Agilent Technologies 5530 Reference Manual page 35

Dynamic calibrator
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Chapter 2 Linear Measurements
Mounting and Aligning the Optics on the Target Machine
A
Measurement along
the X-axis
B
Measurement along
the Y-axis with the
laser beam bent
horizontally 90° to
the retroreflector
C
Measurement along
the Z-axis with the
laser beam bent
vertically 90° to the
optics
***********************
1
Retroreflector
mounted on a height
adjuster with a base
and post
2
Interferometer
assembly mounted
in a spindle
3
Laser beam
4
Laser head
5
Retroreflector
mounted in a spindle
6
Interferometer
assembly mounted
on a height adjuster
with a base and post
Figure 2-5. Positioning of linear optics
Measurements Reference Guide
1
A
2
2
1
B
5
6
C
3
3
3
4
4
4
2-11

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