Ulvac CRYO-U Series Instruction Manual page 94

Cryopump
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Conversion of Thermometer Readings
2. Hydrogen Vapor Pressure Gauge
Vapor Pressure
MPaG
0.3
0.2
0.1
0
-0.1
10
NOTE:
The indicated value of the hydrogen vapor pressure gauge changes depending on the
atmospheric pressure of the altitude. A true temperature can be read by applying the vapor
pressure calculated by the following formula to the above figure.
Vapor pressure [MPaG] = Indicated pressure-(0.1013-Atmospheric pressure at the altitude)
C-2
15
Temperature (K)
ULVAC CRYOGENICS INCORPORATED
20
25

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