Table of Contents
Advertisement
2.2.6 Clean specifications
(1) Types of clean specifications
The robot arm with clean specification is made by order. Please check the delivery schedule.
Table 2-4 ： Clean specifications
Clean specifications
RV-6SC-SA
RV-6SLC-SA
Table 2-5 ： Specifications of vacuum generation valve
Type
MEDT 14
■ Precautions for use
1) When using a device that moves or rotates the robot arm, the down flow may not be secured because of the
air flow. In this case, the degree of cleanliness cannot be ensured.
2) A Φ8 coupling is provided in the base section of the robot arm for suction inside the robot arm. When using
the robot, connect this coupling with the vacuum generating valve and vacuum pump (furnished by the cus -
tomer).
* Install the vacuum generating valve downstream of the downflow or install a filter in the exhaust air sec -
tion so that the exhaust air from the vacuum generating valve does not affect cleanness.
Recommended filter: Exhaust filter EF300-02, Koganei Corporation
* If any vacuum pump is prepared by the customer, assure on the vacuum side flow rate 30 liters/min.(ANR)
or more .
3) When using the Mitsubishi standard option solenoid valve set, use the spare piping (Φ6 pneumatic hose) of
the primary piping to exhaust the air.
If the exhaust leaks into the robot arm, the degree of cleanliness could be affected.
Type
10(0.3μm)
Concentrated suction with vaccum generating valve.
Maker
KONEGAI CORPORATION
Degree of cleanliness
Air pressure
0.2 to 0.6 MPa
２ Robot arm
Internal suction
The use of a vacuum generating valve
is recommended.
Definition of specifications
2-11
Advertisement
Table of Contents
