Ulvac CRYO-U10H Manuals

Manuals and User Guides for Ulvac CRYO-U10H. We have 1 Ulvac CRYO-U10H manual available for free PDF download: Instruction Manual

Ulvac CRYO-U10H Instruction Manual

Ulvac CRYO-U10H Instruction Manual (106 pages)

CRYOPUMP

Brand: Ulvac | Category: Water Pump | Size: 3.48 MB

Table of Contents

Table of Contents
9
Cryo-U
12
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description
27
Typical CRYO-U
27
Cryopump System
27
Specifications
28
Environmental Requirements
29
External Drawing of CRYO-U
30
Cryopump
30
Major Components
35
SECTION 2 Inspection
37
2.1 Shipping List
37
2.2 First Inspection of Cryopump
38
SECTION 3 Quick Installation
39
Quick Installation
39
Quick Installation Process Flow
40
Auxiliary Equipments Required
41
Example of CRYO-U
42
Cryopump Vacuum System
42
Installation
42
Mounting the Cryopump to the Vacuum System
43
Connecting Roughing Pump
45
Connecting Purge Gas Line
45
Connecting Exhaust Pipe
46
Connecting Cooling Water Pipe
47
Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
47
Connecting the Cryopump to the Compressor Unit
47
Connecting Remote Wiring
48
Connecting Electrical Cables
48
Connecting Flexible Hoses
49
Prior to Startup
51
Rough Pumping
51
Pressure Buildup Test
52
Startup and Cooldown
52
Operation
52
Rough Pumping
52
Normal Operation
53
Crossover
54
Shutdown Procedures
56
Handling of Hazardous Materials
56
SECTION 6 Regeneration
57
The General
57
Regeneration Time
58
Warm-Up Method
58
Regeneration Flow Chart
60
Disconnecting Flexible Hose････････････････････････････7-1
65
Storage･･･････････････････････････････････････････････7-2
66
Disconnecting Flexible Hose
66
SECTION 8 Maintenance
69
8.1 Scheduled and Unscheduled Maintenance
69
8.2 Consumables
71
8.3 Cleaning the Cryopump
72
8.4 Charging Helium Gas
73
Helium Circuit Decontamination
76
A Troubleshooting
76
B Flexible Hose
77
Disconnecting Flexible Hose
77
Connecting Flexible Hoses
81
C Conversion of Thermometer Readings
93
D Principle of Cryopump Operation
95
Vapor Pressure of Various Kinds of Gas
96
E Principle of Refrigerator Operation
97
Principle of Refrigeration
97
Two-Stage Refrigerator
100
F Dew Condensation
101
Service Network
103

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