Ulvac CRYO-U Series Instruction Manual page 33

®
CRYO-U Cryopump Instruction Manual
(Unit: mm)
®
[CRYO-U 10HL]
UV -250 G
200
Ａ
644.6
Ｂ
Ｃ φ350
Ｄ
φ267.4
Ｃ
Ｄ
Option
(450)
Ｂ
®
Figure 1-2 External Drawing of CRYO-U Cryopump (Continued)
ULVAC CRYOGENICS INCORPORATED 1-7