Ulvac CRYO-U Series Instruction Manual
Bakeable type cryopump
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CRYOPUMP
® SERIES
CRYO-U
Bakeable Type Cryopump
Instruction Manual
Export Control Policy
Vacuum pumps that pump nitrogen gas at pumping speed of 15000L/s or
more fall under row 2(35) of appended table 1 of Japan's Export Trade
Control Order, which is based on international export control regimes.
Also, when applying a refrigerator system to a cryocooler for optical
sensors, the cryocooler falls under row 10(2) of appended table 1 of Japan's
Export Trade Control Order as well.
Customers must follow all related rules and regulations such as Foreign
Exchange and Foreign Trade Act and take appropriate procedures when
exporting or re-exporting those products.
D/N.MA00YBTE, 2019MH08
ULVAC CRYOGENICS INCORPORATED
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Summary of Contents for Ulvac CRYO-U Series
- Page 1 10(2) of appended table 1 of Japan’s Export Trade Control Order as well. Customers must follow all related rules and regulations such as Foreign Exchange and Foreign Trade Act and take appropriate procedures when exporting or re-exporting those products. D/N.MA00YBTE, 2019MH08 ULVAC CRYOGENICS INCORPORATED...
- Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
- Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
- Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
- Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
- Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
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Page 9: Table Of Contents
Figure 2-1 Example of Control Circuit for Baking ·································· 2-2 Figure 3-1 Example of Baking Vacuum System ···································· 3-1 Table 1-1 Ultimate Pressure of Bakeable Type Cryopump (Reference only)1-2 Table 1-2 Sheathed Heater Specifications (per unit) ···························· 1-2 Table 1-3 Flange Specifications·························································· 1-3 Ⅰ ULVAC CRYOGENICS INCORPORATED... - Page 10 Table of Contents This page intentionally left blank Ⅱ ULVAC CRYOGENICS INCORPORATED...
- Page 11 150ºC - 250 ºC to achieve ultra-high vacuum of lower than 10 Pa easily. Figure 1-1 Bakeable Type Cryopump <NOTE> The figure above is provided as an example and may differ from your system. ULVAC CRYOGENICS INCORPORATED...
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Page 12: Performance Of Bakeable Type Cryopump
If any insulation property is deteriorated, please replace the heater. Inspection should be conducted before applying current and check that the insulation resistance between the outside of atmospheric side sleeve and the lead wire is 10MΩ or more (500VDC megger). ULVAC CRYOGENICS INCORPORATED... -
Page 13: Flange Specifcations
(*) The gaskets for refrigerator flanges for previous models are not compatible with the current type. Cooling Water Pipe The Cooling Water Pipe Fitting is G1/8 female pipe parallel thread. The fitting may differ depending on the specifications of the cryopump. Refer to the External Drawing for the detailed information. ULVAC CRYOGENICS INCORPORATED... -
Page 14: Major Components
Enlarged Detail of Tip of Sheath Heater Approx. 175mm Terminal Sheath Heater Lead Wire Pump Body Sheath Heater Lead Wire φ1.0 φ1.0×120mm φ1.6 φ1.0×120mm ※ The appearance may change depending on the cryopump purchased. Figure 1-2 Major Components ULVAC CRYOGENICS INCORPORATED... -
Page 15: Chapter 2 Installation
Preparing Temperature Controllers for Baking and Overheat Protection Please prepare the two temperature controllers for baking. One is for maintaining the surface temperature of the cryopump body constant. The other is for overheat protection device to protect the components against damage. ULVAC CRYOGENICS INCORPORATED... - Page 16 ＣＴ１：Temperature controller for baking ＣＴ２：Temperature controller for overheat protection Ｔ１ ：Surface temperature of cryopump Ｔ２ ：Temperature of 80K shield SSR ：Solid state relay Signal line for set temperature control Figure 2-1 Example of Control Circuit for Baking ULVAC CRYOGENICS INCORPORATED...
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Page 17: Connecting Cooling Water
It is also effective for warm-up of the pump body using the sheath heater. CAUTION Do not cover the thermometer, gas introducing pipe, and valves with insulator. It overheats and damages the parts. ULVAC CRYOGENICS INCORPORATED... - Page 18 Installation CAUTION A cryopump with travelling base as an optional, the stay bolts connected to the trav elling base will be hot. Be careful not to accidentally touch them. ULVAC CRYOGENICS INCORPORATED...
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Page 19: Chapter 3 Baking
RV3 : Turbo Molecular Pump Valve IG2 : Vacuum Chamber Ionization Gauge RV4 : Turbo Molecular Pump Roughing Valve PiG3 : Turbo Molecular Pump Pirani Gauge RV5 : Bypass Valve Figure 3-1 Example of Baking Vacuum System ULVAC CRYOGENICS INCORPORATED... -
Page 20: Baking Method
Start the cryopump when the pressure inside has achieved 0.1Pa or less (The main valve, V1 is closed at this point). ６．Turn off the electricity to the heater after baking-out as necessary. ULVAC CRYOGENICS INCORPORATED... - Page 21 Subsequently perform baking for the vacuum chamber and then exhaust with the cryopump. By doing so, the best ultimate pressure in clean condition can be achieved. ULVAC CRYOGENICS INCORPORATED...
- Page 22 Baking This page intentionally left blank. ULVAC CRYOGENICS INCORPORATED...
- Page 23 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
- Page 24 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
- Page 25 “Introduction” and “SERVICE NETWORK” have been revised. 2014AL06 2014-04-18 P.2-2 The content has been modified. P.3-2 “Caution” has been modified. 2018-05-10 2018MY07 SERVICE NETWORK has been revised. 2019-03-11 2019MH08 Cover has been modified. 1. SPECIFICATIONS Table 1-1 Note has been added. ULVAC CRYOGENICS INCORPORATED...
- Page 26 Revision History This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
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