Gauge Selection Chart - Varian XGS-600 Instruction Manual

Controller Gauge Card
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XGS-600 Gauge Controller
Table 2-2 Gauge Selection Chart
Gauge
Type Recommendation
ConvecTorr Best overall convection gauge
for accuracy repeatability,
secure connection
536 Same vacuum performance
as the ConvecTorr but
without bayonet connector
531 Most economical rough
gauge
572 (glass) Most popular general purpose
HV gauge (hot filament)
563 (glass) Best general purpose HV
gauge (hot filament) for
overall performance and
reliability
571 (glass) Same as 563 without
platinum coating
MBA-100 Break resistant HV gauge
(one
(hot filament)
filament,
metal case)
MBA-200
(two
filaments,
metal case)
IMG-100 Most durable and fastest
responding HV gauge (cold
Inverted
cathode)
Magnetron
Gauge Characteristics
• Stainless steel
• Pipe thread, KF and CFF
• Locking bayonet connector
• Stainless steel
• Pipe thread, KF and CFF
• Lowest cost
• Mild steel
• Pipe thread
-9
• Measures to 1 x 10 Torr
• Tungsten filaments - More accurate and repeatable
• Glass - Can see when it is on
-9
• Measures to 1 x 10 Torr
• Thoriated iridium filament -
More robust with better burnout resistance
• Glass - Can see when it is on
• Platinum coating - Provides higher performance in the
-4
10 range and a measure of EMI shielding
• Less expensive than the 563
• Measures to 10-9 Torr
• General purpose hot filament with metal housing (not
glass) , so it will not break
• Uses less power than glass gauges.
• Well shielded
• Available in tungsten and thoriated iridium filament
(see 572 and 563 above)
• General purpose-measures to 2 x 10-9 Torr
• Small, reliable, extremely rugged - Will not burn out
• Very fast response - < 20 milliseconds
• Less accurate and repeatable than hot filament
• Longer starting in high vacuum than a hot filament
• Can be cleaned
2-3