User Manuals: Ulvac C30VR Series Cryo Pump Compressor

Manuals and User Guides for Ulvac C30VR Series Cryo Pump Compressor. We have 2 Ulvac C30VR Series Cryo Pump Compressor manuals available for free PDF download: Installation, Operation, Maintenance And Troubleshooting Instructions, Instruction Manual

Ulvac C30VR Series Installation, Operation, Maintenance And Troubleshooting Instructions (110 pages)

Compressor Unit for Cryopump and Super Trap

Brand: Ulvac | Category: Compressor | Size: 5 MB

Table of Contents
9
Compressor Unit Safety Instructions

13
- Table 1-6 Electromagnetic Environment Resistance Characteristics
  15
Disposal Considerations

17
C30Vr_Compressor Description

19
- Introduction
  19
- Compressor Model Descriptions
  19
- Figure 1-1 C30VR Compressor Models
  19
- Terminology
  20
- Cryopump System Documents
  20
- Roles of Compressor in Cryopump System
  20
C30VR Compressor Instruction Manual

20
Considerations before Installation

33
Unpacking and Inspection

49
- Compressor Carton
  49
- Shipping Carton Inspection
  49
- Unpacking
  50
- Carton Contents
  51
- Table 3-1 Carton Contents
  51
- Table 3-2 Optional Parts
  51
- Inspection of the Compressor and Accessories
  52
- Flexible Hoses and Specifications
  52
- Table 3-3 Flexible Hose Specifications
  52
Equipment Installation, Piping, and Wiring

55
Operation

69
Wiring and Piping Removal and Storage

75
Maintenance

79
Troubleshooting

89
- Problem Types
  89
- Troubleshooting Procedures
  90
- Alarm Code Descriptions
  92
Appendix A Operating Log

95
- Table A-1 Operating Log
  95
- Table B-1 Combination of C30VR Series Compressor and Cryopump/Supertrap
  97
Appendix B Combination of C30V R Compressor Unit and Cryopump/Supertrap ······ B-1

99
Appendix C C30VR Schematic Diagram

99
- Table C-1 Differences on Devices between Compressor Unit Models
  99
Appendix D C30V R Compressor Flow Diagram

105
- P.2-4 Table 2-3 "Recommended Cooling Water for Compressor
  109

Ulvac C30VR Series Instruction Manual (24 pages)

MANUAL OPERATOR, The Console of Compressor Unit

Brand: Ulvac | Category: Control Unit | Size: 0 MB

Safety Considerations
7
Disposal Considerations
9
Table of Contents
11
Introduction
13
Appearance
13
Rear-View of the Console and the Attached Cable
13
Installation and Connecting
14
Location of the Connector on the Rear Panel
14
Cable Connections
14
Operation
15
Functions of Switches Pushbuttons
15
A-1. C30Vr Manual Operator
16
A-2. C30Mvr Manual Operator
17
A-3. Attached Cable of C30VR MANUAL OPERATOR
18
A-4. Attached Cable of C30MVR MANUAL OPERATOR
18
A-5. Schematic Diagram C30VR MANUAL OPERATOR
19
A-6. Schematic Diagram C30MVR MANUAL OPERATOR
20
Service Network
21

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User Manuals: Ulvac C30VR Series Cryo Pump Compressor

Ulvac C30VR Series Installation, Operation, Maintenance And Troubleshooting Instructions (110 pages)

Table of Contents

Compressor Unit Safety Instructions

Disposal Considerations

C30Vr_Compressor Description

C30VR Compressor Instruction Manual

Considerations before Installation

Unpacking and Inspection

Equipment Installation, Piping, and Wiring

Operation

Wiring and Piping Removal and Storage

Maintenance

Troubleshooting

Appendix A Operating Log

Appendix B Combination of C30V R Compressor Unit and Cryopump/Supertrap ······ B-1

Appendix C C30VR Schematic Diagram

Appendix D C30V R Compressor Flow Diagram

Ulvac C30VR Series Instruction Manual (24 pages)

Table of Contents

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