Physical Data - Inficon ELT3000 Translation Of The Original Operating Instructions

INFICON

4.3.4 Physical data

ELT3000-Battery Leak-Detector-Operating-instructions-mina95en1-10-(2007)
Physical data
Detection limit
Minimum detectable leak
rate
Measurement range
Detectable masses
Mass spectrometer
Ion source
Time until ready for operation < 3 min
-6
1 x 10 mbar l/s (helium equivalent leak rate, at a
pressure difference of 1000 mbar to 0 mbar)
3 decades
2 to 200 amu
Quadrupole mass spectrometer
2 cathodes
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