Ulvac CRYO-U Series Instruction Manual page 106

Revisions
2013-06-13 2013JE10
2013-10-03 2013OR11
2013-11-08 2013NR12
2014-02-13 2014FY13
2017-11-06 2017NR14
2019-05-09 2019MY15
R-2
revised.
P.6-3 The content of "◇Assisted war-up using a heater" and
a CAUTION section have been revised.
P.6-3/6-5 Section 6.4 Regeneration Flow Chart
The contents of "Ⅲ. Pressure buildup check" has been
revised.
P.8-2 Table 8-1 Maintenance parts and intervals
R20, R20R, RM20, R50, R50R, and RM50 refrigerator unit
have been removed.
P.8-3 Table 8-3 CRYO-U®8H, U®8HSP, U®8H-U, U®8HL
Consumables
O-ring for U®8HL roughing port has been added.
Table A-1 CRYOPUMP Fault Diagnosis has been revised.
Yokkaichi CS contact information has been changed.
Cover: Export control policy has been revised.
"SERVICE NETWORK" has been revised.
Cover: Export control policy has been revised.
"Introduction" has been revised.
"SERVICE NETWORK" has been revised.
"SERVICE NETWORK" has been revised.
P.S-7 Figure 2 The description on "Exhaust line" has been
modified.
"Table1-1 Specifications" has been modified.
"1.3 Environmental Requirements" has been added.
"8. Maintenance" has been revised.
"Appendix F Dew Condensation" has been added.
"SERVICE NETWORK" has been revised.
"Table1-1 Specifications" has been modified.
ULVAC CRYOGENICS INCORPORATED