Varian XGS-600 Instruction Manual page 42

Tips
Varian offers reference ionization B/A gauges, which are sealed off at approximately 5E–6
Torr/6.6E–4 Pa, as well as a Convection gauge simulator which can switch between
atmosphere and vacuum simulation. These devices are extremely helpful in troubleshooting
a vacuum system problem by isolating the defective component.
Troubleshooting Table
Problem
Hot filament gauge hunts or
cycles around 1E-5Torr (1E-3Pa)
IMG displays readings in the
–11 Torr range when the
pressure is known to be higher
Sometimes after a long time
period the reading becomes
correct
HFIG bd reads UHV when
pressure is know to be higher
ERR appears in rightmost
column of setpoint screen
Duplicate message appears
when trying to enter a User
Label
User Label not accepted
4-6
XGS-600 Gauge Controller
NOTE
These reference gauges and stimulators are not NIST traceable
calibrated gauges, and should not be used for calibration.
Table 4-2 Troubleshooting
Auto emission adjustment
occurs at this pressure.
Increased filament power causes
a rise in pressure. Condition will
clear as system pressure
decreases.
❑
IMG cable not plugged in
❑
IMG has not started
❑
IMG took a long time to start
❑
Emission current not estab-
lished due to worn out Th-Ir
filament
❑
Collector cable unplugged
❑
HFIG board failure
Setpoint OFF pressure is < than
ON pressure
❑
Label is the same as another
User Label
❑
User input violates User
Label rules
Cause
If taking pressure measurements
in this range, reduce emission
current setting for the gauge to
1.0 mA or less to turn off feature
1. Check that cable is attached
2. Sometimes IMG's are hard to
start when turned on at high
vacuum
3. Raise pressure
4. Clean or replace IMG
1. Check collector connection at
gauge (glass BA) and at XGS-600
2. Replace gauge or filament
3. Return unit for repair/replace
HFIG bd
Correct pressure entries so the
setpoint ON pressure is less than
the OFF pressure
Create a different entry
See "Sensor Setup Screen" on
page 3-9 for User Label rules
Action