LS3-B LS6-B Manipulator 3. Environments and Installation
3.5.2 Cleanroom-Model
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Unpack the Manipulator outside of the cleanroom.
Secure the Manipulator to delivery equipment such as a pallet with bolts so that the
Manipulator does not fall over.
Wipe off the dust on the Manipulator with a little alcohol or distilled water on a lint-
free cloth.
Transport the Manipulator to the clean room.
Refer to the installation procedure of each Manipulator model and install the
Manipulator.
Connect an exhaust tube to the exhaust port.
LS-B series Rev.5