Ulvac CRYO-U Series Instruction Manual page 34

Cryopump Description
* The following drawings show the outline of t
[CRYO-U
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Inner kits①～④
①80K shield
②80K baffle
③15K cryopanel(1)
（C ondensation panel）
④15K cryopanel(2)
（Adsorption Panel）
1-8
he structure a
[CRYO-U
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®
8HSP]
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１０
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⑤Pump case
⑥Refrigerator unit
⑦1st stage
⑧2nd stage
⑨MBS-C CRYO METER
Major Components
Figure 1-3
ULVAC CRYOGENICS INCORPORATED
nd may differ from actual o
® ®
6H, U 8H]
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１０
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３
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１
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１１
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⑩Pressure relief valve
⑪Helium gas return connector
⑫Helium gas supply connector
⑬Refrigerator input power connector
nes.
®
[CRYO-U 8H-U]
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