Ulvac CRYO-U22P Manuals

Manuals and User Guides for Ulvac CRYO-U22P. We have 1 Ulvac CRYO-U22P manual available for free PDF download: Instruction Manual

Ulvac CRYO-U22P Instruction Manual

Ulvac CRYO-U22P Instruction Manual (102 pages)

Brand: Ulvac | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description

27
- Typical CRYO-U
  27
  - Specifications
    28
- Cryo-U
  28
  - Environmental Requirements
    29
  - External Drawing of CRYO-U
    31
  - Major Components
    32
SECTION 2 Inspection

33
- 2.1 Shipping List
  33
- 2.2 First Inspection of Cryopump
  34
SECTION 3 Quick Installation

35
- Quick Installation
  35
- Quick Installation Process Flow
  36
SECTION 4 Installation

37
- Auxiliary Equipments Required
  37
  - Cryopump
    37
- Example of CRYO-U
  38
  - Cryopump Vacuum System
    38
  - Installation
    38
- Examples of Cryopump Installation
  39
- Mounting the Cryopump to the Vacuum System
  39
- Connecting Roughing Pump
  41
- Connecting Purge Gas Line
  41
- Connecting Exhaust Pipe
  42
- Pressure Loss of Regeneration Gas Purge PR Unit
  42
- Connecting Cooling Water Pipe
  43
- Connecting Remote Wiring
  44
- Connecting Electrical Cables
  44
- Connecting Flexible Hoses
  45
- Prior to Startup
  47
- Rough Pumping
  47
- Pressure Buildup Test
  48
- Startup and Cooldown
  48
- Operation
  48
- Rough Pumping
  48
- Normal Operation
  49
  - Cryopump System
    49
- Crossover
  50
- Shutdown Procedures
  52
- Handling of Hazardous Materials
  52
SECTION 6 Regeneration

53
SECTION 8 Maintenance

65
- Scheduled and Unscheduled Maintenance
  65
- Consumables
  67
- Cleaning the Cryopump
  68
- Charging Helium Gas
  69
- Charging Helium Gas
  71
- Helium Circuit Decontamination
  72
- Disconnecting Flexible Hose
  73
- Connecting Flexible Hoses
  77
APPENDIX A Troubleshooting

79
- Flexible Hose
  87
- Conversion of Thermometer Readings
  89
- Principle of Cryopump Operation
  91
- Vapor Pressure of Various Kinds of Gas
  92
- Principle of Refrigerator Operation
  93
- Principle of Refrigeration
  93
- Two-Stage Refrigerator
  96
- Dew Condensation
  97
Service Network

99

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