Table of Contents
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1
Laser head
2
Interferometer assembly
3
Reflector mounted on a
foot spacer
4
Straightedge
5
First flatness mirror
Figure 9-16. Positioning optics for measuring lines parallel to the laser head (lines 3, 5, and 7)
when using flatness mirrors
Chapter 9 Flatness Measurements
Completing the Set Up Flatness Screen
1
5
9-36
2
Measurements Reference Guide
3
4
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Table of Contents
