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Varian Manuals
Controller
XGS-600
Instruction manual
Table Of Contents - Varian XGS-600 Instruction Manual
Gauge controller
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Table Of Contents
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Contents
Table of Contents
Troubleshooting
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Product View
2
Table Of Contents
5
Hazard And Safety Information
9
Preface
9
Emc Warnings
10
Backwards Compatibility
11
Part Number Scheme
11
Introduction
11
Xgs-600 Front And Back Description
12
Unit Dimensions
13
Installation
15
Connect The Unit
15
Gauge Board Rear Connections
15
Accessories
16
Gauge Selection Chart
17
Ba Cross Reference
18
Operating Instructions
21
Operational Screens
21
Screen Flow
21
General Navigation And Data Entry
22
Modifying A Number
22
Navigating To Another Screen
22
Main Screen
23
Soft Keys
23
Auto-On Indicator
24
Pressure Reading
24
Control
25
Degas (Hfig Only)
25
Cal (Cnv Only)
25
Set-Pts (Set Points)
26
Set Point Screen
27
Sensor Setup Screen
29
Default Setup Values By Ion Gauge Type
31
Selecting Emission Current For Hot Filament Ion Gauges
32
Hfig Smart Overpressure Protection
33
Setting The Auto-On Pressure Level
33
System Setup Screen
34
Software Versions Screen
35
Large Font Screen
36
Service And Troubleshooting
37
Board Configuration Rules
37
Sensor Board Replacement Procedure
38
Troubleshooting
41
Error Codes
41
Appendix A. Xgs-600 Gauge Specifications
45
Instrument Specifications
45
Hfig Board Gauge Specifications
47
Board Specifications/Descriptions
47
Convection Board Specifications
48
Img Board Specifications
49
I/O Pin Assignments
50
The Unit Vs Multigauge And Sentorr Backwards Compatibility Detail
52
Backwards Compatible Features
52
Non-Backwards Compatible Features
52
Feature Compatibility Table
53
Cable Compatibility Table
54
Command Syntax And Definitions
55
Appendix B. Serial Commands
55
Notes To Owners Of Multi-Gauge And Sentorr
62
Using Hyperterminal
63
Windows Hyperterminal Set-Up Instructions
63
Appendix C. Gas Correction Factor Table
65
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Xgs-600 Front and Back Description
Connect the Unit
Operating Instructions
Operational Screens
Instrument Specifications
I/O Pin Assignments
Appendix B. Serial Commands
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Table of Contents
Troubleshooting
Service and Troubleshooting
37
Troubleshooting
41
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