Ulvac CRYO-U Series Instruction Manual page 83

CRYO-U Cryopump Instruction Manual
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Most of breakdowns of CRYO-U
and/or pressure through the following two routes.
(1) Refrigerator broken down → Cryogenic performance lowers → Temperature rises →
Pressure rises
(In case of the breakdown of the refrigerator, the rise in temperature or pressure
will rapidly occur in minutes or hours)
(2) 80K shield and 15K cryopanel contaminated → Thermal load increases →
Temperature rises → Pressure rises
(In this case, the rise in temperature or pressure will usually slowly occur in
months or years according to the use environment.)
Regarding various potential failures, the itemⅠto Ⅶ in Table A-1 explains its
cause and measure respectively. When the trouble cannot be solved, please contact
our Service Engineering Division or the nearest customer support center.
MA0A001E.2012JE01
Appendix A
Troubleshooting
cryopump come to light as a rise in temperature
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ULVAC CRYOGENICS INCORPORATED A-1