Ulvac CRYO-U Series Instruction Manual page 31

®
CRYO-U Cryopump Instruction Manual
®
[CRYO-U
UVG-200
Ｃ φ300
Ｃ
φ254
110
Figure 1-2
8HSP]
6B ANSI UFC253
φ279 φ253.2
110
External Drawing of CRYO-U
ULVAC CRYOGENICS INCORPORATED
[CRYO-U
UVG-200
337.8
Ａ
523.7
Ｂ
Ｃ Φ300
Ｄ Φ203.2
Ｃ
Ｄ
®
Cryopump (Continued)
(Unit: mm)
®
8H-U]
6B ANSI
337.8
523.7
Φ279
Φ203.2
78.5
1-5