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Cleanroom-model G10/G20-***C
The following figure shows the additional parts and specifications for the Table Top mounting
Cleanroom-model when compared with the Standard-model in appearance.
Upper bellows
Lower bellows
G10 / G20 Rev.20
Plate cover
(For static electricity
countermeasure)
Setup & Operation 2. Specifications
Plate cover
(For static electricity
countermeasure)
Cover
for Table Top mounting surface
Exhaust port
21
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