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Do not touch parts under voltage! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 1/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.
This product is a Butterfly control valve for downstream pressure control in vacuum systems. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. VAT Vakuumventile AG, CH-9469 Haag, Switzerland...
Refer to chapter «Sensor supply concepts» for details. Refer to chapter «Schematics» for details. PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 6/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
Do not connect or disconnect sensor cable when device is under power. Connection overview Connectors at controller panel Ground connection VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 8/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
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Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.
The stress has to be relieved by suitable means. The following forces are admissible: Axial tensile or Bending moment «M» compressive force «F » lbf. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 10/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
F = Force a = middle of aluminium part of controller (b / 2), c = pedestal 400 N VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 11/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 12/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
It is also possible to connect the ground strap at system chamber if it is well connected to PE. Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 13/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'.
This valve is designed for downstream pressure control in vacuum chambers. It can be employed in a pressure control mode or a position control mode. In both cases local or remote operation is possible. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 20/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'.
Refer also to chapter «Display information». Valve position after power up is closed Valve position after power up is open VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 22/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
Enable or disable ZERO function in menu ‘Setup / Sensor’. Send SENSOR CONFIGURATION Do sensor configuration in menu ‘Setup / Sensor’. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 26/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 27/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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[sccm] = 39.4 • p • C max. pressure to control [Torr] required lower conductance [l/s] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 28/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 30/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
This interface allows for remote operation by means of a command set based on the RS485 protocol. In addition there are 2 digital inputs and 2 digital outputs. Digital inputs may be operated either by switches or by voltage sources. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 33/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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Configuration with switches for digital inputs: Note: Do not connect other pins than indicated in the schematics above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 34/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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Configuration with voltage source for digital inputs: Note: Do not connect other pins than indicated in the schematics above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 35/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
Highest priority is 1. Functions with lower priorities will not be effective as long as higher priority functions are active. These digital inputs have higher priority than all RS485 commands. RS485 commands will not be accepted while digital inputs are active. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 37/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
SETPOINT. Note: Reading returns pressure setpoint only in case pressure control is selected, otherwise position setpoint is returned. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 39/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
«RS485 setup commands, RANGE CONFIGURATION» for details This function returns the actual pressure. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 40/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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Note: In simulation mode the valve can demonstrate pressure control capability independent of other equipment such as vacuum chamber, flow controller and gauge. Normal operation is not possible when simulation is running. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 41/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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2 (-1400000 ... 01400000 = -1.400000V ... +1.400000V) This function returns the sensor 2 offset voltage (adjusted by ZERO). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 42/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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STATUS See in chapter «Trouble shooting» for details. This function returns an error code in case of any malfunction of the device. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 43/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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This function returns firmware version of the device. [i:83][CR][LF] [i:83][xxxxxxxxxxxxxxxxxxxx][CR][LF] data length 20 characters xxx...xxx identification code, e.g. 61232-KEGJ-0002/0001/, unused digits are filled up IDENTIFICATION with spaces (20 hexadecimal) This function returns an identification code. This code is unique for each valve and allows tracing.
0 = full duplex, 1 = half duplex 000 (reserved, do not change) This function defines the interface configuration for the valve. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 45/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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High range / Low range sensor full scale ratio * 1’000 (1000 … 100000). In case of a 1 sensor valve use any value within the valid range. This function does the sensor configuration for pressure control. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 46/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mTorr) and sensor 1 covers high range (1 Torr). RANGE CONFIGURATION for PRESSURE resp. SENSOR READING is set to 10’000. Switchover between sensors is done automatically. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 47/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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104 data sets. Each data set consists of 8 data bytes and needs to be uploaded separately. Note: Make sure that all 104 data sets will be uploaded. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 48/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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00 = reset service request bit from WARNINGS RESET 01 = reset FATAL ERROR (restart control unit) This function resets warnings and errors. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 49/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
Command not accepted due to synchronization, CLOSED or OPEN by digital input, [E:][000082][CR][LF] safety mode or fatal error Hardware Command not applicable for hardware configuration [E:][000041][CR][LF] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 50/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
- Provide power to motor to allow for operation. Motor Interlock is open - Refer to «Electrical connection» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 51/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
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ZERO. - Enable ZERO. Refer to «Valve - ZERO disabled? configuration» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 52/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
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If you need any further information, please contact one of our service centers. You can find the addresses on our website: http://www.vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 53/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:...
A critical factor influencing the maintenance period is the lifetime of the vacuum grease, being limited under increased temperature. In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance: heated ≤ 80°C *) unheated *) heated >...
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Max. difference should be less than 1 turn or 0.5 turn of the screws. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 56/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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Vacuum grease 13. Deposit 0.0375 ml vacuum grease between the o-rings 14. Clean shaft from vacuum grease. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 57/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
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18. Center plate with feeler 0.04 mm gauge as shown 19. Tighten plate screws with 2 Nm. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 58/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
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Allen Wrench 21. Tighten clamp coupling with 1.1 Nm. 22. Reinstall valve into vacuum system according to chapter «Installation». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 59/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
Ambient temperature [°C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 60/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 61/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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Open end wrench 4.5 mm SENSOR and INTERFACE connectors. Lift the panel carefully. Disconnect fan cable from board. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 62/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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12. Tighten female screw locks from POWER, SENSOR and INTERFACE connectors with Open end wrench 4.5 mm 1.1 Nm (see step 1). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289917EA 63/69 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
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