Ulvac CRYOPUMP CRYO-U Series Instruction Manual page 67

CRYO-U Cryopump Instruction Manual
®
8.2. Consumables
Following O-rings and gaskets used for cryopump listed below are consumables. Replace it
with new ones if necessary.
Table 8-2
Parts
Mounting flange
Accessory flange（C-type）
Accessory flange （UVG-40）
Refrigerator flange
Pressure relief valve
Notes: 1) Material of O-ring: Recommend Viton.
CRYO-U ® 20H Consumables （ ）:type
Mounting flange
2) Type N of O-ring is based on the standard enacted by ULVAC Inc.
Other types of O-ring are based on JIS or ANSI standard.
ULVAC CRYOGENICS INCORPORATED
UVG-500
O-ring
(V530)
O-ring (AS568-020)
O-ring (V55)
O-ring (G115)
O-ring (N5)
ISO500
O-ring
(ISO530)
8-3