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Chapter 11 Diagonal Measurements
Installing and Aligning the Optics on the Machine
pointing along the XY-plane diagonal of your measurement.
8
Carefully clamp the interferometer assembly base to the machine table.
9
Set the adjustable triangle to the elevation angle (β) the Agilent 5530
calibrator calculated for the body diagonal you are measuring.
10
Use the adjustable triangle to set the initial elevation angle of the
interferometer assembly and beam steering arm (see Figure 11-27). For a
coarser alignment, you can simply use the scale on the side of the beam
steering arm assembly.
11
Set the adjustable triangle for 90 degrees.
12
Use the adjustable triangle against the table or the interferometer
assembly base and the back of the beam steering mirror tray to set the
beam steering mirror vertical.
13
Adjust the knob on the back of the beam steering mirror tray to set the
mirror in its neutral position. The pointer on the knob should be in line
with the mark on the tray.
You will refine these initial adjustments in the procedures below.
Installing the measurement retroreflector
The measurement retroreflector is a cube corner having the property of
redirecting an input beam back toward its source along a parallel line.
Exact orientation of the retroreflector is not critical. This procedure
assumes that you have already assembled the measurement retroreflector
and ball-joint as described earlier.
1
If necessary, remove any tool in the spindle.
2
Insert the free end of the ball-joint assembly into the spindle and tighten
it in place.
3
Point the measurement retroreflector's face toward the interferometer's
measurement face, align the retroreflector so these faces are parallel, then
tighten the ball-joint screw to hold this alignment.
Measurements Reference Guide
11-25
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