATION Series 65 4.11.5.2 Fixed 1 control algorithm Parameter Command Request Data Type Values s:02B01c s:02 c = 0.00…1 000.0 ’ ’ RAMP TIME FLOAT Default is: 0.00 i:02B01 i:02B01c c = 0 or 1 s:02B02c s:02 0 = constant time RAMP MODE UINT 1 = constant slope...
  • Page 87 Series 65 INSTALLATION Example: Set RAMP MODE of the Fixed 1 pressure controller to the value 0 (fixed time) Command Pressure Parameter selection variable Parameter value controller s:02 B (a) 02 (bb) 0 (c)  s:02B020 To optimize Fixed 1 control algorithm, refer to chapter «Tuning of control performance».
  • Page 88 INSTALLATION Series 65 4.11.5.4 Soft pump control algorithm Parameter Command Request Data Type Values s:02D01c s:02 c = 0.00…1 000.0 ’ ’ RAMP TIME FLOAT Default is: 0.00 i:02D01 i:02D01c s:02D02c c = 0…1 s:02 0 = constant time RAMP MODE UINT 1 = constant slope i:02D02c...

  • Page 89: Error Messages

    Series 65 INSTALLATION 4.11.6 Error messages Description Error message Protocol Parity error E:000001 Input buffer overflow (to many characters) E:000002 E:000003 Framing error (data length, number of stop bits) Overrun (Service interface: Input buffer register overflow) E:000004 Commands E:000010 <CR> or <LF> missing : missing E:000011 Invalid number of characters (between : and )

  • Page 90: Rs232 Interface - Commands (Pm-V2 Protocol)

    INSTALLATION Series 65 4.12 RS232 interface - commands (PM-V2 protocol) 4.12.1 Control commands (PM-V2 compatible) Note: Control commands are accepted only, when the PM controller is in REMOTE mode, except of all U: commands Control commands are acknowledged by one or two acknowledgements: 1st answer: Confirmation that command has been received, within 40 ms 2nd answer: If enabled, confirmation that command has been executed (except S: command: no 2nd answer will be replied) <CR>...Carriage Return (0D hexadecimal);...

  • Page 91: Inquiry Commands (Pm-V2 Compatible)

    Series 65 INSTALLATION 4.12.2 Inquiry commands (PM-V2 compatible) <CR>...Carriage Return (0D hexadecimal); <LF>...Linefeed (0A hexadecimal) Description Commands Acknowledgements Examples / Explanation Actual valve position A:xxxxxx A:000428 in 1/1000 of stroke = 428 * 1/1000 of stroke (0 = closed, 1000 = open) Actual pressure P:xxxxxx...
  • Page 92 INSTALLATION Series 65 Description Commands Acknowledgements Examples / Explanation Software version i:01 i:01xxxxxxxx i:0165PM3G00 = software version 65PM.3G.00 Read current sensor i:02 i:02abcdefg Current sensor setup; for abcdefg refer to setup setup command s: Read offset of sensor 1 i:08 i:08xxxxxx i:08-00013 offset = 13 /1000 * sensor 1 full scale...

  • Page 93: Setup Command (Pm-V2 Compatible)

    Series 65 INSTALLATION 4.12.3 Setup command (PM-V2 compatible) The setup command can be used same with PM-6 and integrated controller, but the single values in the command can be different as mentioned in the following table. Description Command / Acknowledgement Difference Sensor Setup s:abcdefg...

  • Page 94: Sensor Delay Command (Pm-V2 Compatible)

    INSTALLATION Series 65 4.12.4 Sensor delay command (PM-V2 compatible) Description Commands Acknowledgements Examples / Explanation t:abcdefg t:4000000 a = Response Time 0 = 0 ms 8 = 250 ms 4 = Sensor response time 80 ms 1 = 20 ms 9 = 300 ms 2 = 40 ms A = 350 ms...

  • Page 95: Operation

    Series 65 INSTALLATION Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 96: Local Operation

    INSTALLATION Series 65 5.1.2 Local operation Local operation means that the valve is operated via the service port using a computer. You can use our software 'Control Performance Analyzer' for Local operation, which is integrated in the controller. The software is beneficial especially for setup, testing and maintenance. How to start: 1.

  • Page 97: Close Valve

    Series 65 INSTALLATION Close valve Local operation: Remote operation: (‘Control Performance Analyzer’) (Refer to chapter «OUTPUT Buffer» > «CONTROL MODE SETPOINT» for details) «OUTPUT Buffer» > «CONTROL MODE SETPOINT» Push CLOSE button Select [Close] (value = 3) Open valve Local operation: Remote operation: (‘Control Performance Analyzer’) (Refer to chapter «OUTPUT Buffer»...

  • Page 98: Display Information

    ERROR! REFERENCE SOURCE NOT FOUND. Series 65 Display information There is a 4 digit display located on the controller. It displays configuration, status and position information. For details refer to following tables. 5.6.1 Power up Description Digit 1 Digit 2 Digit 3 Digit 4 ●...

  • Page 99: Operation

    Series 65 ERROR! REFERENCE SOURCE NOT FOUND. ‘Ho’ indicates power up homing is running 5.6.2 Operation Description / Mode Digit 1 Digit 2 Digit 3 Digit 4 Start up (init) Start up (init) leak tight Valve closed (leak tight Valve open PRESSURE CONTROL mode POSITION CONTROL mode (e.g.

  • Page 100: Operation During Power Up

    1) Provide that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory. 100/129...

  • Page 101: Operation Under Increased Temperature

    Series 65 ERROR! REFERENCE SOURCE NOT FOUND. Operation under increased temperature CAUTION Hot valve Heated valve may result in minor or moderate injury. Do not touch valve and heating device during operation. Once heating is switched off (valve and system) await until the valve is cooled down complete before doing any work.

  • Page 102: Trouble Shooting

    1 1 Homing position can’t be reached • 1 2 Motion controller: Internal voltage error Check power supply • 1 3 Motion controller: Internal error Check for a heat accumulation temperature 1 4 Motion controller: Unexpected behavior Contact vat support 102/129 Edition 2019-05-03 963283EA...
  • Page 103 Check Parameter “Isolation Position [r]” 2 0 Break slippery detected Replace actuator 3 0 SFV: Motion controller failure in master- Contact vat support slave communication 4 0 Compressed air error Check compressed air 4 2 Power supply, low voltage detected...

  • Page 104: Maintenance

    Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT. Please write down the fabrication number of the valve before contact VAT. Refer to chapter «Identification of product»...

  • Page 105: Maintenance Procedures

    Replacement of isolation seals (gate and body seal of sealing ring) and valve cleaning • Replacement of actuator shaft seals Required frequency of cleaning and replacement of seals is depending on process conditions. VAT can give the following recommendations for preventive maintenance: heated ≤ 80 °C Replacement of unheated heated > 80 °C isolation seals (gate and 12 month but max.

  • Page 106: 7.2.1 Replacement Of Isolation Seals And Valve Cleaning

    MAINTENANCE Series 65 7.2.1 Replacement of isolation seals and valve cleaning 7.2.1.1 Required tools • • Allen Wrench 5mm Vacuum grease (see chapter spare parts) • • Open end wrench 13mm O-ring removal tool (see chapter Accessories) • Service cable USB Type A to B (PC to valve Service connector) •...
  • Page 107 Series 65 MAINTENANCE Description Required tool Open valve Stand away from valve – pendulum plate moves out of the Open end valve body. wrench Unfasten mounting screw for pendulum 13mm plate. Remove pendulum plate. pendulum plate mounting screw for pendulum plate With one hand press the MAINTENANCE BUTTON to lower the sealing ring, with your second hand...
  • Page 108 MAINTENANCE Series 65 Description Required tool Do not directly expose seals (actuator and retaining pin feedthroughs) to air stream! 15. Clean or replace gate seal if necessary. Install gate o-ring to sealing ring without grease. body seal Valve size Quantity of grease [ml] 16.

  • Page 109: 7.2.2 Replacement Of Actuator Shaft Seals

    Series 65 MAINTENANCE 7.2.2 Replacement of actuator shaft seals 7.2.2.1 Required tools • • Allen Wrench 2mm Vacuum grease (see chapter spare parts) • • Allen Wrench 4mm Open end wrench 13mm • • Allen Wrench 5mm Clean room wiper •...
  • Page 110 MAINTENANCE Series 65 Description Required tool Open valve Stand away from valve – pendulum plate moves out of Open end wrench the valve body. 13mm 6. Unfasten mounting screw for pendulum plate. 7. Remove pendulum plate. pendulum plate mounting screw pendulum plate 8.
  • Page 111 Series 65 MAINTENANCE Description Required tool 15. Disconnect 24VDC power. Wait for 60s, then disconnect cables and Allen Wrench compressed air from valve actuator. 4 mm 16. Unfasten all 2 controller screws and lift controller carefully from actuator. 17. Unfasten all 4 actuator screws and Allen Wrench remove actuator.
  • Page 112 MAINTENANCE Series 65 Description Required tool Soft tool (o-ring remover) 19. Remove actuator shaft seals carefully with a soft tool. 20. Clean actuator feedthrough with alcohol. 21. Lubricate each o-ring groove with 0.1 ml vacuum grease. Pay attention that grease is distributed constantly over the whole circumference.
  • Page 113 Series 65 MAINTENANCE 29. Install controller • Tighten the controller screws with 3 Nm. Allen Wrench • Connect cables at controller • Connect compressed air at actuator 30. Turn on power of controller. Valve moves to close position. open end wrench 13mm 31.

  • Page 114: Replacement Of Option Board

    MAINTENANCE Series 65 7.2.3 Replacement of Option board NOTICE Electrostatic discharge Electronic components could be damage. All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under power.
  • Page 115 Series 65 MAINTENANCE 7.2.3.1 Durability of power fail battery The curves in the graph show the estimated life of Ultra Cap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 °C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 °C, the corresponding life time curve will be somewhere in between the upper and the lower curve.

  • Page 116: Retrofit / Replacement Procedure

    MAINTENANCE Series 65 7.2.4 Retrofit / replacement procedure Top view on control and actuating unit with panel removed: Master board with Interface Option board All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above! Do not try out other positions, which maybe destroy the socket of boards! 116/129...
  • Page 117 Series 65 MAINTENANCE 7.2.4.1 Required tools • Pozidriv screw driver size 1 • Open end wrench 4.5mm Description Required tool Disconnect 24VDC power. Wait for 60s, then disconnect cables and compressed air from valve actuator. Allen Wrench 4 mm Unfasten all 2 controller screws and lift controller carefully from actuator.

  • Page 118: Repairs

    Series 65 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.

  • Page 119: Dismounting And Storage

    Series 65 DISMOUNTING AND STORAGE Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve.

  • Page 120: Storage

    DISMOUNTING AND STORAGE Series 65 Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.

  • Page 121: Packaging And Transport

    If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontaminating procedure at the customer's expense. 10.1...

  • Page 122: Transport

    10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging. 122/129 Edition 2019-05-03 963283EA...

  • Page 123: Disposal

    Series 65 DISPOSAL Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. 963283EA Edition 2019-05-03 123/129...

  • Page 124: Spare Parts

    «Identification of product». This is to ensure that the appropriate spare parts are supplied. • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. •...

  • Page 125: Valve Unit With Seals And Grease

    342943 Actuator B2 *) on request on request *) Refer to figures on next page to check for actuator position options. Use only spare parts manufactured by VAT to assure safe and reliable operation All “ 963283EA Edition 2019-05-03 125/129...

  • Page 126: Control And Actuating Unit

    All “Item“ refer to chapter «Drawing» 12.1.2 Control and actuating unit Description Part number Control and actuating unit Too many to list. Please contact VAT. Option board with SPS module 936205 (±15 VDC Sensor Power Supply) Option board with PFO module 936200...

  • Page 127: Accessories

    Accessories Description Part number 24 VDC power supply unit 891528 (input: 100 – 240 VAC) O-ring removal tool 234859 VAT valve cleaning tool 305709 Adapter cable for power supply with (735567) (D-Sub15 to D-Sub9) D-Sub9 connector 809474 Service cable (PC to valve Service connector) (USB A–B male-male)

  • Page 128: Appendix

    APPENDIX Series 65 Appendix No information entered on time. 128/129 Edition 2019-05-03 963283EA...
  • Page 129 Series 65 This page left blank intentionally. 963283EA Edition 2019-05-03 129/129...

This manual is also suitable for:

653-gh series653-ah series653-hh series653-ch series

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