Ulvac CRYO-U Series Instruction Manual page 70

Maintenance
S: Scheduled maintenance
Item
Cryopump
U 80K baffle
U 15K cryopanel
U replacement
Cryopump cleaning
S
Insulation properties of
heater for regeneration
(*1)
S
Pressure relief valve
U Calibration of cryometer
Refrigerator unit
S Seal kit replacement
S
Driver assembly
Replacement
S
Motor bearing replacement
S
Cylinder bolt replacement
S Displacer replacement
S Valve body replacement
U
Other parts replacement
Compressor unit
S
Adsorber replacement
(*1): Only applicable to a cryopump system with heater.
8-2
Table 8-1 Maintenance Parts and Intervals
U: Unscheduled maintenance or part replacement at fault
Parts
15K cryopanel
Heater
Pressure
relief valve
MBS-C
Cryometer
Seal kit
Driver bearing
Valve bearing
Set screw
Motor bearing
cylinder bolt
st nd
1 /2 stage of
displacer
Intake/Exhaust
valve body
Other parts
Adsorber Refer to the compressor unit instruction manual.
ULVAC CRYOGENICS INCORPORATED
Interval
At fault
Every month
Once or twice a month
At fault
R10 / R10R
R10RT RM10T
12,000h 16,000h
24,000h 16,000h
At fault
At fault
Remarks
When reassembling,
be sure to use new
indium gasket.
Replace when
10MΩ or less
Confirm the
safety of
exhaust gas
Use the (paid)
calibration service.
RM10
The maintenance
cycle depends on the
manner of operation.
At Fault