Hfig Board Gauge Specifications; Board Specifications/Descriptions - Varian XGS-600 Instruction Manual

Board Specifications/Descriptions

HFIG Board
The HFIG board operates all Varian hot filament gauges and most other available
Bayard-Alpert type hot filament ionization gauges including nude UHV types. The board
can be set up for all Varian hot filament gauges and allows you to set gauge emission
current, sensitivity value, and gas correction factor. The UHV range and E-Beam degas are
standard, as is dual filament control, remote I/O control of emission and filament selection,
and 0 to 10 V analog output.
Item
Supported Gauge Heads
Displayed Measurement Range*
Emission Current
Sensitivity Input Range
Gas Correction Factor Range
Degas
Analog Output
Error Detection
Gauge Connector
XGS-600 Gauge Controller
Table A-2 HFIG Gauge Specifications
❑ Varian 563, 564, 571, 572, UHV24, UHV24p, MBA-100,
MBA-200
❑ 5.0E-12 Torr to 1 mTorr (UHV24, UHV24p, 572)
❑ 5.0E-11 Torr to 10 mTorr (563, 571, MBA100, MBA200)
* This represents the ability of the controller to display pressure
values and not the capability of the gauge heads to accurately
measure pressure.
0.1 to 10.0 mA
00.1 to 99.9/Torr
0.01 to 9.99
E-Beam type, 600 V at 10 mA, enabled only when pressure is
below 1.0E-05 Torr
❑ Range: 0-10 VDC
❑ Slope: 1 V per decade log
❑ Characteristic: output voltage = Log (Pressure) + 11
❑ Output when gauge OFF or Error = 10V
❑ Load Impedance: >10 kOhms
❑ Open Filament
❑ Shorted Grid
❑ Over Temperature
❑ Over Pressure (1mT or 10mT dependant on tube type selected)
❑ Collector: SMB coax
❑ Fil and Grid:AMP 5 pos Univ Mate-N-Lok
Description
A-3