Ulvac CRYO-U Series Instruction Manual page 75

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CRYO-U Cryopump Instruction Manual
５．Open the charge valve slowly and perform the following instruction according to the state of
the compressor.
a. If the compressor unit is running under normal operating conditions, replenish it with
the pure helium gas until it reaches the operation pressure described in the
compressor instruction manual.
b. If the compressor unit is not running, replenish it with the pure helium gas until it
reaches to the static pressure which is indicated on the front panel.
If helium gas has been charged more than the prescribed pressure of 1.9MPaG or more, the
pressure relief valve on the refrigerator may be going to work. Therefore charge helium gas
slowly so that the pressure relief valve should not operate. On the other hand, the pressure
relief valve in the compressor unit is set at 2.5MPaG.
6. Close the charge valve after charging helium gas.
7. Close the regulator and remove the charging hose from the charge inlet.
The replenishment work of the gas for the compressor has been completed with this.
Cryopump
ＳＵＰＰＬＹ
ＰＲＥＳＳＵＲＥ
Remove Front Panel
Power Cable
ＳＵＰＰＬＹ
Flexible Hose
ＲＥＴＵＲＮ
Coldhead Cable
Cooling Water Line
F gu i re 8-1 Charging Helium Gas
ULVAC CRYOGENICS INCORPORATED
CAUTION
Charge pressure displayed
Compressor Unit
ＰＷＲ ＳＴＳ
１
ＲＤＹ ２
ＲＵＮ ３
ＣＨ１ ４
５
６
７
８
ＣＯＭ ＲＳＴ
Charging Hose
Charging Port
Bottle Valve
Regulator
Low Pressure High Pressure
High Purity Helium Bottle
8-7