Ulvac CRYO-U Series Instruction Manual
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Vacuum pumps that pump nitrogen gas at pumping speed of 15000L/s or
more fall under row 2(35) of appended table 1 of Japan's Export Trade
Control Order, which is based on international export control regimes.
Also, when applying a refrigerator system to a cryocooler for optical
sensors, the cryocooler falls under row 10(2) of appended table 1 of Japan's
Export Trade Control Order as well.
Customers must follow all related rules and regulations such as Foreign
Exchange and Foreign Trade Act and take appropriate procedures when
exporting or re-exporting those products.
D/N.MA04A00E, 2017NR10
CRYOPUMP
CRYO-U
Instruction Manual
ＣＲＹＯ−Ｕ
Export Control Policy
ULVAC CRYOGENICS INCORPORATED
® SERIES
®
４Ｈ
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Table of Contents
Related Manuals for Ulvac CRYO-U Series
Summary of Contents for Ulvac CRYO-U Series
- Page 1 Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting or re-exporting those products. ULVAC CRYOGENICS INCORPORATED D/N.MA04A00E, 2017NR10...
- Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
- Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
- Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
- Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
- Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
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Page 9: Table Of Contents
4.9 Connecting Electrical Cables･･･････････････････････････ 4-7 CHAPTER 5 Operation 5.1 Prior to Startup･･･････････････････････････････････････ 5-1 5.2 Rough Pumping･･･････････････････････････････････････ 5-1 5.3 Pressure Buildup Test･･････････････････････････････････ 5-2 5.4 Startup and Cooldown･････････････････････････････････ 5-2 5.5 Normal Operation･････････････････････････････････････ 5-3 5.6 Crossover･････････････････････････････････････････････ 5-4 5.7 Shutdown Procedures･･････････････････････････････････ 5-5 Ⅰ ULVAC CRYOGENICS INCORPORATED... - Page 10 8.5 Helium Circuit Decontamination･･･････････････････････ 8-8 APPENDICES A. Troubleshooting･････････････････････････････････････････ A-1 B. Flexible Hose･･･････････････････････････････････････････ B-1 C. Conversion of Thermometer Readings･････････････････････ C-1 D. Principle of Cryopump Operation･････････････････････････ D-1 E. Principle of Refrigerator Operation･･･････････････････････ E-1 F. Dew Condensation･･････････････････････････････････････ F-1 SERVICE NETWORK･･････････････････････････････････････ ････CS-1 Ⅱ ULVAC CRYOGENICS INCORPORATED...
- Page 11 1-2 Environmental Specifications･･････････････････････････････ 1-3 2-1 Shipping list for Cryopump system･････････････････････････ 2-1 2-2 Shipping list for Cryopump assembly･･･････････････････････ 2-1 3-1 Quick Installation･････････････････････････････････････････3-1 5-1 Cryopump Temperature Indication･････････････････････････ 5-3 5-2 Maximum Quantity of Sucked Gas Processable by Cryopump･ 5-5 Ⅲ ULVAC CRYOGENICS INCORPORATED...
- Page 12 Table of Contents 8-1 Maintenance Parts and Intervals･･･････････････････････････ 8-2 8-2 CRYO-U®4H Consumables････････････････････････････････ 8-3 A-1 Cryopump Fault Diagnosis････････････････････････････････ A-2 A-2 Operating Log････････････････････････････････････････････ A-7 F-1 Dew-Point Temperature･･･････････････････････････････････ F-2 Ⅳ ULVAC CRYOGENICS INCORPORATED...
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Page 13: Safety Instructions
Also, it is surely required to install an exhaust duct which is connected to the pressure relief valve in order to process the gas safely. If using a toxic or flammable gas, please consult with us when necessary. ULVAC CRYOGENICS INCORPORATED S-1 ... - Page 14 Figure 1 Pressure Relief Valve (ULVAC CRYOGENICS products) 2. Confirm the safety of secondary- generated gases in process Some gases would be secondarily generated in vacuum processes. They might ontain flammable gas, explosive gas, toxic gas, or combustion enhancing gas.
- Page 15 15.5 - 94 38 - 90 Ammonium 15 - 79 25.4 - 75 The high pressure gas safety institute of Japan; "Koatsu-gas Kogyo Gijyutu" (High pressure gas industrial chnology) published by Kyoritsu Shuppan Co., Ltd. 1977 ULVAC CRYOGENICS INCORPORATED S-3 ...
- Page 16 Possible causes of ignition in the vacuum equipment are the followings: Ignition by a vacuum gauge filament being turned on Ignition by a heater with heating element(s) exposed into the process circumstance or the like ULVAC CRYOGENICS INCORPORATED...
- Page 17 In case that a remarkable amount of ozone is generated in the process and accumulated in the cryopump, the following phenomena could be occurred around the pump at the initial stage of regeneration: ① Cracking/popping sounds (as in electrical arching) occurring within the first few ULVAC CRYOGENICS INCORPORATED S-5 ...
- Page 18 Moreover, you may have to take additional safety measures depending on the kind of the gas used, the process conditions, or the environment used. Be sure to take required and sufficient safety precautions according to actual conditions. ULVAC CRYOGENICS INCORPORATED...
- Page 19 At this moment, however, never do evacuation of the hazardous gases remained in the cryopump by using a roughing pump. Because, there is a possibility that such a ULVAC CRYOGENICS INCORPORATED...
- Page 20 It is necessary to prepare some adequate devices to introduce an inert gas automatically into both the cryopump and exhaust duct. The devices include a thermometer, a valve for purge inert gas to the cryopump, a ULVAC CRYOGENICS INCORPORATED...
- Page 21 Service Engineering Division or the nearest customer support center for technical assistance. If you will perform maintenance or disassembly of the refrigerator by yourself, take the following special precautions for maintenance or disassembly of the refrigerator . ULVAC CRYOGENICS INCORPORATED...
- Page 22 1. Exhaust the helium gas completely from self-sealing couplings on both helium return and supply flexible hoses by using the charging adapter. 2. Make sure that the helium gas pressure has fallen on 0 MPaG and then loosen the bolts. NOTE: Do not loosen all the fixed components such as the bolts, plugs, and pressure relief valve pointed by arrows in Figure 3 before discharging the helium gas.
- Page 23 Earth : D-class grounding with the ground resistance of 100 Ω or less. ② Install ground-fault interrupter on the electric supply line for the compressor unit. ③ Do not connect any devices except a cryopump system on the outlet of the ground-fault interrupter. ULVAC CRYOGENICS INCORPORATED S-11 ...
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Page 25: Disposal Consideration
We will offer you Material Safety Data Sheet (called MSDS) of our products upon your request. If you have any questions, please contact our Service Engineering Division or the nearest customer support center. MZIW001E,2010.01 ULVAC CRYOGENICS INCORPORATED IW-1... - Page 26 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...
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Page 27: Cryopump Description
Flexible hoses Input power cable Compressor Refrigerator unit Cooling water line unit Refrigerator power cable Typical CRYO-U ® Cryopump System Figure 1-1 ULVAC CRYOGENICS INCORPORATED 1-1 ... -
Page 28: Specifications
Can be installed in any Mounting orientation orientation (*2) (*1) This shows the weight of standard cryopump. It varies depending on the model. (*2) Mounting orientation may be limited depending on kinds or quantity of gases to pump. ULVAC CRYOGENICS INCORPORATED... -
Page 29: Environmental Requirements
(*1) Depending on the ambient temperature and humidity, dew condensation may form on an operating cryopump as the surface of the pump case becomes cooler than the dew-point (Refer to “Appendix F Dew Point Temperature”). Use an air conditioner to control temperature and humidity to prevent condensation. ULVAC CRYOGENICS INCORPORATED 1-3 ... - Page 30 Cryopump Description 108.5 79.5 φ101.6 114.3 φ130 ULVAC CRYOGENICS INCORPORATED...
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Page 31: Major Components
(Condensation panel ) ⑦2nd stage ⑪Helium gas supply connector ③15K cryopanel(2 ) ⑧Thermometer ⑫Refrigerator input power connector (Adsorption panel ) ④Pump case ※The thermometer will vary depending on customer’s specifications. Figure 1-3 Major Components ULVAC CRYOGENICS INCORPORATED 1-5 ... - Page 32 Cryopump Description This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 33: Chapter 2 Inspection
Table 2-2 Shipping List for Cryopump assembly Item Quantity ® CRYO-U cryopump Instruction manual ・This instruction manual 1 each (*3) ・Instruction manual of optional devices for cryopump (*3) Diode Indicator. 2-1 ULVAC CRYOGENICS INCORPORATED... -
Page 34: First Inspection Of Cryopump
If you find any missing parts or damages of the product, please contact our Service Engineering Division or the nearest Customer Support Center. ULVAC CRYOGENICS INCORPORATED... -
Page 35: Quick Installation
Section 4.9 ６ compressor unit. Connect the input power cable from the compressor unit to its power Section 4.9 ７ source. Start the cryopump system according to the procedure described in Section 5 ８ “Section 5 Operation”. MA03001E,2010.01 ULVAC CRYOGENICS INCORPORATED... -
Page 36: Quick Installation Process Flow
・ Connect input power cable of the compressor unit to main power source. ・ Check the followings. a. Input voltage b. Connection of ground line The system installation is ended! operation. *Move on to Section 5 about an Figure 3-1. Quick Installation Process Flow ULVAC CRYOGENICS INCORPORATED... -
Page 37: Installation
Insert a fore-line trap into the roughing line Use a drypump as the roughing pump ULVAC CRYOGENICS INCORPORATED 4-1 ... - Page 38 ：VACUUM CHAMBER ROUGHING VALVE ：PURGE GAS INTRODUCTION VALVE (if req uired) ：PURGE GAS EXHAUST VALVE (if req GV2 * uired) * Refer to Sec tion 4.4 for more details. ® Figure 4-1 ample of CRYO-U Cryopump V acuum System ULVAC CRYOGENICS INCORPORATED...
- Page 39 Water Usable (○) Usable (○) Examples of Cryopump Installation gure 4-2 ULVAC CRYOGENICS INCORPORATED -4-3 ...
- Page 40 R250 ＊ This shows the minimal maintenance space required for a refrigerator unit. Maintenance Space Figure 4-3 ULVAC CRYOGENICS INCORPORATED...
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Page 41: Connecting Roughing Pump
Be sure to connect an exhaust pipe to the cryopump pressure relief valve also. ◆Do not block the pressure relief valve. See “Safety Instructions” for details. ULVAC CRYOGENICS INCORPORATED -4-5 ... -
Page 42: Connecting Cooling Water Pipe
２． (see Figure 4-4): a. Connect the helium-gas supply flexible hose to the helium-gas supply connector on the compressor unit. Connect the helium-gas return flexible hose to the ULVAC CRYOGENICS INCORPORATED... -
Page 43: Connecting Remote Wiring
４．The method of starting the compressor unit different depending on the models. Read the compressor unit instruction manual for more information. ULVAC CRYOGENICS INCORPORATED -4-7 ... -
Page 44: Connecting Flexible Hose
by hand. Tighten with Hold with a spanner. spanner. ②Tighten the self-sealing coupling using two spanners until the fittings are firmly sealed. When using torque wrench, the recommended torque value is 20N･m. Figure 4-4 Connecting Flexible Hoses ULVAC CRYOGENICS INCORPORATED... -
Page 45: Chapter 5 Operation
１．Start up the roughing pump. ２．Open the roughing valve（RV1）and then rough pump the cryopump. ULVAC CRYOGENICS INCORPORATED 5-1 ... -
Page 46: Pressure Buildup Test
80K shield can be measured with K thermocouple also. (Please refer to MBS-C instruction manual for more details.) If Hydrogen Vapor Pressure Gauge is mounted on 15K cryopanel and K thermocouple is mounted on 80K shield, refer to Table 5-1 for their indications and outputs. ULVAC CRYOGENICS INCORPORATED... -
Page 47: Normal Operation
If you use an oil-sealed rotary pump as a roughi ng pump, and rough pumped for a long time at the pressure of 40Pa or less, it is recommended to add a fore-line trap ULVAC CRYOGENICS INCORPORATED 5-3 ... -
Page 48: Crossover
The maximum quantity of sucked gas which is instantaneously processable varies with the heat load on the cryopump and the quantity of the gas condensed in the cryopump. (Refer to Table 5-2.) ULVAC CRYOGENICS INCORPORATED... -
Page 49: Shutdown Procedures
Maintain a better condition for cryopump so that it can work any time when needed. ULVAC CRYOGENICS INCORPORATED 5-5 ... -
Page 50: Handling Of Hazardous Materials
In addition, be careful not to exceed atmospheric pressure with those gases during regeneration. Please refer to Safety Instructions for these hazardous gases. ◆When transporting cryopumps which have pumped hazardous materials, take appropriate measures following applicable laws or regulations. ULVAC CRYOGENICS INCORPORATED... -
Page 51: Chapter 6 Regeneration
Safety section. ◆Regarding toxic, corrosive, or other dangerous gases, be sure to process them safely so as not to harm the human body etc. Refer to Section 5.8 Handling of Hazardous Materials for the details. ULVAC CRYOGENICS INCORPORATED 6-1 ... -
Page 52: Regeneration Time
(nitrogen gas that its dew point temperature is −40℃ or below or argon Refer to Paragraph 「6. Regeneration」 in the Safety section after pumping flammable, explosive, or combustion enhancing gas. ULVAC CRYOGENICS INCORPORATED... - Page 53 ・ Shortens the time period to check the pressure build-up, as the inert gas will reduce the amount of water adsorbed onto 15K cryopanel. ULVAC CRYOGENICS INCORPORATED 6-3 ...
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Page 54: Regeneration Flow Chart
Start up cryopump After closing the roughing valve (RV1), start the cryopump. When the cryopump is cooled down Cool down completed to the prescribed temperature, the regeneration process is completed Regeneration completed ULVAC CRYOGENICS INCORPORATED... - Page 55 6.5Pa for five minutes, the check is completed. If it increased 6.5Pa or more, repeat the rough Rough pump to 40 Pa pumping procedures to 40Pa and the pressure buildup check. ULVAC CRYOGENICS INCORPORATED 6-5 ...
- Page 56 ・ A pump case might dew during warming up depending on the installation environment. In order to prevent a short circuit, please do not place an electric device under the cryopump. ULVAC CRYOGENICS INCORPORATED...
- Page 57 In this case, the pressure relief valve will open according to the following condition to release the gas. The pressure at which the pressure relief valve begins to open is 10 kPaG, and full open is 20 kPaG. ULVAC CRYOGENICS INCORPORATED 6-7 ...
- Page 58 Regeneration This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 59: Disconnection And Storage
・However, only when carrying out heli um circuit dec ontamination procedures for the refrigerator unit, disconnect the flexible hoses from helium gas supply and return connectors at the compressor unit side right after shutdown. Refer to Section 8.5 for more details. MA07001E,2010AT01 ULVAC CRYOGENICS INCORPORATED... -
Page 60: 7.2 Storage
(of 100Pa or less) or under the atmospheric pressure replaced with dry nitrogen. ◆If the cryopump is removed from your vacuum system, After the cryopump has reached room temperature completely, disconnect the flexible hoses. ULVAC CRYOGENICS INCORPORATED... - Page 61 ◆Connect the refrigerator cable and operate the cryopump about 10 minutes biannually. This work is effective in maintaining the grease lubrication of the bearings used in the refrigerator. When the cryopump has been placed without operating for one year or more, perform cryopump decontamination before resumption of operation. ULVAC CRYOGENICS INCORPORATED...
- Page 62 Disconnection and Storage This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
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Page 63: Chapter 8 Maintenance
Helium charging adapter kit A700B5101000 (Regulator, Charging hose 2.4M, Charging adopter) <Items independently available> Regulator (for helium gas) A700A5101700 Charging hose 2.4M A700A5101800 Charging adapter A700B5101100 − − Helium gas (with purity of 99.999% or above) 8-1 ULVAC CRYOGENICS INCORPORATED... - Page 64 Intake/Exhaust 16,000 hours At fault valve body Other parts replacement Other parts At fault Compressor unit Adsorber replacement Adsorber Refer to the compressor unit instruction manual. (*1)： Only applicable to a cryopump system with heater. ULVAC CRYOGENICS INCORPORATED...
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Page 65: Consumables
O-ring (N5) Purge gas assembly O-ring (AS568-012) Notes: 1) Material of O-ring: Viton recommend. 2) Type N of O-ring is based on the standard enacted by ULVAC Inc. Other types of O-ring are based on JIS or ANSI standard. ... -
Page 66: Cleaning The Cryopump
Maintenance of the pressure relief valve ◆ WARNING If the pressure relief valve is kept capped for a long time, it may fail to open at required pressure. ULVAC CRYOGENICS INCORPORATED... -
Page 67: Charging Helium Gas
Improperly connected self-sealing coupling might be one of the causes of the leakage. ◇Recommended regulator is the one designed for helium gas (left-hand thread) and has the pressure gauge of 4-6MPaG on low pressure side. 8-5 ULVAC CRYOGENICS INCORPORATED... - Page 68 ４．Adjust the outlet pressure of the regulator at 1.8 MPaG. Pressure relief valve has to be mounted as well as the regulator. The set pressure of the pressure relief valve is ULVAC CRYOGENICS INCORPORATED...
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Page 69: Charging Helium Gas
３ ＣＨ １ ４ ５ ６ ７ ８ ＣＯＭ ＲＳＴ ＳＵＰＰＬＹ Flexible Hose Charging Hose ＲＥＴＵＲＮ Charging Port Coldhead Cable Cooling Water Line Figure 8-1 Charging Helium Gas 8-7 ULVAC CRYOGENICS INCORPORATED... -
Page 70: Helium Circuit Decontamination
It is important to remove the flexible hoses right after shutdown in order to prevent re-diffusion of the impurities that have been coagulated in the refrigerator unit. Attach the charging adaptor to the disconnected end of the helium SUPPLY and RETURN flexible hoses.(See Figure 8-3) ULVAC CRYOGENICS INCORPORATED... -
Page 71: Disconnecting Flexible Hose
Therefore, ensure to reduce the inner pressure right after shutdown of the refrigerator in order not to work the pressure relief valve. Cryopump Charging Adopter Ｖ２ Flexible Hose ＳＵＰＰＬＹ Release He gas Ｖ１ ＲＥＴＵＲＮ Release He gas XXXXXXXX ****** Coldhead Cable Ｖ３ Figure 8-3 Connecting Charging Adopter 8-9 ULVAC CRYOGENICS INCORPORATED... - Page 72 Charging Adopter Charging Hose High Purity Helium Bottle Flexible Hose Ｖ２ ＳＵＰＰＬＹ Charge helium gas Ｖ１ ＲＥＴＵＲＮ Release helium gas XXXXXXXX ****** Compressor Unit Cold head cable Ｖ３ To Roughing Pump Figure 8-4 Cryopump Decontamination Procedure (1) 8-10 ULVAC CRYOGENICS INCORPORATED...
- Page 73 After the pressure reaches below the atmospheric pressure, the valve (V3) can be fully opened. Therefore, monitor the pressure of the roughing pump head with an appropriate pressure gauge. The maximum allowable pressure for ULVAC’s small oil-sealed rotary pump and drypump is 0.01MPaG. ...
- Page 74 The pressure relief valve on the refrigerator may work if the charge inlet of SUPPLY /RETURN at the compressor unit and SUPPLY /RETURN flexible hoses are connected reversely, and this requires maintenance servicing. Make sure that they are connected properly. 8-12 ULVAC CRYOGENICS INCORPORATED...
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Page 75: Connecting Flexible Hoses
ＲＥＴＵＲＮ ＧＡＳ ＲＥＴＵＲＮ ＧＡＳ ＳＵＰＰＬＹ ＧＡＳ Connect Here ＷＡＴＥＲ ＩＮ ＩＮ ＷＡＴＥＲ ＯＵＴ Flexible Hose ＳＵＰＰＬＹ ＯＵＴ Cooling Water Line ＲＥＴＵＲＮ Figure 8-6 Connecting Flexible Hoses 8-13 ULVAC CRYOGENICS INCORPORATED... - Page 76 Maintenance This page intentionally left blank. 8-14 ULVAC CRYOGENICS INCORPORATED...
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Page 77: Troubleshooting
Regarding various potential failures, the itemⅠto Ⅶ in Table A-1 explains its cause and measure respectively. When the trouble cannot be solved, please contact our Service Engineering Division or the nearest customer support center. ULVAC CRYOGENICS INCORPORATED A-1 ... - Page 78 Therefore, check unit. The refrigerator motor may be your control method to judge damaged if this caution is not whether the halt condition of the followed. refrigerator is normal or not. ULVAC CRYOGENICS INCORPORATED...
- Page 79 If the cryopump still fails to cool down to 20K or lower even when the main valve is closed, the refrigerator unit may be out of order. Contact our Service Engineering Division or the nearest CS center. ULVAC CRYOGENICS INCORPORATED...
- Page 80 Replacement of the indium sheet is required. ②Mounting bolts of 80K shield If necessary, disassemble the and 15K cryopanel. cryopump and retighten all screws. Replacement of the indium sheet is required. ULVAC CRYOGENICS INCORPORATED...
- Page 81 13Pa or less for a Be sure not to perform rough long time using the oil-sealed pumping at 40Pa or less for a long rotary pump, the panel has time. been contaminated with oil. ULVAC CRYOGENICS INCORPORATED...
- Page 82 Optimum voltage of the refrigera- tor unit is 144V for two-phase motor and 200V for three-phase motor. Because it should be a check under the hot line condition, an appropriate maintenance person in charge needs to check. ULVAC CRYOGENICS INCORPORATED...
- Page 83 POWER CRYO-U OPERATING COMPRESSOR S/N REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure 【Pa】 stage stage ︻ ︻ ︻ ︼ ︼ ︼ (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
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Page 85: Flexible Hose
・ Avoid twisting the flexible hose especially when making final connection. ・ Keep away from water and salt to prevent corrosion. Do not put heavy things on the flexible hoses in order to prevent modification and crushing of them. MA0B001E,2010.01 ULVAC CRYOGENICS INCORPORATED... - Page 86 Flexible Hose This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
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Page 87: Conversion Of Thermometer Readings
CRYO-U Cryopump Instruction Manual ® Appendix C CONVERSION OF THERMOMETER READINGS 1． Silicon Diode Sensor Output Voltage Voltage （V） Temperature （K） ULVAC CRYOGENICS INCORPORATED C-1 ... - Page 88 Conversion of Thermometer Readings This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
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Page 89: Principle Of Cryopump Operation
This operation is called “regeneration” by which the performance of the cryopump can be recovered through the “temperature rise (exhaust of gas) -> degassing -> cooling” process. MA0D001E,2010.01 ULVAC CRYOGENICS INCORPORATED... -
Page 90: Vapor Pressure Of Various Kinds Of Gas
Principles of Cryopump Operation Temperature (K) [R.E.Honing and H.O.Hook: RCA Review (Sept. 1960)] Figure D-1 Vapor Pressure of Various Kinds of Gas ULVAC CRYOGENICS INCORPORATED... -
Page 91: Principle Of Refrigerator Operation
In this way, a refrigeration cycle returns to the first state. By repeating this refrigeration cycle, cryogenic temperature is obtained. Compressor unit High Displacer pressure pressure Valve A Valve B Thermal load High temp. temp. Expansion chamber (Low temperature) Regenerator Figure E-1 Principle of Refrigeration MA0E001E,2010.01 ULVAC CRYOGENICS INCORPORATED... - Page 92 Therefore, it is a highly efficient and reliable refrigeration cycle. In this manual, the refrigeration cycle with the mechanical driving system adopted by ULVAC CRYOGENICS INC is explained. Figure E-2 shows the principle of G-M cycle & P-V chart (P: pressure, V: volume in the expansion chamber).
- Page 93 Moreover, since difference pressure is not applied to seals on the 1st stage and 2nd stage, the structure where the load to the seal is light has been adopted. Therefore, a long-lived, high reliability is acquired. ULVAC CRYOGENICS INCORPORATED...
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Page 94: Two-Stage Refrigerator
1 cycle P-V diagram W=∮PdV －P Volume of Expansion Chamber Figure E-2 Principle of G-M Cycle Operation 1st Displacer 1st Seal Regenerator Expansion chamber LOAD 2nd Displacer 2nd Seal Expansion chamber Figure E-3 Two-stage Regenerator LOAD Refrigerator ULVAC CRYOGENICS INCORPORATED... -
Page 95: Dew Condensation
Residual moisture is frozen during Go through the regeneration process Regeneration rough pumping again, confirm that the cryopump passes the pressure buildup check, and start refrigeration. ULVAC CRYOGENICS INCORPORATED... - Page 96 23.0 25.2 26.0 27.2 10.5 14.9 18.4 21.4 23.9 26.2 27.0 28.2 * The calculation is based on Sonntag’s equation. * When the ambient relative humidity is above 85%, dew condensation will form on the cryopump case. ULVAC CRYOGENICS INCORPORATED...
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Page 97: Service Network
Tel : +81-6-6397-0112 Fax: +81-6-6397-0126 <Inquiries about cryostats or LN generators> Kyoto Factory 140-1,Megawa,Makishima-cho,Uji,kyoto,611-0041,Japan Tel : +81-774-28-5595 Fax: +81-774-20-2201 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 451-831 Tel : +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC. www.ulvac-cryo.com 1-2 Floor, Shuguang Building, No.6 Jingyua Road,... - Page 98 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
- Page 99 P.S-7 Figure 2 The description on "Exhaust line" has been modified. 2017-11-02 2017NR10 “Table1-1 Specifications” has been modified. “1.3 Environmental Requirements” has been added. “8. Maintenance” has been revised. “Appendix F Dew Condensation” has been added. “SERVICE NETWORK” has been revised. ULVAC CRYOGENICS INCORPORATED R-1 ...
- Page 100 Revision This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...