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Ulvac CRYO-U Series Instruction Manual

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CRYOPUMP
CRYO-U
® SERIES
Instruction Manual
CRYO-U
®
12HSPL
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping speed of 15000L/s or
more fall under row 2(35) of appended table 1 of Japan's Export Trade
Control Order, which is based on international export control regimes.
Also, when applying a refrigerator system to a cryocooler for optical
sensors, the cryocooler falls under row 10(2) of appended table 1 of Japan's
Export Trade Control Order as well.
Customers must follow all related rules and regulations such as Foreign
Exchange and Foreign Trade Act and take appropriate procedures when
exporting or re-exporting those products.
D/N.MA12D00E, 2022AL14
ULVAC CRYOGENICS INCORPORATED

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  • Page 1 10(2) of appended table 1 of Japan’s Export Trade Control Order as well. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting or re-exporting those products. D/N.MA12D00E, 2022AL14 ULVAC CRYOGENICS INCORPORATED...
  • Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
  • Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
  • Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
  • Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
  • Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
  • Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

  • Page 9: Table Of Contents

    4.8 Connecting Remote Wiring･････････････････････････････ 4-8 4.9 Connecting Electrical Cables･･････････････････････････ 4-8 SECTION 5 Operation 5.1 Prior to Startup･･･････････････････････････････････････ 5-1 5.2 Rough Pumping･･･････････････････････････････････････ 5-1 5.3 Pressure Buildup Test･･････････････････････････････････ 5-2 5.4 Startup and Cooldown･････････････････････････････････ 5-2 5.5 Normal Operation･････････････････････････････････････ 5-3 5.6 Crossover･････････････････････････････････････････････ 5-4 ULVAC CRYOGENICS INCORPORATED Ⅰ...
  • Page 10 8.5 Helium Circuit Decontamination････････････････････････ 8-8 APPENDICES A. Troubleshooting･････････････････････････････････････････ A-1 B. Flexible Hose･･･････････････････････････････････････････ B-1 C. Conversion of Thermometer Readings･････････････････････ C-1 D. Principle of Cryopump Operation･････････････････････････ D-1 E. Principle of Refrigerator Operation･･･････････････････････ E-1 F. Dew Condensation･･････････････････････････････････････ F-1 Service Network･･･････････････････････････････････････････････CS-1 ULVAC CRYOGENICS INCORPORATED Ⅱ...
  • Page 11 3-1 Quick Installation････････････････････････････････････････ 3-1 5-1 Cryopump Temperature Indication (When used at room temp.of 20℃)･････････････ 5-3 5-2 Maximum Quantity of Sucked Gas Processable by Cryopump (Guideline Quantity to the Air)････････････････ 5-5 8-1 Maintenance Parts and Intervals･･･････････････････････････ 8-2 ULVAC CRYOGENICS INCORPORATED Ⅲ...

  • Page 12: 8-2 Cryo-U

    Table of Contents 8-2 CRYO-U 12HSPL Consumables･･･････････････････････････ 8-3 ® A-1 Cryopump Fault Diagnosis････････････････････････････････ A-2 A-2 Operating Log････････････････････････････････････････････ A-7 F-1 Dew Point Temperature･･･････････････････････････････････ F-2 ULVAC CRYOGENICS INCORPORATED Ⅳ...

  • Page 13: Safety Instructions

    Also, it is required to install an exhaust duct which is connected to the pressure relief valve in order to process the gases safely. If the use of such toxic or flammable gases is planned, please consult with us as necessary. ULVAC CRYOGENICS INCORPORATED...
  • Page 14 KF25 flange is attached to the pressure relief valve for installing a duct. Figure 1 Pressure Relief Valve (from ULVAC CRYOGENICS) 2. Check the safety of secondary- generated gases in process Some gases are generated in vacuum processes as by-products. They may include flammable, oxidizing, explosive, or toxic gases.
  • Page 15 Carbon Monoxide 15.5 - 94 38 - 90 Ammonium 15 - 79 25.4 - 75 The high pressure gas safety institute of Japan; "Koatsu-gas Kogyo Gijyutu" (High pressure gas industrial technology) published by Kyoritsu Shuppan Co., Ltd. 1977 ULVAC CRYOGENICS INCORPORATED...
  • Page 16 Possible causes of ignition in the vacuum equipment are as follows:  Ignition by a vacuum gauge filament being turned on  Ignition by a heater with heating element(s) exposed into the process circumstance or the like ULVAC CRYOGENICS INCORPORATED...
  • Page 17 In case that large amount of ozone is generated in the process and accumulated in the cryopump, following may be observed at the time of regeneration: (1) Cracking/popping sounds (as in electrical arching) is heard in the first few minutes of regeneration. ULVAC CRYOGENICS INCORPORATED...
  • Page 18 Refer to Figure 2 and take necessary measures. You may have to take additional safety measures depending on the kind of the gas used, the process conditions, or the environment used. Be sure to take required and sufficient safety precautions according to actual conditions. ULVAC CRYOGENICS INCORPORATED...
  • Page 19 (3) Eliminate ignition factor. Insure that there are no sources of ignition (refer to “4. When pumping flammable or explosive gases”) on the cryopump side during ULVAC CRYOGENICS INCORPORATED...
  • Page 20 UPS (Uninterruptible Power Supply system) installation In case that the cryopump stops because of blackout etc, hydrogen explosion or high-temperature combustion which must occur if high concentration of O or H ULVAC CRYOGENICS INCORPORATED...
  • Page 21  If the cryopump is used to pump corrosive gases, periodic pressure proof test is recommended.  ULVAC CRYOGENICS INC. conducts the pressure proof test of the cylinder by increasing the gas pressure to 1.5 times as high as the operating pressure.
  • Page 22 3. Fill the refrigerator with the helium gas slowly confirming that there is no defect or abnormality. 4. When adding the helium gas, please follow the all instructions described in “8.4 Cryopump Decontamination Procedures” in this manual. S-10 ULVAC CRYOGENICS INCORPORATED...
  • Page 23 Earth : D-class grounding with the ground resistance of 100 Ω or less. (2) Install ground-fault interrupter on the electric supply line for the compressor unit. (3) Do not connect any devices except a cryopump system on the outlet of the ground-fault interrupter. ULVAC CRYOGENICS INCORPORATED S-11...
  • Page 24 Contact us when the self-sealing coupling is loosened or removed. Servicing for trouble is out of warranty if it occurs while the sealing sticker is not in the original state. Sealing sticker Sealing sticker Figure 4 Examples of the sealing stickers S-12 ULVAC CRYOGENICS INCORPORATED...

  • Page 25: Disposal Consideration

    Contact your safety supervisor and follow the instructions to remove such toxic substances before disposing. We provide Safety Data Sheet (SDS) of our products upon your request. Please contact us if necessary. MZIW002E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1...
  • Page 26 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...

  • Page 27: Section 1 Cryopump Description

    As shown in Figure 1-1, cryopump system consists of a cryopump assembly (including refrigerator unit), a compressor unit, flexible hoses, and several cables. Cryopump assembly Flexible hoses Input power cable Compressor Refrigerator unit Cooling water line unit Refrigerator power cable Figure 1-1 Typical CRYO-U® Cryopump System ULVAC CRYOGENICS INCORPORATED...

  • Page 28: Specifications

    Mounting orientation Can be installed in any orientation(*2) (*1) This figure is the weight of standard cryopump. The weight varies depending on model. (*2) Mounting orientation might be limited depending on the kind of gases to pump. ULVAC CRYOGENICS INCORPORATED...

  • Page 29: Environmental Requirements

    ◆ Thermometer ・ MBS-C CRYO METER ・ Hydrogen Vapor Pr essure Gauge Charged Pressure ：0.35±0.02MPaG at room te K thermocouple Electromotive Force：Approximate 0mV at 20℃ ・ ◆Accessory Flange(C-type) 1.25 ４－φ４．５ hole O ring ＡＳ５６８－０２０ ULVAC CRYOGENICS INCORPORATED...

  • Page 30: External Drawing Of Cryo-U

    Note: UVG flange is equivalent to VG of JIS standard. (Unit: mm) 【CRYO-U ® 12HSPL】 UVG-300 10B ANSI ISO K DN320 Ａ 314.5 314.5 314.5 Ｂ Ｃ Φ400 Φ406 Φ370 Ｄ Φ304.8 Φ304.8 Φ304.8 Ｃ Ｄ Option Ｂ ® External Drawing of CRYO-U Cryopump Figure 1-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 31 ⑪ Helium gas return connector ③15K cryopanel(1) ⑦1st stage ⑫Helium gas supply connector （Condensation panel） ⑧2nd stage ⑬Refrigerator input power connector ④15K cryopanel(2) ⑨MBS-C CRYO METER ⑭Traveling base (option) （Adsorption panel） Figure 1-3 Major Components ULVAC CRYOGENICS INCORPORATED...
  • Page 32 Cryopump Description This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 33: Section 2 Inspection

    Shipping List for Cryopump assembly Item Quantity ® CRYO-U cryopump Instruction manual ・This instruction manual 1 each (*3) ・Instruction manual of optional devices for cryopump (*3) MBS-C CRYO-METER, RBH Band Heater, Regeneration Gas Purge PR Unit, etc. ULVAC CRYOGENICS INCORPORATED...

  • Page 34: 2.2 First Inspection Of Cryopump

    For optional devices such as MBS-C CRYO-METER, please refer to instruction manuals of each device for more information. If you find any missing parts or damages of the product, please contact our Service Engineering Division or the nearest Customer Support Center. ULVAC CRYOGENICS INCORPORATED...

  • Page 35: Section 3 Quick Installation

    Section 4.9 ６ compressor unit. Connect the input power cable from the compressor unit to its power Section 4.9 ７ source. Start the cryopump system according to the procedure described in Section 5 ８ “Section 5 Operation”. MA03001E,2010.01 ULVAC CRYOGENICS INCORPORATED...

  • Page 36: Quick Installation Process Flow

    ・ Connect input power cable of the compressor unit to main power source. ・ Check the followings. a. Input voltage b. Connection of ground line The system installation is ended! operation. *Move on to Section 5 about an Figure 3-1. Quick Installation Process Flow ULVAC CRYOGENICS INCORPORATED...

  • Page 37: Auxiliary Equipments Required

    If it would be concerned that the rotary pump oil might flow backward by rough pumping for a long time, the following measures are recommended: Insert a fore-line trap into the roughing line Adopt a drypump as the roughing pump MA04001E,2012JE02 ULVAC CRYOGENICS INCORPORATED...

  • Page 38: Example Of Cryo-U

    ：VACUUM CHAMBER ROUGHING VALVE GV1 * ：PURGE GAS INTRODUCTION VALVE (if required) GV2 * ：PURGE GAS EXHAUST VALVE (if required) * Refer to Section 4.4 for more details. ® Figure 4-1 Example of CRYO-U Cryopump Vacuum System ULVAC CRYOGENICS INCORPORATED...

  • Page 39: Mounting The Cryopump To The Vacuum System

    *Install the cryopump not to face directly to the heat source. Elbow Pipe Gate Valve Usable (○) Unusable (×) Heat Source Heat Source Conduit Pipe Water Cooling Cooled Baffle Water Usable (○) Usable (○) Examples of Cryopump Installation Figure 4-2 ULVAC CRYOGENICS INCORPORATED...
  • Page 40 Installation R250 ＊ This shows the minimal maintenance space required for a refrigerator unit. Maintenance Space Figure 4-3 ULVAC CRYOGENICS INCORPORATED...

  • Page 41: Connecting Roughing Pump

    In this case, our Regeneration Gas Purge PR Unit should not be used. Please design and construct the purge gas inlet and outlet lines so that dangerous gases can be smoothly exhausted. ULVAC CRYOGENICS INCORPORATED...

  • Page 42: Connecting Exhaust Pipe

    Be sure to connect an exhaust pipe to the cryopump pressure relief valve also. ◆Do not block the pressure relief valve. See “Safety Instructions” for details. ® CRYO-U Cryopump pressure relief valve has KF25 flange to connect the exhaust pipe. ULVAC CRYOGENICS INCORPORATED...

  • Page 43: Connecting Cooling Water Pipe

    ２．Connect the flexible hoses between the compressor unit and the cryopump as follows (see Figure 4-5): a. Connect one end of the “SUPPLY” labeled flexible hose to the helium-gas SUPPLY connector on the compressor unit, and connect the other end of the hose to the ULVAC CRYOGENICS INCORPORATED...

  • Page 44: Connecting Remote Wiring

    ２． Connect the ground. ３． Connect the input power cable from the compressor unit to its power source. ４．The method of starting the compressor unit different depending on the models. Read the compressor unit instruction manual for more information. ULVAC CRYOGENICS INCORPORATED...

  • Page 45: Connecting Flexible Hoses

    Tighten with Hold with a wrench. wrench. ②Tighten the self-sealing coupling using two wrenches until the fittings are firmly sealed. When using torque wrench, the recommended torque value is 20N･m. Figure 4-5 Connecting Flexible Hoses ULVAC CRYOGENICS INCORPORATED...
  • Page 46 Installation This page intentionally left blank 4-10 ULVAC CRYOGENICS INCORPORATED...

  • Page 47: Prior To Startup

    １．Start up the roughing pump. ２．Open the roughing valve（RV1）and then rough pump the cryopump. ULVAC CRYOGENICS INCORPORATED...

  • Page 48: Pressure Buildup Test

    80K shield can be measured with K thermocouple also. (Please refer to MBS-C instruction manual for more details.) If Hydrogen Vapor Pressure Gauge is mounted on 15K cryopanel and K thermocouple is mounted on 80K shield, refer to Table 5-1 for their indications and outputs. ULVAC CRYOGENICS INCORPORATED...

  • Page 49: Normal Operation

    Start as follows. Please keep your operating log regularly. １． Make sure that the 15K cryopanel has reached 20K or lower and the 80K shield has reached 130K or lower. Then turn on the roughing pump and open the roughing valve（RV2）. ULVAC CRYOGENICS INCORPORATED...

  • Page 50: Crossover

    ≦ ssure (Pa Volume of vacuum chamber (L) maximum quantity of sucked gas which is instantaneously processable is given by th limit value at which the cryopu mp c an restore the evacu ation performance. Normally, a ULVAC CRYOGENICS INCORPORATED...
  • Page 51 400 （Pa） pressure (Pa) 00（L） † For reference † In order to restrict the stored quantity of gas an d extend the regeneration cycle, it is ommended to control the actual crossover pressure to 40Pa or less. ULVAC CRYOGENICS INCORPORATED...

  • Page 52: Shutdown Procedures

    In addition, be careful not to exceed atmospheric pressure with those gases during regeneration. Please refer to Safety Instructions for these hazardous gases. ◆When transporting the cryopump which exhausted the hazardous materials, please take appropriate disposal according to the regulation system of each area and a country. ULVAC CRYOGENICS INCORPORATED...

  • Page 53: Section 6 Regeneration

    Safety section. ◆Regarding toxic, corrosive, or other dangerous gases, be sure to process them safely so as not to harm the human body etc. Refer to Section 5.8 Handling of Hazardous Materials for the details. MA06001E,2012JE02 ULVAC CRYOGENICS INCORPORATED...

  • Page 54: Regeneration Time

    (nitrogen gas that its dew point temperature is －40℃ or below or argon). Refer to Paragraph 6.Regeneration after pumping flammable, explosive, or combustion enhancing gas in the Safety section. ULVAC CRYOGENICS INCORPORATED...
  • Page 55 (The band heater or inner heater is not applicable for certain types of cryopump.) ULVAC CRYOGENICS INC. offers different types of standard band heaters such as RBH type and silicon rubber type. The RBH band heaters self control the temperature around 70 ～ 80℃.

  • Page 56: Regeneration Flow Chart

    Then rough pump the cryopump Start up cryopump to 40Pa. After closing the roughing valve (RV1), start the cryopump. When the cryopump is cooled down Cool down completed to the prescribed temperature, the regeneration process is completed Regeneration completed ULVAC CRYOGENICS INCORPORATED...
  • Page 57 40Pa. When it reaches 40Pa or less, turn OFF the heater (optional). Then, close the roughing valve (RV1) and check Rough pump to 40 Pa the buildup of pressure in the cryopump. If the pressure buildup value stayed less than 6.5Pa ULVAC CRYOGENICS INCORPORATED...
  • Page 58 ・A pump case might dew during warming up depending on the installation environment. In order to prevent a short circuit, please do not place an electric device under the cryopump. ULVAC CRYOGENICS INCORPORATED...
  • Page 59 In this case, the pressure relief valve will open according to the following condition to release the gas. The pressure at which the pressure relief valve begins to open is 10 kPaG, and full open is 20 kPaG. ULVAC CRYOGENICS INCORPORATED...
  • Page 60 Regeneration This page intentioanlly left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 61: Disconnecting Flexible Hose････････････････････････････7-1

    ・However, only when carrying out heli um circuit dec ontamination procedures for the refrigerator unit, disconnect the flexible hoses from helium gas supply and return connectors at the compressor unit side right after shutdown. Refer to Section 8.5 for more details. MA07001E,2010AT01 ULVAC CRYOGENICS INCORPORATED...

  • Page 62: Storage･･･････････････････････････････････････････････7-2

    (of 100Pa or less) or under the atmospheric pressure replaced with dry nitrogen. ◆If the cryopump is removed from your vacuum system, After the cryopump has reached room temperature completely, disconnect the flexible hoses. ULVAC CRYOGENICS INCORPORATED...
  • Page 63 ◆Connect the refrigerator cable and operate the cryopump about 10 minutes biannually. This work is effective in maintaining the grease lubrication of the bearings used in the refrigerator. When the cryopump has been placed without operating for one year or more, perform cryopump decontamination before resumption of operation. ULVAC CRYOGENICS INCORPORATED...
  • Page 64 Disconnection and Storage This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 65: Section 8 Maintenance

    Item code Helium charging adapter kit A700B5101000 (Regulator, Charging hose 2.4M, Charging adopter) <Items independently available> Regulator (for helium gas) A700A5101700 Charging hose 2.4M A700A5101800 Charging adapter A700B5101100 － － Helium gas (with purity of 99.999% or above) ULVAC CRYOGENICS INCORPORATED...
  • Page 66 At fault At fault valve body U Other parts replacement Other parts At fault At fault Compressor unit S Adsorber replacement Adsorber Refer to the compressor unit instruction manual. *1) Only applicable to a cryopump system with heater. ULVAC CRYOGENICS INCORPORATED...

  • Page 67: Consumables

    Pressure relief valve O-ring (N5) Notes: 1) Material of O-ring: Viton is recommended. 2) Type N of O-ring is based on the standard enacted by ULVAC Inc. Other types of O-ring are based on JIS, ANSI or ISO standard. ULVAC CRYOGENICS INCORPORATED...

  • Page 68: Cleaning The Cryopump

    Do not wipe the blackened surface of the 80K shield with alcohol. Otherwise the blackened surface may be peeled off with a solvent. Maintenance of the pressure relief valve ◆ WARNING If the pressure relief valve is kept capped for a long time, it may fail to open at required pressure. ULVAC CRYOGENICS INCORPORATED...

  • Page 69: Charging Helium Gas

    Improperly connected self-sealing coupling might be one of the causes of the leakage. ◇Recommended regulator is the one designed for helium gas (left-hand thread) and has the pressure gauge of 4-6MPaG on low pressure side. ULVAC CRYOGENICS INCORPORATED...
  • Page 70 ４．Adjust the outlet pressure of the regulator at 1.8 MPaG. Pressure relief valve has to be mounted as well as the regulator. The set pressure of the pressure relief valve is ULVAC CRYOGENICS INCORPORATED...

  • Page 71: Charging Helium Gas

    High Purity Helium Bottle ＰＷＲ ＳＴＳ １ ＲＤＹ ２ ＲＵＮ ３ ＣＨ１ ４ ５ ６ ７ ８ ＣＯＭ ＲＳＴ ＳＵＰＰＬＹ Flexible Hose Charging Hose ＲＥＴＵＲＮ Charging Port Coldhead Cable Cooling Water Line Figure 8-1 Charging Helium Gas ULVAC CRYOGENICS INCORPORATED...

  • Page 72: Helium Circuit Decontamination

    It is important to remove the flexible hoses right after shutdown in order to prevent re-diffusion of the impurities that have been coagulated in the refrigerator unit. Attach the charging adaptor to the disconnected end of the helium SUPPLY and RETURN flexible hoses.(See Figure 8-3) ULVAC CRYOGENICS INCORPORATED...

  • Page 73: Disconnecting Flexible Hose

    Therefore, ensure to reduce the inner pressure right after shutdown of the refrigerator in order not to work the pressure relief valve. Cryopump Charging Adopter Ｖ２ Flexible Hose ＳＵＰＰＬＹ Release He gas Ｖ１ ＲＥＴＵＲＮ Release He gas XXXXXXXX ****** Coldhead Cable Ｖ３ Figure 8-3 Connecting Charging Adopter ULVAC CRYOGENICS INCORPORATED...
  • Page 74 Charging Adopter Charging Hose High Purity Helium Bottle Flexible Hose Ｖ２ ＳＵＰＰＬＹ Charge helium gas Ｖ１ ＲＥＴＵＲＮ Release helium gas XXXXXXXX ****** Compressor Unit Cold head cable Ｖ３ To Roughing Pump Figure 8-4 Cryopump Decontamination Procedure (1) 8-10 ULVAC CRYOGENICS INCORPORATED...
  • Page 75 After the pressure reaches below the atmospheric pressure, the valve (V3) can be fully opened. Therefore, monitor the pressure of the roughing pump head with an appropriate pressure gauge. The maximum allowable pressure for ULVAC’s small oil-sealed rotary pump and drypump is 0.01MPaG.
  • Page 76 The pressure relief valve on the refrigerator may work if the charge inlet of SUPPLY /RETURN at the compressor unit and SUPPLY /RETURN flexible hoses are connected reversely, and this requires maintenance servicing. Make sure that they are connected properly. 8-12 ULVAC CRYOGENICS INCORPORATED...

  • Page 77: Connecting Flexible Hoses

    ＲＥＭＯＴＥ ＮＯ．１ ＮＯ．２ ＮＯ．３ ＲＥＳＰＯＮＳＥ Cryopump Coldhead Cable Power Cable ＲＥＴＵＲＮ ＧＡＳ ＲＥＴＵＲＮ ＧＡＳ ＳＵＰＰＬＹ ＧＡＳ Connect Here ＷＡＴＥＲ ＩＮ ＩＮ ＷＡＴＥＲ ＯＵＴ Flexible Hose ＳＵＰＰＬＹ ＯＵＴ Cooling Water Line ＲＥＴＵＲＮ Figure 8-6 Connecting Flexible Hoses ULVAC CRYOGENICS INCORPORATED 8-13...
  • Page 78 Maintenance This page intentionally left blank. 8-14 ULVAC CRYOGENICS INCORPORATED...

  • Page 79: Troubleshooting

    Regarding various potential failures, the itemⅠto Ⅶ in Table A-1 explains its cause and measure respectively. When the trouble cannot be solved, please contact our Service Engineering Division or the nearest customer support center. MA0A001E.2012JE01 ULVAC CRYOGENICS INCORPORATED...
  • Page 80 Therefore, check unit. The refrigerator motor may be your control method to judge damaged if this caution is not whether the halt condition of the followed. refrigerator is normal or not. ULVAC CRYOGENICS INCORPORATED...
  • Page 81 If the cryopump still fails to cool down to 20K or lower even when the main valve is closed, the refrigerator unit may be out of order. Contact our Service Engineering Division or the nearest CS center. ULVAC CRYOGENICS INCORPORATED...
  • Page 82 Replacement of the indium sheet is required. ②Mounting bolts of 80K shield, If necessary, disassemble the 80K baffle, and 15K cryopanel. cryopump and retighten all screws. Replacement of the indium sheet is required. ULVAC CRYOGENICS INCORPORATED...
  • Page 83 Replace 15K cryopanel. performed at 13Pa or less for a Be sure not to perform rough long time using the oil-sealed pumping at 40Pa or less for a long rotary pump, the panel has time. been contaminated with oil. ULVAC CRYOGENICS INCORPORATED...
  • Page 84 Optimum voltage of the refrigera- tor unit is 144V for two-phase motor and 200V for three-phase motor. Because it should be a check under the hot line condition, an appropriate maintenance person in charge needs to check. ULVAC CRYOGENICS INCORPORATED...
  • Page 85 CRYO-U POWER OPERATING COMPRESSOR S/N REFRIGERATOR S/N Cryopump Measuring condition Compressor unit Remarks Temperature Pressure 【Pa】 stage stage 【 【 【 】 】 】 (*) Measure cooling water flow rate with flow meters for each compressor unit. ULVAC CRYOGENICS INCORPORATED...
  • Page 86 Troubleshooting This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...

  • Page 87: Flexible Hose

    ・ Avoid twisting the flexible hose especially when making final connection. ・ Keep away from water and salt to prevent corrosion. Do not put heavy things on the flexible hoses in order to prevent modification and crushing of them. MA0B001E,2010.01 ULVAC CRYOGENICS INCORPORATED...
  • Page 88 Flexible Hose This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...

  • Page 89: Conversion Of Thermometer Readings

    CRYO-U Cryopump Instruction Manual ® Appendix C CONVERSION OF THERMOMETER READINGS １． K(CA) Thermocouple Electromotive Force Temperature E.M.F. (mV) （Ambient Temperature：20℃） MA0C001E,2010.01 ULVAC CRYOGENICS INCORPORATED...
  • Page 90 The indicated value of the hydrogen vapor pressure gauge changes depending on the atmospheric pressure of the altitude. A true temperature can be read by applying the vapor pressure calculated by the following formula to the above figure. Vapor pressure [MPaG] = Indicated pressure－(0.1013－Atmospheric pressure at the altitude) ULVAC CRYOGENICS INCORPORATED...

  • Page 91: Principle Of Cryopump Operation

    This operation is called “regeneration” by which the performance of the cryopump can be recovered through the “temperature rise (exhaust of gas) -> degassing -> cooling” process. MA0D001E,2010.01 ULVAC CRYOGENICS INCORPORATED...

  • Page 92: Vapor Pressure Of Various Kinds Of Gas

    Principles of Cryopump Operation Temperature (K) [R.E.Honing and H.O.Hook: RCA Review (Sept. 1960)] Figure D-1 Vapor Pressure of Various Kinds of Gas ULVAC CRYOGENICS INCORPORATED...

  • Page 93: Principle Of Refrigerator Operation

    In this way, a refrigeration cycle returns to the first state. By repeating this refrigeration cycle, cryogenic temperature is obtained. Compressor unit High Displacer pressure pressure Valve A Valve B Thermal load High temp. temp. Expansion chamber (Low temperature) Regenerator Figure E-1 Principle of Refrigeration MA0E001E,2010.01 ULVAC CRYOGENICS INCORPORATED...
  • Page 94 Therefore, it is a highly efficient and reliable refrigeration cycle. In this manual, the refrigeration cycle with the mechanical driving system adopted by ULVAC CRYOGENICS INC is explained. Figure E-2 shows the principle of G-M cycle & P-V chart (P: pressure, V: volume in the expansion chamber).
  • Page 95 Moreover, since difference pressure is not applied to seals on the 1st stage and 2nd stage, the structure where the load to the seal is light has been adopted. Therefore, a long-lived, high reliability is acquired. ULVAC CRYOGENICS INCORPORATED...

  • Page 96: Two-Stage Refrigerator

    1 cycle P-V diagram W=∮PdV －P Volume of Expansion Chamber Figure E-2 Principle of G-M Cycle Operation 1st Displacer 1st Seal Regenerator Expansion chamber LOAD 2nd Displacer 2nd Seal Expansion chamber Figure E-3 Two-stage Regenerator LOAD Refrigerator ULVAC CRYOGENICS INCORPORATED...

  • Page 97: Dew Condensation

    Residual moisture is frozen during Go through the regeneration process Regeneration rough pumping again, confirm that the cryopump passes the pressure buildup check, and start refrigeration. ULVAC CRYOGENICS INCORPORATED...
  • Page 98 23.0 25.2 26.0 27.2 10.5 14.9 18.4 21.4 23.9 26.2 27.0 28.2 * The calculation is based on Sonntag’s equation. * When the ambient relative humidity is above 85%, dew condensation will form on the cryopump case. ULVAC CRYOGENICS INCORPORATED...

  • Page 99: Service Network

    ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
  • Page 100 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...

  • Page 101: Major Components

    The contents of “ Ⅲ . Pressure buildup check” has been revised. P.8-2 Table 8-1 Maintenance parts and intervals R10, R10R, RM10, R50, R50R, and RM50 refrigerator unit have been removed. P.8-3 Table 8-3 Consumables has been revised. Table A-1 CRYOPUMP Fault Diagnosis has been revised. ULVAC CRYOGENICS INCORPORATED...
  • Page 102 “1.3 Environmental Requirements” has been added. “8. Maintenance” has been revised. “Appendix F Dew Condensation” has been added. “SERVICE NETWORK” has been revised. 2018-05-09 2019MY13 “1.3 Environmental Requirements” has been modified. 2022-04-13 2022AL14 “Safety Instructions” has been revised. ULVAC CRYOGENICS INCORPORATED...

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