Physical Data; Materials In The Gas Flow; Factory Settings - Inficon ELT Vmax Translation Of The Original Operating Instructions

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4.3.4 Physical data

4.3.5 Materials in the gas flow

4.4 Factory Settings

ELT Vmax Operating-instructions-minc98en1-01-(2405)
Minimum detectable leak rate
Measurement range
Detectable masses
Mass spectrometer
Ion source
Time until ready for operation
• Nickel-plated brassNickel-plated brass
• PTFE (polytetrafluorethylen)
• PU (polyurethane)
• PA (polyamid)
• POM (polyacetal)
• PBT (polybutylenterephthalat)
• NBR (Acrylnitril-Butadien-Kautschuk)
• steel
• Aluminum
• Nylon
• FKM & FPM (fluororubber)
• Quartz capillary
• Adhesive (Epotec 302-3M)
• Tungsten
Auto login
Default user
Supervisor PIN (default)
Pre-set product
Measuring mass
Calibration mass
Leak threshold value
600-301
-7
5 x 10 mbar l/s (helium equivalent leak
rate, at a pressure difference of
1000 mbar versus 0 mbar for 100% DMC
(dimethyl carbonate))
3 decades
2 to 200 amu
Quadrupole mass spectrometer
2 cathodes
< 3 min in normal operation
On
Supervisor
1111
Universal
59
59
1.00E-5 mbar*l/s
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