VAT 653 Series Installation, Operating, & Maintenance Instructions
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VAT 653 Series Installation, Operating, & Maintenance Instructions

Pendulum control & isolation valve with devicenet® interface
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Installation, Operating &
Maintenance Instructions
Pendulum control & isolation valve
with DeviceNet® interface
Series 653
DN 100-250 mm (I.D. 4" - 10")
This manual is valid for the valve ordering number(s):
653 . . - . .GQ - . . . .
653 . . - . .AQ - . . . .
653 . . - . .HQ - . . . .
653 . . - . .CQ - . . . .
SPS = Sensor Power Supply
Configured with firmware :
DeviceNet profile:
Sample picture
982156EB
(2 sensor inputs / analog outputs)
(2 sensor inputs / analog outputs / ±15V SPS)
(2 sensor inputs / analog outputs / PFO)
(2 sensor inputs / analog outputs / ±15V SPS / PFO)
PFO = Power Failure Option
F01.0C.28.xx
Generic C (compatible to IC1 DeviceNet firmware version C)
Edition 2019-06-05

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Summary of Contents for VAT 653 Series

  • Page 1 Installation, Operating & Maintenance Instructions Pendulum control & isolation valve with DeviceNet® interface Series 653 DN 100-250 mm (I.D. 4“ - 10") This manual is valid for the valve ordering number(s): 653 . . - . .GQ - ..(2 sensor inputs / analog outputs) (2 sensor inputs / analog outputs / ±15V SPS) 653 .
  • Page 2 VAT. Offenders are liable to pay damages. The original VAT firmware and updated state of the art versions of the VAT firmware are intended for use with VAT products. The VAT firmware contains a limited, time unlimited user license.

  • Page 3: Table Of Contents

    Series 65 Contents Description of product ................ 6 Identification of product ....................6 Use of product ......................... 6 Used abbreviations ......................6 Related documents......................6 Important information....................... 6 Technical data ......................... 7 1.6.1 Control and actuating unit ................. 7 1.6.2 Valve unit ......................
  • Page 4 Series 65 4.7.1 Control Algorithm ..................... 44 4.7.2 Choose correct control algorithm ..............45 4.7.3 Learn (adaptive control algorithm) ..............46 4.7.4 Pressure ramp ....................49 4.7.5 Tuning of control performance ................ 51 Interface configuration (DeviceNet®) ................61  DeviceNet interface......................
  • Page 5 Series 65 10.2 Transport ........................103 Disposal ................... 104 Spare parts ..................105 12.1 Drawing ........................105 12.1.1 Valve unit with seals and grease ..............106 12.1.2 Control and actuating unit ................107 12.1.3 Accessories ....................108 Appendix ..................109 982156EB Edition 2019-06-05 5/110...

  • Page 6: Description Of Product

    This product is a throttling pendulum valve with isolation functionality. It is intended to use for downstream pressure control applications. Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. Used abbreviations Abbreviation...

  • Page 7: Technical Data

    Series 65 DESCRIPTION OF PRODUCT Technical data 1.6.1 Control and actuating unit Description Power input (α) +24 VDC (±10%) @ 0.5 V pk-pk max. connector: POWER [653 . . - . . A . - ../ 653 . . - . . H . - ..] 70 W max.
  • Page 8 DESCRIPTION OF PRODUCT Series 65 Control and actuating unit (continuation) Sensor input Signal input voltage -10 … +10 V / Ri = 100 kΩ connector: SENSOR ADC resolution 0.1 mV Sampling time 2 ms connector: POWER Digital inputs (power connector) interlock open input 1 (adjustable with CPA) input 2...
  • Page 9 Series 65 DESCRIPTION OF PRODUCT DN 100 DN 160 DN 200 DN 250 4" 6" 8" 10" (65340 - ..) (65344 - ..) (65346 - ..) (65348 - ..) Position resolution / position control capability 58000 steps (full stroke) Closing time throttling only (full stroke) 0.7 s typ.

  • Page 10: Valve Unit

    DESCRIPTION OF PRODUCT Series 65 1.6.2 Valve unit Description Pressure range at 20°C - Aluminum (653 . . - . A . . - ..) 1 × 10E-8 mbar to 1.2 bar (abs) - Aluminum hard anodized (653 . . - . H . . - ..) 1 ×...
  • Page 11 Series 65 DESCRIPTION OF PRODUCT Description DN 100 DN 160 DN 200 DN 250 4" 6" 8" 10" (65340 - ..) (65344 - ..) (65346 - ..) (65348 - ..) Max. differential pressure on plate during isolation 1200 mbar in 1200 mbar in 1200 mbar in 1200 mbar in...

  • Page 12: Safety

    SAFETY Series 65 Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life.

  • Page 13: Personnel Qualifications

    Series 65 SAFETY Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering of T-9001-156 valve opening 982156EB...

  • Page 14: Design And Function

    DESIGN AND FUNCTION Series 65 Design and Function Design Plate seal Rotary feed through seals Body seal Pendulum plate Shaft feed through seals Sealing ring Bonnet seal Bonnet Actuator Body Integrated controller Body Flange 14/110 Edition 2019-06-05 982156EB...

  • Page 15: Function

    Series 65 DESIGN AND FUNCTION Function The valve plate acts, due to its pendulum motion, as a throttling element and varies the conductance of the valve opening. The integrated controller calculates the required plate position to achieve the set point pressure. Actuation is performed by a stepper motor. An encoder monitors the position. This principle ensures fast and accurate process pressure control.

  • Page 16: Pressure Control System Overview And Function

    DESIGN AND FUNCTION Series 65 3.2.1 Pressure control system overview and function Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences. Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable Controller and actuator Seff Cable to remote control unit Cable to power supply HV Pump = Q / p...

  • Page 17: Principle Of A Pressure Control System

    Series 65 DESIGN AND FUNCTION 3.2.1.1 Way of operation The controller compares the actual pressure in the process chamber given by the pressure sensor with the preset pressure. The controller uses the difference between actual and set pressure to calculate the correct position of the control valve. The controller drives the control valve into the correct position and the actual pressure again equals the set pressure.

  • Page 18: Installation

    Make sure that the supplied products are in accordance with your order. • Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if products must be returned to VAT.

  • Page 19: Installation Into The System

    Series 65 INSTALLATION Installation into the system WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 20: Installation Space Condition

    INSTALLATION Series 65 Mount valve to a clean system only. 4.2.1 Installation space condition Install the valve with integrated controller with space for dismantling and air circulation as shown in figure below. 100 mm 50 mm 4.2.2 Connection overview System: Valve Process chamber Gas inlet...
  • Page 21 Series 65 INSTALLATION Controller: 982156EB Edition 2019-06-05 21/110...

  • Page 22: Installation Procedure

    8. This valve has a double sealed rotary feedthrough and optionally an intermediate pumping port for the actuator shaft. This port (1/8“ ISO/NPT) could be connected to the vacuum line, see Figure 3 below. 9. This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 23: Tightening Torque

    Series 65 INSTALLATION 4.2.4 Tightening torque The torque values below are dependent on many factors, such as materials involved, surface quality, surface treatment, and lubrication. The torques below are valid if immersion depth of the mounting screws is at least once the thread diameter (min.

  • Page 24: Mounting With O-Ring In Grooves

    INSTALLATION Series 65 4.2.6 Mounting with O-ring in grooves ISO-F ASA-LP ISO-F ASA-LP Valve size max. tightening torque max. tightening torque (Nm) (lbs . ft) DN100 / 4“ 20-23 35-40 35-40 15-17 26-30 26-30 65340 - ..- ..DN160 / 6“...

  • Page 25: Admissible Forces

    65348 - ..- ..For a combination of both forces (F and M) the values are invalid. Verify that the depth of the mounting screws is min. 1 x thread diameter. Please contact VAT for more information. 982156EB Edition 2019-06-05 25/110...

  • Page 26: Requirements To Sensor Connection

    INSTALLATION Series 65 4.2.8 Requirements to sensor connection To achieve fast and accurate pressure control a fast sensor response is required. Sensor response time: < 50ms. The sensor is normally connected to the chamber by a pipe. To maintain that the response time is not degraded by this connection it needs to meet the following requirements: •...

  • Page 27: Ground Connection

    Series 65 INSTALLATION 4.3.1 Ground connection Recommendation for ground strap between controller and system chassis. ∅ ∅ Material B1 (min.) B2 (min.) d1 ( d2 ( (Length max.) copper tinned 200 mm 25 mm 25 mm 4.5 mm customized Recommended torque: 1,3…1,7Nm System Ground strap Ground...

  • Page 28: Power And Sensor Supply Concepts

    INSTALLATION Series 65 4.3.2 Power and sensor supply concepts This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. This valve is available with an optional sensor power supply module (SPS) that converts ±15 VDC from the 24 VDC.
  • Page 29 Low range sensor may be con- nected to sensor 1 or sensor 2 input. Do configuration accordingly • VAT fuse recommendation: (a) 7 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
  • Page 30 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 5 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 31 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 5 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 32 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 5 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 33 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 7 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...

  • Page 34: Digital In- Output And Analogue Output Connections

    INSTALLATION Series 65 4.3.3 Digital in- output and analogue output connections This interface allows for remote operation by means of a command set based on the DeviceNet protocol. In addition there are 2 digital inputs and 2 digital outputs. Digital inputs may be operated either by switches or by voltage sources.
  • Page 35 Series 65 INSTALLATION 4.3.3.3 Digital inputs Function Description This function will close the valve. • The input has priority over the remote interface • The input can be inverted INTERLOCK • CLOSE The input can be switched off • The function can be set to function INTERLOCK OPEN •...

  • Page 36: Devicenet® Interface Connection

    INSTALLATION Series 65 4.3.4 DeviceNet® interface connection Connector type: Micro-style male (5 pin), connector is shown on panel refer to chapter «Installation into the system». At valve controller DeviceNet® cable Name Wire color Description Drain Bare Shield DeviceNet® power supply + Black DeviceNet®...

  • Page 37: Initial Operation

    Series 65 INSTALLATION Initial operation To enable the valve cluster for pressure control setup steps 1 to 6 must be performed. In case position control is required only it’s sufficient to perform steps 1 to 3. Setup step Description Turn on external + 24VDC power supply (and external ±15 VDC for sensor power supply if required).

  • Page 38: Valve Configuration

    INSTALLATION Series 65 Valve configuration Basic valve configuration must be adapted according to application needs. Definition of valve plate position in case of: • After power up, default is ‘close‘. • Power failure, default is ‘not defined‘. Only for versions that have Power Fail Option equipped [653 .

  • Page 39: Power Failure Option

    Series 65 INSTALLATION 4.5.2 Power Failure Option These settings define what the valve is doing in case the power fails. Parameter Description Enable ‘True’ enables the power fail reaction, in case of ‘False’ there is no reaction on a power fail State Current power fail state Functionality...

  • Page 40: Sensor Configuration

    INSTALLATION Series 65 Sensor configuration 4.6.1 Sensor configuration It’s important to do proper sensor configuration. The valve internally calculates in absolute values, so the valve has to know what sensors are connected. Parameter Description Available Set to ‘True’ if a sensor is connected Enable Set to ‘True’...

  • Page 41: Sensor Crossover (2 Sensor Operation Mode)

    Series 65 INSTALLATION 4.6.2 Sensor crossover (2 sensor operation mode) When two sensors are used for pressure control the crossover handles the two pressure signals to building one system pressure (Actual Pressure). Parameter Description Crossover Mode Crossover between 2 sensors (see below) Threshold High [SFS low sensor] Defines the crossover area (see below) Threshold Low [SFS low sensor]...

  • Page 42: Zero Adjust

    INSTALLATION Series 65 4.6.3 Zero adjust Zero Adjust allows for the compensation of the sensor offset voltage. When Zero Adjust is performed the current value at the sensor input is equated to Zero.Adjust Target Pressure. In case of a 2 sensor system both sensor inputs will be adjusted. Note: A maximum offset voltage of +/- 1.4 V can be compensated.

  • Page 43: Pressure Control Configuration

    Series 65 INSTALLATION Pressure control configuration The valve has four identical pressure controller units. Controller Selector defines which unit is used for the pressure control. Most applications do not need more than one controller units. But if the result of the pressure control does not meet the expectations, the different controller units can be an option for optimization: With the four controller units it’s possible to use an own controller unit for a specific pressure working point.

  • Page 44: Control Algorithm

    INSTALLATION Series 65 4.7.1 Control Algorithm Algorithm Description Adaptive This is the most dynamic control algorithm. Before using adaptive control algorithm, a special procedure called “learn” must be executed first (see chapter below). The valve will observe the behavior of the vacuum system by moving the valve to different positions.

  • Page 45: Choose Correct Control Algorithm

    Series 65 INSTALLATION 4.7.2 Choose correct control algorithm Select the configuration what your application needs. Constant gas flow available Constant gas flow System Configuration not available Tv*<= 500 sec Tv* > 500 sec Downstream Process Adaptive pressure chamber Fixed pressure controller controller Control valve...

  • Page 46: Learn (Adaptive Control Algorithm)

    INSTALLATION Series 65 4.7.3 Learn (adaptive control algorithm) LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system.
  • Page 47 Series 65 INSTALLATION Parameter Description Bank Selection Select one of four learn bank to place the result of the learn procedure. Important: It’s important that after the learn pressure controller select this learn bank! Pressure Limit [SFS] Set learn limit pressure (to which pressure the learn shall be executed). The value is related to the sensor full scale of high sensor.
  • Page 48 INSTALLATION Series 65 Gasflow calculation for LEARN: Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient. Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific application. 1.

  • Page 49: Pressure Ramp

    Series 65 INSTALLATION 4.7.4 Pressure ramp Basically, the pressure ramp is used to limit the rate of pressure change. It can also be used to minimize over- / undershoot of pressure. Actual Pressure Pressure Controller Target Pressure Target Pressure Used Ramp Target Pressure without...
  • Page 50 INSTALLATION Series 65 4.7.4.1 Pressure ramp configuration Time Mode (Ramp Mode = Time) Slope Mode (Ramp Mode = Slope) The time within Target Pressure Used (ramp) reaches a After setting a new Target Pressure, Target Pressure new Target Pressure is defined in parameter value Used will converge the Target Pressure in the slope Ramp Time.

  • Page 51: Tuning Of Control Performance

    Series 65 INSTALLATION 4.7.5 Tuning of control performance • Tuning of pressure control performance with adaptive control, refer to chapter: Tuning of control performance with adaptive pressure controller • Tuning of pressure control performance with PI control, refer to chapter: Tuning of control performance with fixed PI pressure controller •...
  • Page 52 INSTALLATION Series 65 Gain factor adjustment The gain factor effects: Stability, Response time Adjustment range is from 0.0001 to 7.5. - Higher gain results in: faster response / higher over- / undershoot of pressure - Lower gain results in: slower response/ lower over- / undershoot of pressure Adjustment procedure: 1.
  • Page 53 Series 65 INSTALLATION Setpoint ramp adjustment Setpoint ramp effects: Undershoot of pressure, Response time Adjustment range for Setpoint Ramp is from 0 to 10 s. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time.
  • Page 54 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 54/110 Edition 2019-06-05 982156EB...
  • Page 55 Series 65 INSTALLATION 4.7.5.2 Tuning of control performance with fixed PI pressure controller Optimizing P gain and I gain This valve may be used for downstream or upstream pressure control depending on configuration. The PI parameters of the pressure controller require correct adjustment. These parameters must be set once during system setup and are stored in the device memory which is power fail save.
  • Page 56 INSTALLATION Series 65 Example: 56/110 Edition 2019-06-05 982156EB...
  • Page 57 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 982156EB Edition 2019-06-05 57/110...
  • Page 58 The VAT soft pump controller requires a pump down time shorter than 10 sec. for good control results. If the required pump down time is longer than 10 sec., the pump down curve has to be partitioned into sections shorter than 10 sec.
  • Page 59 Series 65 INSTALLATION Optimizing P gain WE start by setting the P gain to 1.0 as a trial value and adjust according to the response. The pump down routine has to be controlled as follows: Move control valve into close position Start pump down by opening the pump isolation valve or starting the pump and sending the first pressure set point to the valve controller.
  • Page 60 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 60/110 Edition 2019-06-05 982156EB...

  • Page 61: Interface Configuration (Devicenet®)

    ® VAT offers valve-related but not general DeviceNet support. Contact us under: devicenet- support@vat.ch 1. The node number is the device address and can be selected by two rotary switches which are on the panel.

  • Page 62: Devicenet

    INSTALLATION Series 65  DeviceNet interface 4.9.1 Introduction The following Object Modeling related terms are used when describing services and protocol: Object – An abstract representation of a particular component within a product. Class – A set of objects that all represent the same kind of system component. A class is a generalization of an object.

  • Page 63: Messaging Format

    Series 65 INSTALLATION 4.9.2 Messaging Format 4.9.2.1 Explicit Messaging Connections Explicit Messaging Connections, (see figure below) provide generic, multi-purpose communication paths between two devices. An Explicit Message consists of a Connection ID and associated messaging protocol information. Explicit messaging connections utilize a direct request / response format which allow you to access any attribute data. Explicit messaging is typically used for the setup, configuration, and calibration of your device.

  • Page 64: Objects

    Centralizes application object state definitions and related status S-Device Supervisor information S-Analog Sensor Models the acquisition of a reading from a physical sensor in a device S-Single Stage Controller Models a closed-loop control system within a device Pressure Controller VAT specific attributes 64/110 Edition 2019-06-05 982156EB...

  • Page 65: Identity Object (Class Id 1)

    Series 65 INSTALLATION 4.9.4 Identity Object (Class ID 1) The Identity Object provides general information about the device Service Service Service Code Class ID Instance ID Attribute ID data length data field Command (number of bytes) Description RESET ® 0 = This command resets the DeviceNet interface.
  • Page 66 INSTALLATION Series 65 4.9.5.1 Assemblies Input Number Composition Integer Float Start Length Total Start Length Total EXCEPTION STATUS PRESSURE (default) POSITION EXCEPTION STATUS PRESSURE SETPOINT EXCEPTION STATUS PRESSURE SETPOINT POSITION EXCEPTION STATUS EXCEPTION DETAIL ALARM EXCEPTION DETAIL WARNING EXCEPTION STATUS PRESSURE POSITION VALVE CLOSED / OPEN CHECK...

  • Page 67: Connection Object (Class Id 5)

    Series 65 INSTALLATION 4.9.6 Connection Object (Class ID 5) Manage the characteristics of a communication connection Service Service Service Code Class ID Instance ID Attribute ID data length data field Command (number of bytes) Description POLL OUTPUT output assembly object number (7,8,102) Contains the instance number of the assembly used by the poll connection to send data.

  • Page 68: S-Device Supervisor Object (Class Id 48)

    INSTALLATION Series 65 4.9.8 S-Device Supervisor Object (Class ID 48) Centralizes application object state definitions and related status information Service Service Service Code Class ID Instance ID Attribute ID data length data field Command (number of bytes) Description self test idle self test exception executing...
  • Page 69 Series 65 INSTALLATION Service Service Service Code Class ID Instance ID Attribute ID data length Command data field (number of bytes) Description 13 Alarm See below 14 Warning Table with EXCEPTION DETAIL ALARM resp. EXCEPTION DETAIL WARNING bits. Data Component Bit 7 Bit 6 Bit 5...

  • Page 70: S-Analog Sensor Object (Class Id 49)

    INSTALLATION Series 65 Service Service Service Code Class ID Instance ID Attribute ID data length data field Command (number of bytes) Description 3,11 X,XY X: Index (3 byte, range 000 .. 103, ASCII coded) Y: Data (8 byte) UPLOAD This command loads the learn data sets from the valve up to the host. LEARN DATA There are a total number of 104 data sets which need to be uploaded separately.
  • Page 71 Series 65 INSTALLATION Service Service Service Code Class ID Instance ID Attribute ID data length data field Command (number of bytes) Description 1 Pressure 4 float 3 Position Gain, max. value is 3.2767, data type is floating point This command selects the gain for PRESSURE/POSITION and allows for scaling. Default value is 1.0 GAIN Example:...

  • Page 72: S-Single Stage Controller Object (Class Id 51)

    INSTALLATION Series 65 4.9.10 S-Single Stage Controller Object (Class ID 51) Models a closed-loop control system within a device Service Service Service Code Class ID Instance ID Attribute ID data length data field Command (number of bytes) Description SETPOINT TYPE instance 1 - pressure control (Single Stage Controller Instance) Instance 2 - position control...
  • Page 73 Series 65 INSTALLATION Service Service Service Code Class ID Instance ID Attribute ID data length data field Command (number of bytes) Description ADAPTIVE CONTROL 0 = 0, 1 = 0.02, 2 = 0.04, 3 = 0.06, 4 = 0.08, 5 = 0.10, 6 = 0.15 SENSOR DELAY 7 = 0.20, 8 = 0.25, 9 = 0.30, 10 = 0.35, 11 = 0.4, 12 = 0.5, 13 = 0.6 14 = 0.8, 15 = 1.0...

  • Page 74: Pressure Controller Object (Class Id 100)

    INSTALLATION Series 65 4.9.11 Pressure Controller Object (Class ID 100) VAT specific attributes Service Service Service Code Class ID Instance ID Attribute ID data length data field Command (number of bytes) Description This command returns the device status. 1 = synchronization, 2 = POSITION CONTROL, 3 = CLOSED...
  • Page 75 Series 65 INSTALLATION Service Service Service Code Class ID Instance ID Attribute ID data length data field Command (number of bytes) Description 2 integer 4 float SENSOR 1 READING Nominal range is 0 … 10’000 but it may be scaled. Refer also to command GAIN and picture on the following page for details.

  • Page 76: Operation

    INSTALLATION Series 65 Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.

  • Page 77: Local Operation

    Series 65 INSTALLATION 5.1.2 Local operation Local operation means that the valve is operated via the service port using a computer. You can use our software 'Control Performance Analyzer' for Local operation, which is integrated in the controller. The software is beneficial especially for setup, testing and maintenance. How to start: 1.

  • Page 78: Close Valve

    INSTALLATION Series 65 Close valve Local operation: CPA Remote operation: Refer to chapter ‘Device Net interface’ Explicit: • Set EXECUTING in S-Device Supervisor (if not already done) • Set CONTROL MODE of active S-Single Stage Controller to ‘Close’ • See SETPOINT TYPE for active S-Single Stage Controller Push button Cyclic:...

  • Page 79: Display Information

    Series 65 ERROR! REFERENCE SOURCE NOT FOUND. Display information There is a 4 digit display located on the controller. It displays configuration, status and position information. For details refer to following tables. 5.6.1 Power up Description Digit 1 Digit 2 Digit 3 Digit 4 ●...

  • Page 80: Operation

    ERROR! REFERENCE SOURCE NOT FOUND. Series 65 5.6.2 Operation Control Mode Digit 1 Digit 2 Digit 3 Digit 4 Init (start up) Init (start up, leak tight) Close Open C, 0…100 Pressure control valve position = closed, leak tight Position control = minimal conductance = maximum opened Interlock...

  • Page 81: Operation During Power Up

    Refer also to chapter: «Power Failure Option». Provide that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All settings are stored in a power fail save memory.

  • Page 82: Operation Under Increased Temperature

    ERROR! REFERENCE SOURCE NOT FOUND. Series 65 5.10 Operation under increased temperature CAUTION Hot valve Heated valve may result in minor or moderate injury. Do not touch valve and heating device during operation. Once heating is switched off (valve and system) await until the valve is cooled down complete before doing any work. This valve may be operated in the temperature range mentioned in chapter «Technical data».

  • Page 83: Trouble Shooting

    • Check power supply 1 2 Motion controller: Internal voltage error • Check for a heat accumulation 1 3 Motion controller: Internal error temperature Contact vat support • Axis inverted 1 4 Motion controller: Unexpected behavior • Encoder not connected •...
  • Page 84 • Check Parameter “Isolation Position [r]” 2 0 Break slippery detected Replace actuator SFV: Motion controller failure in master-slave Contact vat support communication 4 0 Compressed air error Check compressed air Check if power supply is ok and is able to deliver needed...

  • Page 85: Maintenance

    Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT. Please write down the fabrication number of the valve before contact VAT. Refer to chapter «Identification of product»...

  • Page 86: Maintenance Procedures

    Replacement of isolation seals (gate and body seal of sealing ring) and valve cleaning • Replacement of actuator shaft seals Required frequency of cleaning and replacement of seals is depending on process conditions. VAT can give the following recommendations for preventive maintenance: heated ≤ 80 °C Replacement of unheated heated > 80 °C isolation seals (gate and 12 month but max.

  • Page 87: 7.2.1 Replacement Of Isolation Seals And Valve Cleaning

    Series 65 MAINTENANCE 7.2.1 Replacement of isolation seals and valve cleaning 7.2.1.1 Required tools • • Allen Wrench 5mm Vacuum grease (see chapter spare parts) • • Open end wrench 13mm O-ring removal tool (see chapter Accessories) • Service cable USB Type A to B (PC to valve Service connector) •...
  • Page 88 MAINTENANCE Series 65 Description Required tool Open valve Stand away from valve – pendulum plate moves out of the Open end valve body. wrench Unfasten mounting screw for pendulum 13mm plate. Remove pendulum plate. pendulum plate mounting screw for pendulum plate With one hand press the MAINTENANCE BUTTON to lower the sealing ring, with your second hand...
  • Page 89 Series 65 MAINTENANCE Description Required tool Do not directly expose seals (actuator and retaining pin feedthroughs) to air stream! 15. Clean or replace gate seal if necessary. Install gate o-ring to sealing ring without grease. body seal Valve size Quantity of grease [ml] 16.

  • Page 90: 7.2.2 Replacement Of Actuator Shaft Seals

    MAINTENANCE Series 65 7.2.2 Replacement of actuator shaft seals 7.2.2.1 Required tools • • Allen Wrench 2mm Vacuum grease (see chapter spare parts) • • Allen Wrench 4mm Open end wrench 13mm • • Allen Wrench 5mm Clean room wiper •...
  • Page 91 Series 65 MAINTENANCE Description Required tool Open valve Stand away from valve – pendulum plate moves out of Open end wrench the valve body. 13mm 6. Unfasten mounting screw for pendulum plate. 7. Remove pendulum plate. pendulum plate mounting screw pendulum plate 8.
  • Page 92 MAINTENANCE Series 65 Description Required tool 15. Disconnect 24VDC power. Wait for 60s, then disconnect cables and Allen Wrench compressed air from valve actuator. 4 mm 16. Unfasten all 2 controller screws and lift controller carefully from actuator. 17. Unfasten all 4 actuator screws and Allen Wrench remove actuator.
  • Page 93 Series 65 MAINTENANCE Description Required tool Soft tool (o-ring remover) 19. Remove actuator shaft seals carefully with a soft tool. 20. Clean actuator feedthrough with alcohol. 21. Lubricate each o-ring groove with 0.1 ml vacuum grease. Pay attention that grease is distributed constantly over the whole circumference.
  • Page 94 MAINTENANCE Series 65 Description Required tool 29. Install controller • Tighten the controller screws with 3 Nm. Allen Wrench • Connect cables at controller • Connect compressed air at actuator 30. Turn on power of controller. Valve moves to close position.

  • Page 95: Replacement Of Option Board

    Series 65 MAINTENANCE 7.2.3 Replacement of Option board NOTICE Electrostatic discharge Electronic components could be damage. All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under power.
  • Page 96 MAINTENANCE Series 65 7.2.3.1 Durability of power fail battery The curves in the graph show the estimated life of Ultra Cap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 °C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 °C, the corresponding life time curve will be somewhere in between the upper and the lower curve.

  • Page 97: Retrofit / Replacement Procedure

    Series 65 MAINTENANCE 7.2.4 Retrofit / replacement procedure Top view on control and actuating unit with panel removed: Master board with Interface Option board All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above! Do not try out other positions, which maybe destroy the socket of boards! 982156EB...
  • Page 98 MAINTENANCE Series 65 7.2.4.1 Required tools • Pozidriv screw driver size 1 • Open end wrench 4.5mm Description Required tool Disconnect 24VDC power. Wait for 60s, then disconnect cables and compressed air from valve actuator. Allen Wrench 4 mm Unfasten all 2 controller screws and lift controller carefully from actuator.

  • Page 99: Repairs

    Series 65 Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.

  • Page 100: Dismounting And Storage

    DISMOUNTING AND STORAGE Series 65 Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve.

  • Page 101: Storage

    Series 65 DISMOUNTING AND STORAGE Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.

  • Page 102: Packaging And Transport

    If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontaminating procedure at the customer's expense. 10.1...

  • Page 103: Transport

    10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used. Always use the original packaging material and handle product with care. VAT disclaims any liability for damages resulting from inappropriate packaging. 982156EB Edition 2019-06-05 103/110...

  • Page 104: Disposal

    DISPOSAL Series 65 Disposal WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. 104/110 Edition 2019-06-05 982156EB...

  • Page 105: Spare Parts

    «Identification of product». This is to ensure that the appropriate spare parts are supplied. • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. •...

  • Page 106: Valve Unit With Seals And Grease

    342943 Actuator B2 *) on request on request *) Refer to figures on next page to check for actuator position options. Use only spare parts manufactured by VAT to assure safe and reliable operation All “ 106/110 Edition 2019-06-05 982156EB...

  • Page 107: Control And Actuating Unit

    All “Item“ refer to chapter «Drawing» 12.1.2 Control and actuating unit Description Part number Control and actuating unit Too many to list. Please contact VAT. Option board with SPS module 936205 (±15 VDC Sensor Power Supply) Option board with PFO module 936200...

  • Page 108: Accessories

    Accessories Description Part number 24 VDC power supply unit 891528 (input: 100 – 240 VAC) O-ring removal tool 234859 VAT valve cleaning tool 305709 Adapter cable for power supply with (735567) (D-Sub15 to D-Sub9) D-Sub9 connector 809474 Service cable (PC to valve Service connector) (USB A–B male-male)

  • Page 109: Appendix

    Series 65 APPENDIX Appendix No information entered on time. 982156EB Edition 2019-06-05 109/110...
  • Page 110 Series 65 This page left blank intentionally. 110/110 Edition 2019-06-05 982156EB...

This manual is also suitable for:

653 gq series653 aq series653 hq series653 cq series

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