Ulvac CRYO-U Series Instruction Manual page 55

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CRYO-U Cryopump Instruction Manual
Table 5-2 Maximum Quantity of Gas That Can Be Processed Instantaneously
Model
CRYO-U6H
CRYO -U8H/U8H
U8H-U/U8HL
CRYO-U 10PU/U10H/
[Example] W hen U8H is us
allowa ble crossover pressure is calculat
Maximum allowable crossover
pressure (Pa)
In order to restrict the
recommended to control
(Guideline Qua
Maximum quantity of gas instantaneously
to keep the cryopanel tem
SP/
U10HL
ed and the vacuum chamber volume is 100L, the maximum
ed as follows
≦
† For Your Informati
stored quantity of gas an
the actual crossover pressure
ULVAC CRYOGENICS INCORPORATED
ntity to the Air)
processable (Pa•L)
perature below 20K
13300
20000
26600
20000 （Pa･L）
=
1 00（L）
on †
d extend the regeneration cycle, it is
to 40Pa or less.
200（Pa）
5-5