Ulvac CRYOPUMP CRYO-U Series Instruction Manual page 66

Maintenance
S: Scheduled maintenance
Item
Cryopump
U
80K baffle
U 15K cryopanel
replacement
U Cryopump cleaning
S Insulation properties of
heater for regeneration
(*1)
S Pressure relief valve
Calibration of cryometer
U
Refrigerator unit
S Seal kit replacement
S Driver assembly
Replacement
S
Motor bearing replacement
S
Cylinder bolt replacement
Locking pin
Compression spring
S Displacer replacement
S Valve body replacement
U Other parts replacement
Compressor unit
S Adsorber replacement
(*1): Only applicable to a cryopump system with heater.
8-2
Table 8-1 Maintenance Parts and Intervals
U: Unscheduled maintenance or part replacement at fault
Parts
15K cryopanel
Heater
Pressure
relief valve
MBS-C Cryometer
Seal kit
Driver bearing
Valve bearing
Set screw
Motor bearing
cylinder bolt
Locking pin
Compression spring
st nd
1 /2 stage of
displacer
Intake/Exhaust
body
Other parts
Adsorber
ULVAC CRYOGENICS INCORPORATED
Interval
At fault
Every month
Once or twice a
month
At fault
R80/R80RT/RM80T
16,000 hours
16,000 hours
16,000 hours
valve
16,000 hours
At fault
Refer to the compressor unit instruction manual.
Remarks
When reassembling,
be sure to use new
indium gasket.
Replace when 10MΩ
or less
Confirm the safety of
exhaust gas
Use the (paid)
calibration service.
The maintenance
interval may differ
depending of the
frequency of usage.