Agilent Technologies 5530 Reference Manual page 254

Dynamic calibrator
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1
Surface plate
2
Measurement grid
3
Laser head
4
Nameplate
*
76-mm (3-inch) margin
between grid and
surface plate
Chapter 9 Flatness Measurements
Setting Up for the Measurement
2
1
3
*
Figure 9-3. Measurement setup when flatness mirrors are not used
If you will use a flatness mirror for one or more lines, leave at least a
102 mm (4 inch) border along one edge. This border allows sufficient room
for you to place the flatness mirrors.
The other sides require only a 51 to 76 mm (2 to 3 inch) border. Figure 9-4
shows an example of the measurement grid necessary when flatness
mirrors are used.
9-8
4
A
B
1
6
H
7
2
G
F
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Measurements Reference Guide
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C
3
8
4
D
5
E
*

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