Agilent Technologies 5530 Reference Manual page 324

Dynamic calibrator
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Chapter 11 Diagonal Measurements
Installing and Aligning the Optics on the Machine
3
Observe the return beam dot on the laser head's lower (return) port as you
move the machine's table to increase the distance between interferometer
and the laser head along the XY plane diagonal of the measurement.
Continue moving the interferometer until you do not see the dot or until
the end of travel is reached, whichever occurs first. If you lose sight of the
dot before end of travel is reached, return the interferometer to the last
position at which you saw the dot.
If the dot drifts as the interferometer moves, the laser beam is not
perfectly aligned to the travel path. The remainder of this procedure
corrects that alignment.
4
With the interferometer at its farthest travel point or at the last point at
which a return dot was visible, yaw and pitch (turn and tilt) the laser head
on the tripod as necessary to center the return beam on the lower port.
You may speed your alignment procedure by doing some overcorrection,
moving the dot to the other side of the lower port; experience will help you
here.
5
Observe the return beam spot on the laser head's face as you use the
machine to move the interferometer toward the laser head.
6
If the return beam spot moves, translate the laser head horizontally and
vertically, without turning it, so most or all of the return beam from the
interferometer will enter the lower port. Do not overcorrect on your
translation adjustments.
7
Repeat steps 3 through 7 until the return beam from the interferometer
can enter the laser head's lower port at all interferometer positions along
the XY plane diagonal.
Now your setup is ready for aligning to the actual measurement (body)
diagonal. Do not make any more changes to the laser head or
tripod position controls until instructed to do so.
11-28
Measurements Reference Guide

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