Disposal Consideration - Ulvac CRYOPUMP CRYO-U Series Instruction Manual

Regulations and the ordinance concerning industrial waste treatment are provided in the
country and region to discard. When disposing our products, please process abandonment
according to relevant regulations and ordinance, etc.
When it seems that the cryopump or refrigerator has been used to evacuate a toxic or
dangerous material, you must contact a safety supervisor before discarding, and discard it
after removing the poisonous material according to directions of the safety supervisor.
We will offer you Material Safety Data Sheet (called MSDS) of our products upon your request.
If you have any questions, please contact our Service Engineering Division or the nearest
customer support center.
MZIW001E,2010.01

Disposal Consideration

WARNING
ULVAC CRYOGENICS INCORPORATED IW-1