Ulvac CRYO-U Series Instruction Manual page 15

For handling toxic gases, specific safety measures to the gas may have to be taken as
well as the safety precautions for flammable or explosive gases. For example, purge of
pump or dilution of exhaust duct with inert gas corresponds to it.
The customer oneself must execute the appropriate safety measure planning for
managing the cry opump operation according to an equipment and process where it
w ill be adopted.
Table 1 Combu
Gas
Hydrogen H
C arbon CO
Monoxide
Hydrogen H
Sulfide
Silane* SiH
Arsine* AsH
Phosphine* PH
Diborane* B H
2
Ammonium NH
Methane CH
Ethane C
2
Propane C
3
Etylene C H
2
Acetylene C
2
(*): Hikaru Harada; "Handotai-gas Anzen-ka Souran 1st Edition" (The 1st edition of Semiconductor
gas safing comprehensive manual) published by Science Forum Inc. 1984
Except (*): The high pressure gas safety institute of Japan; "Koatsu-gas Kogyo Gijy
industrial tech
Tabl
Gas
Hydrogen
Acetylene
Methane
Propane
Carbon Mon
Ammonium
The high pressure gas safety institute of Japan; "Koatsu-gas Kogyo Gijyutu" (High pressure gas industrial
te chnology) published by Kyoritsu Shuppan Co., Ltd. 1977
stion range and detonation range
(Volume percen ge against air)
Molecular Specific
Weight
0℃
2.016
2
28.01
S 34.08
2
32.14
4
77.94
3
34.00
3
27.67
6
17.03
3
16.04
4
H 30.07
6
H 44.10
8
28.05
4
H 26.04
2
nology) published by Kyoritsu Shuppan Co., Ltd. 1977
e 2 Combustion range and detonation range of
mix ture of oxygen and fl
Combustion Ra
( Vol. %)
4 - 94
2.3 - 94.5
5.1 - 61
2.3 - 55
oxide 15.5 - 94
15 - 79
ULVAC CRYOGENICS INCORPORATED
ta
Boiling
Gravity Point
K
, 1atm
0.070 20.3
0.970 81.7
1.190 213.6
1.107 161.2
2.692 210.7
1.146 185.5
0.955 180.7
0.590 239.8
0.555 111.6
1.040 184.6
1.550 231.1
0.978 169.5
0.907 198.2
am mable gas
nge Detonation Range
of major gases
Combustion Detonation
Range Range
Vol. % Vol. %
4.0-75.0 18.3- 59
12.5-74.0
4.3-45.0
0.8-98
0.8-98
1.3-98
0.8-98
15-28
5.3-14
3.0-12.5
2.2-9.5
3.1-32
2.5-100 4.2- 50
utu" (High pressure gas
(Vol. %)
15 - 90
3.5 - 93
-
3.7 - 37
38 - 90
25.4 - 75
S-3