Ulvac CRYO-U4H Manuals

Manuals and User Guides for Ulvac CRYO-U4H. We have 1 Ulvac CRYO-U4H manual available for free PDF download: Instruction Manual

Ulvac CRYO-U4H Instruction Manual

Ulvac CRYO-U4H Instruction Manual (100 pages)

Brand: Ulvac | Category: Water Pump | Size: 3.36 MB

Table of Contents

Table of Contents
9
Safety Instructions
13
Disposal Consideration
25
CHAPTER 1 Cryopump Description

27
- Typical CRYO-U ® Cryopump System
  27
  - Specifications
    28
- Cryo-U
  28
  - Environmental Requirements
    29
  - Environmental Specifications
    29
  - Major Components
    31
CHAPTER 2 Inspection

33
- Shipping List
  33
- Shipping List for Cryopump System
  33
- Shipping List for Cryopump Assembly
  33
- First Inspection of Cryopump
  34
- Quick Installation
  35
- Quick Installation Process Flow
  36
CHAPTER 3 Quick Installation

37
CHAPTER 4 Installation

37
- Auxiliary Equipments Required
  37
- Connecting Roughing Pump
  41
- Connecting Purge Gas Line
  41
- Connecting Exhaust Pipe
  41
- Connecting Cooling Water Pipe
  42
- (Connecting Flexible Hoses)
  42
- Connecting Remote Wiring
  43
- Connecting Electrical Cables
  43
- Connecting Flexible Hose
  44
CHAPTER 5 Operation

45
- Prior to Startup
  45
- Rough Pumping
  45
- Pressure Buildup Test
  46
- Startup and Cooldown
  46
- Normal Operation
  47
- Cryopump Temperature Indication
  47
- Crossover
  48
- Shutdown Procedures
  49
- Maximum Quantity of Sucked Gas Processable by Cryopump
  49
- Handling of Hazardous Materials
  50
CHAPTER 6 Regeneration

51
- Regeneration Time
  52
- Warm-Up Method
  52
- Regeneration Flow Chart
  54
CHAPTER 7 Disconnection and Storage

59
CHAPTER 8 Maintenance

63
- Scheduled and Unscheduled Maintenance
  63
- Consumables
  65
- Cleaning the Cryopump
  66
- Charging Helium Gas
  67
- Charging Helium Gas
  69
- Helium Circuit Decontamination
  70
- Disconnecting Flexible Hose
  71
- Connecting Flexible Hoses
  75
  - Troubleshooting
    77
  - Flexible Hose
    85
  - Conversion of Thermometer Readings
    87
  - Principle of Cryopump Operation
    89
- Vapor Pressure of Various Kinds of Gas
  90
  - Principle of Refrigerator Operation
    91
- Principle of Refrigeration
  91
- Two-Stage Refrigerator
  94
  - Dew Condensation
    95
- Service Network
  97

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