Agilent Technologies 5530 Reference Manual page 312

Dynamic calibrator
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1
Measurement
retroreflector
2
Elevation angle range:
0 to 60 degrees
3
Linear interferometer
4
Beam-steering arm with
interferometer
5
Laser head on tripod
6
Machine table
Chapter 11 Diagonal Measurements
Assembling the Interferometer, Reference Retroreflector and Beam
Steering Arm
1
2
6
Figure 11-7. Diagonal measurement optics—close-to-the table
configuration
11-16
4
3
Measurements Reference Guide
5

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