Cations - Omron ZX2-LDA41 User Manual

ZX2-LD50V
Side-to-side inclination with respect
to flat mirror
3.0
2.5
CONTENTS
2.0
1.5
1.0
0.5
0
INTRODUCTION
- 0.5
- 1.0
- 1.5
- 2.0
PREPARATION
- 2.5
FOR
- 3.0
- 5 - 4
MEASUREMENT
FAR side
FLOW OF
Side-to-side inclination with respect
OPERATION
to silicon wafer
3.0
2.5
2.0
BASIC
1.5
SETUP
1.0
0.5
0
- 0.5
MAIN
APPLICATIONS - 1.0
& SETTING
- 1.5
METHODS
- 2.0
- 2.5
- 3.0
Height
- 5 - 4
FAR side
Steps
and
Side-to-side inclination with respect
Warpage to glass
3.0
Double
2.5
Sheet
2.0
1.5
Detection
1.0
0.5
0
Thickness
- 0.5
- 1.0
- 1.5
- 2.0
Positioning
- 2.5
- 3.0
- 5 - 4 - 3
FAR side
Eccentricity
and Surface
Deflection
DETAILED
SETTINGS
TROUBLE-
SHOOTING
SPECIFI-

CATIONS

INDEX
SETTING
TRANSITION
CHARTS
148
Engineering Data (Reference Value)
-
-
+
Inclination
-
Inclination
- 3 - 2 - 1 0 1 2 3 4 5
NEAR side
Measurement center distance
Displacement [mm]
-
-
+
Inclination
-
Inclination
- 3 - 2 - 1 0 1 2 3 4 5
NEAR side
Measurement center distance
Displacement [mm]
-
-
+
Inclination
-
Inclination
- 2 - 1 0 1 2 3 4 5
NEAR side
Measurement center distance
Displacement [mm]
Front-to-back inclination with respect
to flat mirror
3.0
2.5 -
-
10. 5
2.0
1.5 +
Inclination
-
Inclination
1.0
0.5
0
- 0.5
- 1.0
- 1.5
- 2.0
- 2.5
- 3.0
- 5 - 4 - 3 - 2 - 1 0 1 2 3 4
FAR side NEAR side
Measurement center distance
Displacement [mm]
Front-to-back inclination with respect
to silicon wafer
3.0
-
2.5
-
10. 5
2.0
1.5 +
Inclination
-
Inclination
1.0
0.5
0
- 0.5
- 1.0
- 1.5
- 2.0
- 2.5
- 3.0
- 5 - 4 - 3 - 2 - 1 0 1 2 3 4
NEAR side
FAR side
Measurement center distance
Displacement [mm]
Front-to-back inclination with respect
to glass
3.0
-
2.5
-
10. 5
2.0
1.5 +
Inclination
-
Inclination
1.0
0.5
0
- 0.5
- 1.0
- 1.5
- 2.0
- 2.5
- 3.0
- 5 - 4 - 3 - 2 - 1 0 1 2 3 4
FAR side NEAR side
Measurement center distance
Displacement [mm]
5
5
5
ZX2 User's Manual