Table of Contents
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1
Straightedge
2
Surface plate
3
Reflector mounted on a
foot spacer
4
Interferometer mounted
on a flatness mirror base
5
Laser head
Chapter 9 Flatness Measurements
Assembling and Mounting the Optics
Figure 9-8. Positioning optics if flatness mirrors are not required
9-18
1
2
3
4
Measurements Reference Guide
5
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Table of Contents
