Agilent Technologies 5530 Reference Manual page 311

Dynamic calibrator
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1
Measurement retroreflector
2
Measurement retroreflector
(alternate position)
3
Elevation angle range:
30 to 90 degrees
4
Elevation angle range:
0 to 60 degrees
5
Linear interferometer
6
Beam-steering arm with
interferometer
7
Laser head on tripod
8
Machine table
Chapter 11 Diagonal Measurements
Assembling the Interferometer, Reference Retroreflector and Beam
Steering Arm
7
Figure 11-6. Diagonal measurement optics—configuration 2
Measurements Reference Guide
2
1
3
4
5
6
8
11-15

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