Positioning Optics For Vertical Z-Axis Measurements - Agilent Technologies 5530 Reference Manual

Dynamic calibrator
Hide thumbs Also See for 5530:
Table of Contents

Advertisement

A
Measurement
perpendicular to the
laser head along the
Z-axis
B
Measurement parallel to
the laser head along the
Z-axis
************************
1
Interferometer assembly
mounted in a spindle
2
Reflector oriented
perpendicular to the
laser head
3
Laser beam
4
Laser head
5
Reflector oriented
parallel to laser head
Chapter 5 Straightness Measurements
Positioning the Laser Head and Target Machine

Positioning optics for vertical Z-Axis measurements

1 A
A
B
S Y
A S
1 A
7 0
0 2
2 - 6
7 7
1 0
Figure 5-4. Positioning of optics for a vertical Z-axis measurement
Measurements Reference Guide
1
2
3
1
5
3
4
4
5-7

Advertisement

Table of Contents
loading

Table of Contents