Ulvac CRYO-U Series Instruction Manual page 6

Cryopump
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the nearest customer support center with reference to the chapter of Service
Network. We ask for cooperation about the above.
6.General Precautions
(1) It is strictly prohibited to duplicate, open, and transfer this instruction
manual or any of its parts to a third person without written permission from
ULVAC CRYOGENICS.
(2) Information in this document might be revised without a previous notice for
the specification change and the improvement of the product.
(3) If you have any questions or comments on this document, please do not
hesitate to contact us. The phone numbers of local customer support centers
are listed at the end of this manual.
F-4
ULVAC CRYOGENICS INCORPORATED

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