Default Setup Values By Ion Gauge Type - Varian XGS-600 Instruction Manual

Gauge controller
Table of Contents

Advertisement

Table 3-1 Default Setup Values by Ion Gauge Type
HFIG
Default Emis
Sensor Model
Current (ma)
MBA100
MBA200
571
572
563
564
UHV24 (default)
UHV24p
IMG 100 (default)
IMG 300
+ Not a user-variable setup parameter
* If Emission Current is set:
Less than 0.7 mA, overpressure is 10 mT (or equivalent in mbar or Pascal).
Greater than 0.7 mA, overpressure is 1 mT (or equivalent in mbar or Pascal).
AUTO-ON IF GAUGE This field is active for HFIG and IMG gauges only. Use this field
IS LESS THAN
SENSITIVITY
EMIS CURRENT (mA)
XGS-600 Gauge Controller
Default
Sensitivity
0.1
25
0.1
25
4
10
4
10
4
10
0.1
6
4
25
4
20
N/A
1
N/A
2.5
along with IS LESS THAN to select a Convection gauge and assign
a pressure level below which AUTO-ON engages.
When Auto-On is activated, you cannot manually turn on or off the
ion gauge; it is controlled by the assigned convection gauge.
- - -
Select
to deactivate Auto On.
Use this field with Auto-ON to enter pressure (max allowed 1T) at
which to trigger the ion gauge. There is a hysteresis of 5mT built in
to the software to prevent fluctuating ion gauge emission from
triggering on/off. For example, if this field is set to 3E-3T, Auto-ON
will turn on the ion gauge at 3E-3T and off at 8E-3T.
This field is active for HFIG and IMG gauges only. Use this field to
raise or lower the sensitivity.
This field is active for HFIG gauges only. Use this field to configure
the EMIS Current. See Table 3-1 on page 3-11 for sensor default
values.
Over-
Default
pressure
Degas Power
limit (mT)+
(mA)
1-10 mT*
1
1-10 mT*
1
1-10 mT*
10
1
10
1-10 mT*
10
1-10 mT*
10
1
10
1
10
10 mT
N/A
2
N/A
Number of
Filaments
1
2
1
2
1
1
2
2
N/A
N/A
3-11

Advertisement

Table of Contents
loading

Table of Contents