Ulvac CRYO-U Series Instruction Manual page 32

Cryopump Description
[CRYO-U
UVG-200 6B ANSI
215.6 215.6
Ａ
437.1 437.1
Ｂ
Ｃ Φ300 Φ279
216.3
Ｄ Φ Φ203.2
Ｃ
Ｄ
Figure 1-2 External Drawing of CRYO-U
1-6
®
8HL]
UFC253
215.6
437.1
Ａ
φ253.2
Ｂ
φ203.2
Ｃ
Ｄ
Ｂ
ULVAC CRYOGENICS INCORPORATED
[CRYO-U
U10H
UVG-250 UFC306 ICF305
214 214
600 600 600
Φ350 Φ306 Φ30
Φ267.4 Φ267.4 Φ 267
Option
®
Cryopump (Continued)
(Unit: mm)
® ®
10H, U 10PU]
U10PU
UVG-250 UFC306
21 4 200 200
600 600
5 Φ35 0 Φ306
.4 Φ267.4 Φ267.4
Ｃ
Ｄ
95 95
350
ICF305
214
600
Φ305
Φ267.4