Ulvac CRYO-U Series Instruction Manual page 89

CRYO-U Cryopump Instruction Manual
®
CRYOPUMP S/N
COMPRESSOR S/N
REFRIGERATOR S/N
Measuring condition
(*) Measure cooling water flow rate with flow meters for each compressor unit.
Table A-2 Operating Log
Compressor unit
【
【
】
】
ULVAC CRYOGENICS INCORPORATED
®
CRYO-U POWER
OPERATING
LOG
Temperature
st
1 stage
【
】
Ｖ×
Cryopump
Pressure
nd 【Pa】
2 stage
φ
Remarks
A-7